公开(公告)号：US09983003B2

公开(公告)日：2018-05-29

申请号：US14064371

申请日：2013-10-28

Applicant: Murata Manufacturing Co., Ltd.

Inventor： Masayuki Ichimaru

IPC: G01C19/56 ,  G01P15/08

CPC classification number: G01C19/56 ,  G01P15/0888

Abstract: An angular acceleration detection device includes a rotating weight, a fixed portion, a support beam, and a detection portion. The rotating weight is rotatable about a Z-axis with respect to the fixed portion by action of an inertial force generated by an angular acceleration about the Z-axis. The fixed portion is disposed at a position spaced from the rotating weight. The support beam is disposed in an X-Y plane between the fixed portion and the rotating weight, the support beam elastically supporting the rotating weight with respect to the fixed portion. The detection portion outputs a detection signal corresponding to stress generated in the support beam. A gravity center position of the rotating weight is aligned with the support beam when viewed in a Z-axis direction.

公开(公告)号：US09726690B2

公开(公告)日：2017-08-08

申请号：US14736547

申请日：2015-06-11

Applicant: Murata Manufacturing Co., Ltd.

Inventor： Masahiro Kitai ,  Masayuki Ichimaru

IPC: B81B3/00 ,  G01P15/08 ,  G01P15/12 ,  G01P15/18 ,  H01L29/84

CPC classification number: G01P15/0888 ,  G01P15/123 ,  G01P15/18 ,  H01L29/84

Abstract: An angular acceleration sensor includes a planar surface extending along an X-Y plane, a fixed portion, a weight, a beam, and piezoresistors. The weight is supported by the fixed portion. The beam extends along an Y-axis and is connected to the fixed portion and the weight. The beam includes through-holes extending therethrough in a Z-axis direction and protrusions protruding in an X-axis direction. The positions of the piezoresistors in the Y-axis direction overlap those of the through-holes and are displaced from those of the width-direction protrusions.

公开(公告)号：US09682853B2

公开(公告)日：2017-06-20

申请号：US14736327

申请日：2015-06-11

Applicant: Murata Manufacturing Co., Ltd.

Inventor： Masahiro Kitai ,  Masayuki Ichimaru

IPC: B81B3/00 ,  G01P15/08 ,  G01P15/12 ,  H01L29/84

CPC classification number: B81B3/0051 ,  B81B3/0021 ,  B81B2201/0235 ,  G01P15/0888 ,  G01P15/123 ,  H01L29/84

Abstract: An angular acceleration sensor includes a planar surface extending along an X-Y plane, a fixed portion, a weight, a beam, and piezoresistors. The weight is supported by the fixed portion. The beam extends along a Y-axis and is connected to the fixed portion and the weight. A width of the beam in an X-axis direction is larger than a width of the connection portion at which the beam is connected to the fixed portion.

公开(公告)号：US10429255B2

公开(公告)日：2019-10-01

申请号：US15433158

申请日：2017-02-15

Applicant: Murata Manufacturing Co., Ltd.

Inventor： Yuya Genmei ,  Jiro Inoue ,  Masayuki Ichimaru

IPC: G01L1/00 ,  G01L1/16 ,  G01B7/16 ,  H01L41/047 ,  H01L41/04 ,  H01L41/053 ,  H01L41/113

Abstract: A piezoelectric sensor is fixed to a detection object and detects distortion of the detection object includes first and second principal surfaces, and extends in the lengthwise direction. The piezoelectric sensor includes a piezoelectric body whose polarization axis extends in a direction parallel or substantially parallel to the lengthwise direction, and first and second detecting electrodes that are provided on a surface of the piezoelectric body and that extend in a direction parallel or substantially parallel to the lengthwise direction. Distortion of the detection object is detected based on electric output corresponding to shear stress of the piezoelectric body.