公开(公告)号：US09482217B2

公开(公告)日：2016-11-01

申请号：US14538979

申请日：2014-11-12

Applicant: Murata Manufacturing Co., Ltd.

Inventor： Atsuhiko Hirata ,  Yoshinori Ando ,  Takenobu Maeda ,  Yukiharu Kodama ,  Kenta Omori

IPC: F04B17/03 ,  F04B43/04 ,  F04B45/047

CPC classification number: F04B43/046 ,  F04B45/047 ,  F04D33/00

Abstract: A fluid control device includes a vibrating plate unit, a driver, and a flexible plate. The vibrating plate unit includes a vibrating plate with first and second main surfaces, a frame plate surrounding the vibrating plate, and a link portion linking the vibrating plate and the frame plate and elastically supporting the vibrating plate against the frame plate. The driver is on the first main surface of the vibrating plate, and vibrates the vibrating plate. The flexible plate having a hole faces the second main surface of the vibrating plate, being fixed to the frame plate. At least a portion of the vibrating plate and the link portion are thinner than the thickness of the frame plate so that the surface of the portion of the vibrating plate and the link portion, on the side of the flexible plate, can separate from the flexible plate.

公开(公告)号：US10465672B2

公开(公告)日：2019-11-05

申请号：US15333359

申请日：2016-10-25

Applicant: Murata Manufacturing Co., Ltd.

Inventor： Atsuhiko Hirata ,  Yukiharu Kodama ,  Kenta Omori

IPC: F04B43/00 ,  F04B17/00 ,  F04B43/04 ,  F04B45/047 ,  H01L41/09

Abstract: A piezoelectric pump includes a leaf spring including a disc portion defining an actuator, an outer frame portion defining a housing, and an elastic support portion. The actuator flexurally vibrates from a center portion of a principal surface thereof to an outer periphery thereof. The elastic support portion includes a beam portion and connection portions and elastically supports the disc portion on the outer frame portion. The beam portion extends in a gap between the disc portion and the outer frame portion in a direction along an outer periphery of the disc portion. A first of the connection portions connects the beam portion to the disc portion. Second and third connection portions are offset from the first connection portion and connect the beam portion to the outer frame portion.

公开(公告)号：US09506464B2

公开(公告)日：2016-11-29

申请号：US13908022

申请日：2013-06-03

Applicant: Murata Manufacturing Co., Ltd.

Inventor： Atsuhiko Hirata ,  Yukiharu Kodama ,  Kenta Omori

IPC: F04B17/00 ,  F04B45/047 ,  F04B43/04 ,  H01L41/09

CPC classification number: F04B43/0054 ,  F04B17/003 ,  F04B43/046 ,  F04B45/047 ,  F04B2203/0406 ,  H01L41/0973

Abstract: A piezoelectric pump includes a leaf spring including a disc portion defining an actuator, an outer frame portion defining a housing, and an elastic support portion. The actuator flexurally vibrates from a center portion of a principal surface thereof to an outer periphery thereof. The elastic support portion includes a beam portion and connection portions and elastically supports the disc portion on the outer frame portion. The beam portion extends in a gap between the disc portion and the outer frame portion in a direction along an outer periphery of the disc portion. A first of the connection portions connects the beam portion to the disc portion. Second and third connection portions are offset from the first connection portion and connect the beam portion to the outer frame portion.

Abstract translation: 压电泵包括板簧，其包括限定致动器的盘部分，限定壳体的外框部分和弹性支撑部分。 致动器从其主表面的中心部分弯曲地振动到其外周。 弹性支撑部分包括梁部分和连接部分，并且弹性支撑外框部分上的盘部分。 梁部分在盘部分和外框架部分之间的间隙沿着盘部分的外周的方向延伸。 第一连接部分将梁部分连接到盘部分。 第二和第三连接部分从第一连​​接部分偏移并且将梁部分连接到外部框架部分。

公开(公告)号：US10006452B2

公开(公告)日：2018-06-26

申请号：US13951490

申请日：2013-07-26

Applicant: Murata Manufacturing Co., Ltd.

Inventor： Atsuhiko Hirata ,  Kenta Omori

IPC: F04B43/04

CPC classification number: F04B43/04 ,  F04B43/043 ,  F04B43/046

Abstract: In a method for adjusting a fluid control apparatus, in a pressing step, a piezoelectric pump is placed on a stage with a cover plate facing upward, the stage is moved up, and a center portion of a principal surface of the cover plate on a side opposite to a diaphragm is pressed with a pressing pin. As a result, the cover plate and the base plate are shaped so as to warp convexly toward the diaphragm side, and a portion joined to a flexible plate is pulled, such that the flexible plate is caused to warp convexly toward the diaphragm side. Thus, residual tensile stress occurs in a movable portion of the flexible plate. Therefore, due to the residual tensile stress, the tensile stress of the movable portion of the flexible plate is increased.

公开(公告)号：US11047376B2

公开(公告)日：2021-06-29

申请号：US16578438

申请日：2019-09-23

Applicant: Murata Manufacturing Co., Ltd.

Inventor： Atsuhiko Hirata ,  Yukiharu Kodama ,  Kenta Omori

IPC: F04B45/047 ,  F04B17/00 ,  F04B43/04 ,  H01L41/09 ,  F04B43/00

Abstract: A piezoelectric pump includes a leaf spring including a disc portion defining an actuator, an outer frame portion defining a housing, and an elastic support portion. The actuator flexurally vibrates from a center portion of a principal surface thereof to an outer periphery thereof. The elastic support portion includes a beam portion and connection portions and elastically supports the disc portion on the outer frame portion. The beam portion extends in a gap between the disc portion and the outer frame portion in a direction along an outer periphery of the disc portion. A first of the connection portions connects the beam portion to the disc portion. Second and third connection portions are offset from the first connection portion and connect the beam portion to the outer frame portion.