公开(公告)号：US20230046600A1

公开(公告)日：2023-02-16

申请号：US17974582

申请日：2022-10-27

Applicant: Murata Manufacturing Co., Ltd.

Inventor： Shingo CHIDA

IPC: G01P15/09 ,  G01P1/02

Abstract: An acceleration detection device includes a board including first and second surfaces, an acceleration detector on the first surface of the board, first circuit components on the second surface of the board, a seal including a first sealing portion covering the acceleration detector on the first surface of the board and a second sealing portion covering the first circuit components on the second surface of the board, the second sealing portion including an inner surface facing the board and an outer surface on a side opposite to the inner surface, the seal being made of a resin, and a high-rigidity body extending in a direction in which the outer surface and the second surface of the board are connected to each other within the second sealing portion, the high-rigidity body having higher rigidity than the seal.

公开(公告)号：US20180238752A1

公开(公告)日：2018-08-23

申请号：US15955730

申请日：2018-04-18

Applicant: Murata Manufacturing Co., Ltd.

Inventor： Yuya GENMEI ,  Shingo CHIDA

IPC: G01L1/16 ,  G01B7/16 ,  H01L41/053 ,  H01L41/113 ,  H01L41/083 ,  H01L41/187 ,  H01L41/047 ,  H01L41/04

CPC classification number: G01L1/16 ,  G01B7/16 ,  H01L41/042 ,  H01L41/047 ,  H01L41/0477 ,  H01L41/053 ,  H01L41/083 ,  H01L41/1132 ,  H01L41/1876

Abstract: A piezoelectric deflection sensor includes a first piezoelectric plate having a polarization axis direction that is parallel to first and second principal surfaces, first and second segmented electrodes provided on the first principal surface of the first piezoelectric plate, and third and fourth segmented electrodes provided on the second principal surface of the first piezoelectric plate. A piezoelectric element is defined by the first piezoelectric plate and the first to fourth segmented electrodes. The first segmented electrode and the third segmented electrode oppose each other across the first piezoelectric plate, and the second segmented electrode and the fourth segmented electrode oppose each other across the first piezoelectric plate. The first segmented electrode and the fourth segmented electrode are electrically connected to each other, and the second segmented electrode and the third segmented electrode are electrically connected to each other.

公开(公告)号：US20180238751A1

公开(公告)日：2018-08-23

申请号：US15955729

申请日：2018-04-18

Applicant: Murata Manufacturing Co., Ltd.

Inventor： Shingo CHIDA ,  Yuya GENMEI ,  Masayuki ICHIMARU

IPC: G01L1/16 ,  H01L41/053 ,  H01L41/113 ,  H01L41/083 ,  H01L41/187 ,  H01L41/047 ,  G01B7/16

CPC classification number: G01L1/16 ,  G01B7/16 ,  H01L41/0477 ,  H01L41/053 ,  H01L41/083 ,  H01L41/1132 ,  H01L41/1876

Abstract: A piezoelectric deflection sensor includes a first package substrate bonded onto a first principal surface of a first piezoelectric plate via a first bonding material layer, and a second package substrate bonded onto a second principal surface of the first piezoelectric plate via a second bonding material layer. A second electrode is provided on a principal surface of the first piezoelectric plate, and first and second segmented electrodes are provided on the other. A polarization axis direction of the first piezoelectric plate is parallel or substantially parallel to the first and second principal surfaces and is a direction along any side of the first piezoelectric plate. A groove extending in a direction intersecting the polarization axis direction in the first package substrate is provided at a position overlapping with at least a portion of a first electrode non-formation region between the first and second segmented electrodes in plan view.