公开(公告)号：US09726690B2

公开(公告)日：2017-08-08

申请号：US14736547

申请日：2015-06-11

Applicant: Murata Manufacturing Co., Ltd.

Inventor： Masahiro Kitai ,  Masayuki Ichimaru

IPC: B81B3/00 ,  G01P15/08 ,  G01P15/12 ,  G01P15/18 ,  H01L29/84

CPC classification number: G01P15/0888 ,  G01P15/123 ,  G01P15/18 ,  H01L29/84

Abstract: An angular acceleration sensor includes a planar surface extending along an X-Y plane, a fixed portion, a weight, a beam, and piezoresistors. The weight is supported by the fixed portion. The beam extends along an Y-axis and is connected to the fixed portion and the weight. The beam includes through-holes extending therethrough in a Z-axis direction and protrusions protruding in an X-axis direction. The positions of the piezoresistors in the Y-axis direction overlap those of the through-holes and are displaced from those of the width-direction protrusions.

公开(公告)号：US09682853B2

公开(公告)日：2017-06-20

申请号：US14736327

申请日：2015-06-11

Applicant: Murata Manufacturing Co., Ltd.

Inventor： Masahiro Kitai ,  Masayuki Ichimaru

IPC: B81B3/00 ,  G01P15/08 ,  G01P15/12 ,  H01L29/84

CPC classification number: B81B3/0051 ,  B81B3/0021 ,  B81B2201/0235 ,  G01P15/0888 ,  G01P15/123 ,  H01L29/84

Abstract: An angular acceleration sensor includes a planar surface extending along an X-Y plane, a fixed portion, a weight, a beam, and piezoresistors. The weight is supported by the fixed portion. The beam extends along a Y-axis and is connected to the fixed portion and the weight. A width of the beam in an X-axis direction is larger than a width of the connection portion at which the beam is connected to the fixed portion.