WIRE GRID POLARIZER WITH PROTECTIVE CAP

    公开(公告)号:US20250147215A1

    公开(公告)日:2025-05-08

    申请号:US19014516

    申请日:2025-01-09

    Applicant: Moxtek, Inc.

    Abstract: Each wire 12 of a wire grid polarizer can include a cap 22 on a reflective rib 21. The cap 22, with dimensions and material as specified herein, can protect the reflective rib 21 from corrosion and can improve performance of the wire grid polarizer. The cap 22 can be located on the distal end 21d and the pair of sidewalls 21S of the reflective rib 21. Cap 22 chemistry can include CO, C═O, COO, aluminum fluoride, and aluminum oxide. Each cap 22 can have a maximum thickness ThCS on the sidewall 21S of the reflective rib 21 in an upper 50% (above plane 31) of the wire 12 farthest from the substrate 11. Each cap 22 can have a maximum thickness ThCS on the sidewall 21S that is greater than a maximum thickness ThCD of the cap 22 on the distal end 21d.

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