PIEZOELECTRIC DEFLECTION SENSOR
    4.
    发明申请

    公开(公告)号:US20180238751A1

    公开(公告)日:2018-08-23

    申请号:US15955729

    申请日:2018-04-18

    Abstract: A piezoelectric deflection sensor includes a first package substrate bonded onto a first principal surface of a first piezoelectric plate via a first bonding material layer, and a second package substrate bonded onto a second principal surface of the first piezoelectric plate via a second bonding material layer. A second electrode is provided on a principal surface of the first piezoelectric plate, and first and second segmented electrodes are provided on the other. A polarization axis direction of the first piezoelectric plate is parallel or substantially parallel to the first and second principal surfaces and is a direction along any side of the first piezoelectric plate. A groove extending in a direction intersecting the polarization axis direction in the first package substrate is provided at a position overlapping with at least a portion of a first electrode non-formation region between the first and second segmented electrodes in plan view.

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