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公开(公告)号:US20170363409A1
公开(公告)日:2017-12-21
申请号:US15673444
申请日:2017-08-10
Applicant: Murata Manufacturing Co., Ltd.
Inventor: Yuya GENMEI
IPC: G01B7/16 , H01L41/113 , H01L41/187 , H01L41/047 , H01L41/053 , H01L41/273 , H01L41/29 , H01L41/313 , H01L41/43 , H01L41/47 , H01L41/23
CPC classification number: G01B7/16 , G01L1/16 , H01L41/047 , H01L41/0471 , H01L41/0472 , H01L41/0533 , H01L41/1132 , H01L41/1876 , H01L41/23 , H01L41/273 , H01L41/29 , H01L41/313 , H01L41/43 , H01L41/47
Abstract: A piezoelectric element includes a laminate including first and second piezoelectric layers with respective polarization directions in a thickness direction and an elastic layer provided between the first piezoelectric layer and the second piezoelectric layer, first and second terminal electrodes that are provided on an external surface of the laminate, a first detection electrode provided on a positive polar surface of the first piezoelectric layer, a second detection electrode provided on a negative polar surface of the first piezoelectric layer, a third detection electrode provided on a positive polar surface of the second piezoelectric layer, and a fourth detection electrode provided on a negative polar surface of the second piezoelectric layer. The first detection electrode and the fourth detection electrode are connected to the first terminal electrode. The second detection electrode and the third detection electrode are connected to the second terminal electrode.
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公开(公告)号:US20170190227A1
公开(公告)日:2017-07-06
申请号:US15386148
申请日:2016-12-21
Applicant: Murata Manufacturing Co., Ltd.
Inventor: Yuya GENMEI
IPC: B60C23/06
CPC classification number: B60C23/064 , B60C2019/004 , G01L9/0076 , G01L9/08 , G01L17/00 , H01L41/0471 , H01L41/1132
Abstract: A piezoelectric sensor includes a substrate and a piezoelectric element, and at least a pair of mounting electrodes on one main surface of the substrate. The piezoelectric element includes a laminate including a first terminal electrode and a second terminal electrode respectively bonded to the mounting electrodes by bonding materials.
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公开(公告)号:US20180238752A1
公开(公告)日:2018-08-23
申请号:US15955730
申请日:2018-04-18
Applicant: Murata Manufacturing Co., Ltd.
Inventor: Yuya GENMEI , Shingo CHIDA
IPC: G01L1/16 , G01B7/16 , H01L41/053 , H01L41/113 , H01L41/083 , H01L41/187 , H01L41/047 , H01L41/04
CPC classification number: G01L1/16 , G01B7/16 , H01L41/042 , H01L41/047 , H01L41/0477 , H01L41/053 , H01L41/083 , H01L41/1132 , H01L41/1876
Abstract: A piezoelectric deflection sensor includes a first piezoelectric plate having a polarization axis direction that is parallel to first and second principal surfaces, first and second segmented electrodes provided on the first principal surface of the first piezoelectric plate, and third and fourth segmented electrodes provided on the second principal surface of the first piezoelectric plate. A piezoelectric element is defined by the first piezoelectric plate and the first to fourth segmented electrodes. The first segmented electrode and the third segmented electrode oppose each other across the first piezoelectric plate, and the second segmented electrode and the fourth segmented electrode oppose each other across the first piezoelectric plate. The first segmented electrode and the fourth segmented electrode are electrically connected to each other, and the second segmented electrode and the third segmented electrode are electrically connected to each other.
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公开(公告)号:US20180238751A1
公开(公告)日:2018-08-23
申请号:US15955729
申请日:2018-04-18
Applicant: Murata Manufacturing Co., Ltd.
Inventor: Shingo CHIDA , Yuya GENMEI , Masayuki ICHIMARU
IPC: G01L1/16 , H01L41/053 , H01L41/113 , H01L41/083 , H01L41/187 , H01L41/047 , G01B7/16
CPC classification number: G01L1/16 , G01B7/16 , H01L41/0477 , H01L41/053 , H01L41/083 , H01L41/1132 , H01L41/1876
Abstract: A piezoelectric deflection sensor includes a first package substrate bonded onto a first principal surface of a first piezoelectric plate via a first bonding material layer, and a second package substrate bonded onto a second principal surface of the first piezoelectric plate via a second bonding material layer. A second electrode is provided on a principal surface of the first piezoelectric plate, and first and second segmented electrodes are provided on the other. A polarization axis direction of the first piezoelectric plate is parallel or substantially parallel to the first and second principal surfaces and is a direction along any side of the first piezoelectric plate. A groove extending in a direction intersecting the polarization axis direction in the first package substrate is provided at a position overlapping with at least a portion of a first electrode non-formation region between the first and second segmented electrodes in plan view.
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公开(公告)号:US20170160147A1
公开(公告)日:2017-06-08
申请号:US15433158
申请日:2017-02-15
Applicant: Murata Manufacturing Co., Ltd.
Inventor: Yuya GENMEI , Jiro INOUE , Masayuki ICHIMARU
IPC: G01L1/16 , H01L41/04 , H01L41/113 , H01L41/053 , G01B7/16 , H01L41/047
CPC classification number: G01L1/162 , G01B7/16 , G01B7/22 , H01L41/042 , H01L41/047 , H01L41/0533 , H01L41/1132
Abstract: A piezoelectric sensor is fixed to a detection object and detects distortion of the detection object includes first and second principal surfaces, and extends in the lengthwise direction. The piezoelectric sensor includes a piezoelectric body whose polarization axis extends in a direction parallel or substantially parallel to the lengthwise direction, and first and second detecting electrodes that are provided on a surface of the piezoelectric body and that extend in a direction parallel or substantially parallel to the lengthwise direction. Distortion of the detection object is detected based on electric output corresponding to shear stress of the piezoelectric body.
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