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公开(公告)号:US20220293561A1
公开(公告)日:2022-09-15
申请号:US17199458
申请日:2021-03-12
发明人: Yi-Jen Lo , Hsih Yang Chiu , Ching Hung Chang , Chiang-Lin Shih
IPC分类号: H01L25/065 , H01L25/00 , H01L23/00
摘要: The disclosure provides a method of manufacturing a semiconductor device including bonding a second device wafer to a first device wafer, such that a first bonding interface including a fusion-bonding interface is formed between the first device wafer and the second device wafer, wherein the first device wafer and the second device wafer are the same kind of device wafer. A semiconductor device is also provided.
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公开(公告)号:US20220293552A1
公开(公告)日:2022-09-15
申请号:US17198252
申请日:2021-03-11
发明人: Yi-Jen Lo , Hsih Yang Chiu , Ching Hung Chang , Chiang-Lin Shih
IPC分类号: H01L23/00 , H01L25/065 , H01L25/00
摘要: The disclosure provides a method of manufacturing a semiconductor device including bonding a second device wafer to a first device wafer, such that a first bonding interface including a dielectric-to-dielectric bonding interface and a metal-to-metal bonding interface is formed between the first device wafer and the second device wafer, wherein the second device wafer is electrically coupled to the first device wafer, and a function of the first device wafer and the second device wafer are the same kind of device wafer. A semiconductor device is also provided.
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公开(公告)号:US20240055390A1
公开(公告)日:2024-02-15
申请号:US18491813
申请日:2023-10-23
发明人: Yi-Jen Lo , Hsih Yang Chiu , Ching Hung Chang , Chiang-Lin Shih
IPC分类号: H01L23/00 , H01L25/00 , H01L25/065
CPC分类号: H01L24/80 , H01L25/50 , H01L25/0657 , H01L24/08 , H01L2924/1436 , H01L2224/80894 , H01L2224/08146 , H01L2225/06541 , H01L2224/8038
摘要: The disclosure provides a method of manufacturing a semiconductor device including bonding a second device wafer to a first device wafer, such that a first bonding interface including a dielectric-to-dielectric bonding interface and a metal-to-metal bonding interface is formed between the first device wafer and the second device wafer, wherein the second device wafer is electrically coupled to the first device wafer, and a function of the first device wafer and the second device wafer are the same kind of device wafer. A semiconductor device is also provided.
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公开(公告)号:US11842979B2
公开(公告)日:2023-12-12
申请号:US17198252
申请日:2021-03-11
发明人: Yi-Jen Lo , Hsih Yang Chiu , Ching Hung Chang , Chiang-Lin Shih
IPC分类号: H01L25/065 , H01L23/00 , H01L25/00
CPC分类号: H01L24/80 , H01L24/08 , H01L25/0657 , H01L25/50 , H01L2224/08146 , H01L2224/8038 , H01L2224/80894 , H01L2225/06541 , H01L2924/1436
摘要: The disclosure provides a method of manufacturing a semiconductor device including bonding a second device wafer to a first device wafer, such that a first bonding interface including a dielectric-to-dielectric bonding interface and a metal-to-metal bonding interface is formed between the first device wafer and the second device wafer, wherein the second device wafer is electrically coupled to the first device wafer, and a function of the first device wafer and the second device wafer are the same kind of device wafer. A semiconductor device is also provided.
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公开(公告)号:US12133378B2
公开(公告)日:2024-10-29
申请号:US17707977
申请日:2022-03-30
发明人: Wei Zhong Li , Hsih Yang Chiu
IPC分类号: H10B20/20
CPC分类号: H10B20/20
摘要: A semiconductor structure including a semiconductor substrate, an active area, a transistor gate, a fuse gate, a first dielectric pattern, a second dielectric pattern and a plurality of metal lines is provided. The active area is disposed in the semiconductor substrate. The transistor gate has a first line segment and a second line segment extending across the active area in a first direction. The fuse gate located between the first line segment and the second line segment extends across the active area in the first direction. The first dielectric pattern is disposed between the active area and the transistor gate. The second dielectric pattern is disposed between the active area and the fuse gate. The metal lines disposed on two opposite sides of the transistor gate are electrically connected to the active device.
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公开(公告)号:US11876077B2
公开(公告)日:2024-01-16
申请号:US17199458
申请日:2021-03-12
发明人: Yi-Jen Lo , Hsih Yang Chiu , Ching Hung Chang , Chiang-Lin Shih
IPC分类号: H01L25/065 , H01L25/00 , H01L23/00
CPC分类号: H01L25/0657 , H01L24/08 , H01L24/89 , H01L25/50 , H01L2224/08146 , H01L2224/80895 , H01L2225/06541
摘要: The disclosure provides a method of manufacturing a semiconductor device including bonding a second device wafer to a first device wafer, such that a first bonding interface including a fusion-bonding interface is formed between the first device wafer and the second device wafer, wherein the first device wafer and the second device wafer are the same kind of device wafer. A semiconductor device is also provided.
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公开(公告)号:US20230320083A1
公开(公告)日:2023-10-05
申请号:US17707977
申请日:2022-03-30
发明人: Wei Zhong Li , Hsih Yang Chiu
IPC分类号: H01L27/112
CPC分类号: H01L27/11206
摘要: A semiconductor structure including a semiconductor substrate, an active area, a transistor gate, a fuse gate, a first dielectric pattern, a second dielectric pattern and a plurality of metal lines is provided. The active area is disposed in the semiconductor substrate. The transistor gate has a first line segment and a second line segment extending across the active area in a first direction. The fuse gate located between the first line segment and the second line segment extends across the active area in the first direction. The first dielectric pattern is disposed between the active area and the transistor gate. The second dielectric pattern is disposed between the active area and the fuse gate. The metal lines disposed on two opposite sides of the transistor gate are electrically connected to the active device.
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