摘要:
A projection system is disclosed including a light source for producing an illumination light flux, and a light valve for converting the illumination light flux incident on the light valve into a modulated light flux. The projection system also includes a front lens system having a front optical axis. The front lens system is disposed relative to the light source and the light valve to transmit the illumination light flux to the light valve, and to transmit the modulated light flux toward a rear lens system having a rear optical axis that is displaced from but parallel to the front optical axis. The rear lens system is disposed relative to the front lens system to transmit the modulated light flux from the front lens system onto a suitable surface for viewing.
摘要:
A projection display apparatus includes a light source configured to emit light, at least one reflective liquid crystal device configured to generate an image by modulating a polarization of the light emitted from the light source and reflecting the light, an imaging lens configured to form a real image of the image generated by the reflective liquid crystal device, a quarter-wave plate disposed between the reflective liquid crystal device and the imaging lens, an image splitter configured to include at least one reflecting plane and spatially split the real image into at least two split real images by reflecting the real image on the reflecting plane, at least two projection lenses configured to form the split real images again on a screen, and a phase difference corrector configured to correct a phase difference between a p-polarized light and an s-polarized light generated by the reflecting plane.
摘要:
A projection display apparatus includes a light source configured to emit light, at least one reflective liquid crystal device configured to generate an image by modulating a polarization of the light emitted from the light source and reflecting the light, an imaging lens configured to form a real image of the image generated by the reflective liquid crystal device, a quarter-wave plate disposed between the reflective liquid crystal device and the imaging lens, an image splitter configured to include at least one reflecting plane and spatially split the real image into at least two split real images by reflecting the real image on the reflecting plane, at least two projection lenses configured to form the split real images again on a screen, and a phase difference corrector configured to correct a phase difference between a p-polarized light and an s-polarized light generated by the reflecting plane.
摘要:
A beam emitted from a first light source is shed on the surface of a rotating wafer to form a beam spot. Scattered light arising from foreign matter and other defects on the surface of the wafer is detected in a plurality of directions and output in the form of a signal. Vertical movement of the wafer surface is detected by using white light or broadband light from a second light source. The position of the beam spot on the wafer surface is corrected in accordance with the information on the detected vertical movement for the purpose of minimizing a coordinate error that may arise from the vertical movement of the wafer surface. Further, the emission direction and emission position of light generated from the first light source are corrected to minimize a coordinate error that may arise from variations of the first light source. These corrections are made to enhance the accuracy of the coordinates of detected foreign matter and other defects. Moreover, the illumination beam spot diameter is corrected to prevent the detection sensitivity and foreign matter coordinate detection error from varying from one apparatus to another.
摘要:
A cross dichroic prism color-synthesizes a plurality of color lights having entered therein separately and emits color-synthesized light to a projection lens. The cross dichroic prism includes a first dichroic film; and a second dichroic film intersecting the first dichroic film so as to pass through the first dichroic film. The cross dichroicprism is configured so that a color light having entered the cross dichroic prism and having become diffracted at a gap created in the first dichroic film over an area where the second dichroic film passes through the first dichroic film is not projected through the projection lens.
摘要:
A projection display apparatus comprises a modulator, an analyzer, and projecting optical system. The modulator includes two-dimensionally arrayed pixel units and it modulates an incident light and emits the modulated light. The analyzer analyzes the emitted light from the modulator. The projection optical system projects the analyzed light from the analyzer. The analyzer includes a polarized beam splitter having a pair of prisms and an adhesive layer held between the pair of prisms. The difference in thickness between thin and thick portions of the adhesive layer is set equal to a predetermined value or less, based on a pixel pitch of the modulator.
摘要:
A projection display apparatus comprises a modulator, an analyzer, and projecting optical system. The modulator includes two-dimensionally arrayed pixel units and it modulates an incident light and emits the modulated light. The analyzer analyzes the emitted light from the modulator. The projection optical system projects the analyzed light from the analyzer. The analyzer includes a polarized beam splitter having a pair of prisms and an adhesive layer held between the pair of prisms. The difference in thickness between thin and thick portions of the adhesive layer is set equal to a predetermined value or less, based on a pixel pitch of the modulator.
摘要:
An optical lens is disclosed that is suitable for use in a line scanner or analogous device. The lens has multiple optical axes individually corresponding to a respective refractive combination comprising a first and an opposing second refractive surface. The lens is movable, preferably by rotation about an axis, relative to an axis of light propagation so as to permit selection of a desired refractive combination by aligning the optical axis of the refractive combination with the axis of light propagation.
摘要:
A projection apparatus includes a light source having a light emitting portion having a finite size, a concave reflecting mirror for condensing light from the light source, a condenser lens unit for converting the beam of light from the concave reflecting mirror into a substantially collimated beam of light, a light valve for reflecting the beam of light from the condenser lens unit and spatially modulating the beam of light on the basis of predetermined image information, and a projection optical system for imaging the spatially modulated beam of light on a predetermined surface, a lens unit for condensing the beam of light from the light valve in the inside off-illumination area of the beam of light formed by the concave reflecting mirror and the condenser lens unit being disposed between the light valve and the projection optical system, a light dividing element for directing the beam of light from the condenser lens unit to the light valve and for directing the beam of light condensed by the lens unit to the projection optical system being disposed between the condenser lens unit and the light valve.
摘要:
A liquid crystal display apparatus is provided. The liquid crystal display apparatus includes at least one incidence-side polarizer, a liquid crystal panel, at least one output-side polarizer, and a mechanism for turning each of the incidence-side polarizer and the output-side polarizer around an optical axis. The incidence-side polarizer is made of an inorganic material. The liquid crystal panel is provided for modulating the polarized state of light output from the incidence-side polarizer to output the modulated light. The output-side polarizer is made of an inorganic material for outputting the light incident from the liquid crystal panel.