公开(公告)号：US20210193901A1

公开(公告)日：2021-06-24

申请号：US17192940

申请日：2021-03-05

Applicant: Murata Manufacturing Co., Ltd.

Inventor： Seiji UMEZAWA ,  Shinsuke IKEUCHI ,  Fumiya KUROKAWA ,  Nobuyoshi ADACHI ,  Yoichi MOCHIDA

IPC: H01L41/09 ,  H01L41/047 ,  H01L41/187

Abstract: A piezoelectric transducer includes beam portions supported by a base portion at an end portion and extending in a direction away from the base portion above the base portion. Each beam portion includes a piezoelectric layer, an upper electrode layer on an upper side of the piezoelectric layer, and a lower electrode layer facing at least a portion of the upper electrode layer with the piezoelectric layer interposed therebetween. A fixing portion is disposed on the beam portion to sandwich the end portion of each beam portion between the fixing portion and the base portion. The fixing portion overlaps at least a portion of the base portion in an up-down direction, and extends to protrude from the base portion in an extending direction of the beam portion.

公开(公告)号：US20210202824A1

公开(公告)日：2021-07-01

申请号：US17205062

申请日：2021-03-18

Applicant: Murata Manufacturing Co., Ltd.

Inventor： Fumiya KUROKAWA ,  Shinsuke IKEUCHI ,  Yoichi MOCHIDA ,  Seiji UMEZAWA ,  Nobuyoshi ADACHI ,  Yutaka KISHIMOTO

IPC: H01L41/09 ,  H01L41/053 ,  H01L41/113 ,  H01L41/187

Abstract: A piezoelectric transducer includes beam portions each with a fixed end portion and extending in a direction away from the fixed end portion. A base portion is connected to the fixed end portion of each of the beam portions. The beam portions extends in a same plane, and respective extending directions of at least two beam portions are different from each other. The beam portions each include a single crystal piezoelectric layer having a polarization axis in a same direction, an upper electrode layer, and a lower electrode layer. A polarization axis has a polarization component in the plane. An axial direction of an orthogonal axis that is orthogonal to the polarization axis and extends in the above-described plane intersects with an extending direction of each of the plurality of beam portions.