公开(公告)号：US20170155005A1

公开(公告)日：2017-06-01

申请号：US14955360

申请日：2015-12-01

Applicant: NATIONAL CHUNG SHAN INSTITUTE OF SCIENCE AND TECHNOLOGY

Inventor： WEN-CHUEH PAN ,  YIH-HSING WANG ,  MING-JUNE LIN ,  JEN-CHIEH LI ,  SHIH-SHAN WEI ,  TIEN-FU WU ,  TSAN-TUNG CHEN

IPC: H01L31/032 ,  H01L31/18

CPC classification number: H01L31/0322 ,  C23C14/541 ,  C23C14/5866 ,  H01L21/02568 ,  H01L21/02614 ,  H01L21/6776 ,  H01L31/18 ,  Y02E10/541 ,  Y02P70/521

Abstract: A selenization/sulfurization process apparatus for use with a single-piece glass substrate is characterized by two chambers for heating up a glass substrate quickly and performing selenization/sulfurization on the glass substrate to not only prevent the glass substrate from staying at a soaking temperature of a softening point for a long period of time but also increase the thin-film selenization/sulfurization temperature according to the needs of the process to thereby reduce the duration of soaking selenization/sulfurization, save energy, and save time. The glass substrate undergoes reciprocating motion in the chambers to not only attain uniform temperature throughout the glass substrate but also distribute a selenization/sulfurization gas across the glass substrate uniformly during the selenization/sulfurization operation. The recycled liquid selenium/sulfur and inert gas are reusable to thereby reduce material costs.

公开(公告)号：US20180127875A1

公开(公告)日：2018-05-10

申请号：US15344374

申请日：2016-11-04

Applicant: NATIONAL CHUNG SHAN INSTITUTE OF SCIENCE AND TECHNOLOGY

Inventor： WEN-CHUEH PAN ,  JEN-CHIEH LI ,  MING-JUNE LIN ,  TIEN-FU WU ,  TSAN-TUNG CHEN ,  YIH-HSING WANG ,  SHIH-SHAN WEI

IPC: C23C16/455 ,  C23C16/30 ,  C23C16/52 ,  C23C16/46

CPC classification number: C23C14/5866 ,  C03C23/0055 ,  C23C14/24 ,  C23C14/541 ,  C23C14/568 ,  H01L31/0322 ,  H01L31/18

Abstract: An apparatus for performing a selenization and sulfurization process on a glass substrate is introduced. A low-cost, non-toxic selenization and sulfurization process is performed on a large-area glass substrate in a normal-pressure environment with the apparatus to turn element selenium or sulfur into small molecules of high activity at high temperature by pyrolysis or by plasma, especially linear atmospheric pressure plasma. The process is finalized by dispersing the selenium or sulfur molecules uniformly and allowing the glass substrate to undergo reciprocating motion precisely, thereby achieving large-area, uniform selenization and sulfurization of the one-piece glass substrate.

公开(公告)号：US20160172220A1

公开(公告)日：2016-06-16

申请号：US14565602

申请日：2014-12-10

Applicant: NATIONAL CHUNG SHAN INSTITUTE OF SCIENCE AND TECHNOLOGY

Inventor： WEN-CHUEH PAN ,  TSANG-MING HSU ,  TSANTUNG CHEN ,  JEN-CHIEH LI ,  SHIH-SHAN WEI

IPC: H01L21/67 ,  H01L21/677 ,  H01L31/032

CPC classification number: H01L21/67115 ,  H01L21/67103 ,  H01L21/6776

Abstract: A selenization process apparatus for a glass substrate includes a first heating unit disposed in a chamber; a conveying heating module disposed in the chamber and below the first heating unit to not only drive the glass substrate to move but also heat the glass substrate, wherein a thermal mark otherwise formed as a result of contact between the conveying heating module and the glass substrate is reduced with an inert gas; a selenium gas feeding module connected to the chamber to introduce selenium gas into the chamber; and a gas recycling module connected to the chamber to recycle the selenium gas and the inert gas. The glass substrate is prevented from staying at a soaking temperature above the softening point for a long period of time. Selenization temperature is increased to speed up the selenization process. The selenium gas and the inert gas are recycled and reused.

Abstract translation: 一种用于玻璃基板的硒化处理装置，包括设置在室中的第一加热单元; 输送加热模块，其设置在所述室中并位于所述第一加热单元的下方，以不仅驱动所述玻璃基板移动，而且还加热所述玻璃基板，其中由所述输送加热模块和所述玻璃基板之间的接触而形成的热标记 用惰性气体还原; 硒气供给模块连接到腔室以将硒气体引入腔室; 以及连接到所述室以再循环硒气体和惰性气体的气体回收模块。 防止玻璃基板在高于软化点的均热温度下长时间停留。 提高硒化温度，加快硒化过程。 硒气体和惰性气体被回收再利用。