公开(公告)号：US20170153160A1

公开(公告)日：2017-06-01

申请号：US14955073

申请日：2015-12-01

Applicant: NATIONAL CHUNG SHAN INSTITUTE OF SCIENCE AND TECHNOLOGY

Inventor： YIH-HSING WANG ,  WEN-CHUEH PAN ,  MING-JUNE LIN ,  JEN-CHIEH LI ,  TIEN-FU WU ,  TSAN-TUNG CHEN

IPC: G01L11/00 ,  G01L27/00

CPC classification number: G01L11/006 ,  G01L9/007 ,  G01L9/0076 ,  G01L19/04 ,  G01L27/002

Abstract: A high-temperature gas pressure measuring method includes a pressure measuring gas housing dividing step for dividing a pressure measuring gas housing into a pressure measuring room and a pressure referring room by a metal diaphragm; a gas introducing step for introducing high temperature gas into the pressure measuring room and introducing a reference pressure gas into the pressure referring room; a displacement measuring step for measuring a displacement of the metal diaphragm, wherein the displacement is caused by pressure difference between the two rooms in pressure measuring gas housing; and a pressure determining step for measuring the pressure of a high-temperature and/or corrosive to-measure pressure gas. The method dispenses with any corrosion-resistant and heat-resistant pressure sensing component and thus cuts costs.

公开(公告)号：US20170155005A1

公开(公告)日：2017-06-01

申请号：US14955360

申请日：2015-12-01

Applicant: NATIONAL CHUNG SHAN INSTITUTE OF SCIENCE AND TECHNOLOGY

Inventor： WEN-CHUEH PAN ,  YIH-HSING WANG ,  MING-JUNE LIN ,  JEN-CHIEH LI ,  SHIH-SHAN WEI ,  TIEN-FU WU ,  TSAN-TUNG CHEN

IPC: H01L31/032 ,  H01L31/18

CPC classification number: H01L31/0322 ,  C23C14/541 ,  C23C14/5866 ,  H01L21/02568 ,  H01L21/02614 ,  H01L21/6776 ,  H01L31/18 ,  Y02E10/541 ,  Y02P70/521

Abstract: A selenization/sulfurization process apparatus for use with a single-piece glass substrate is characterized by two chambers for heating up a glass substrate quickly and performing selenization/sulfurization on the glass substrate to not only prevent the glass substrate from staying at a soaking temperature of a softening point for a long period of time but also increase the thin-film selenization/sulfurization temperature according to the needs of the process to thereby reduce the duration of soaking selenization/sulfurization, save energy, and save time. The glass substrate undergoes reciprocating motion in the chambers to not only attain uniform temperature throughout the glass substrate but also distribute a selenization/sulfurization gas across the glass substrate uniformly during the selenization/sulfurization operation. The recycled liquid selenium/sulfur and inert gas are reusable to thereby reduce material costs.

公开(公告)号：US20180163296A1

公开(公告)日：2018-06-14

申请号：US15375254

申请日：2016-12-12

Applicant: NATIONAL CHUNG SHAN INSTITUTE OF SCIENCE AND TECHNOLOGY

Inventor： WEN-CHUEH PAN ,  JEN-CHIEH LI ,  MING-JUNE LIN ,  HSIU-JUNG YEH

IPC: C23C14/58 ,  C23C14/22

CPC classification number: C23C14/5826 ,  C23C14/22 ,  C23C14/5866 ,  H01J37/32357 ,  H01J37/32449 ,  H01J37/32513 ,  H01J37/32541 ,  H01J37/32568

Abstract: An equipment for producing a film comprises a linear plasma generating module and a plasma distributing module. When the plasma flows out from the slit opening of the linear plasma generating module, the sleeve of the plasma distributing module rotates with respect to the liner plasma generating module, so that the plasma flowing out from the slit opening is further uniformly distributed outward by passing through the plurality of holes of the sleeve. The equipment for producing a film is applicable to selenization sulfuring process of the glass substrate.

公开(公告)号：US20180127875A1

公开(公告)日：2018-05-10

申请号：US15344374

申请日：2016-11-04

Applicant: NATIONAL CHUNG SHAN INSTITUTE OF SCIENCE AND TECHNOLOGY

Inventor： WEN-CHUEH PAN ,  JEN-CHIEH LI ,  MING-JUNE LIN ,  TIEN-FU WU ,  TSAN-TUNG CHEN ,  YIH-HSING WANG ,  SHIH-SHAN WEI

IPC: C23C16/455 ,  C23C16/30 ,  C23C16/52 ,  C23C16/46

CPC classification number: C23C14/5866 ,  C03C23/0055 ,  C23C14/24 ,  C23C14/541 ,  C23C14/568 ,  H01L31/0322 ,  H01L31/18

Abstract: An apparatus for performing a selenization and sulfurization process on a glass substrate is introduced. A low-cost, non-toxic selenization and sulfurization process is performed on a large-area glass substrate in a normal-pressure environment with the apparatus to turn element selenium or sulfur into small molecules of high activity at high temperature by pyrolysis or by plasma, especially linear atmospheric pressure plasma. The process is finalized by dispersing the selenium or sulfur molecules uniformly and allowing the glass substrate to undergo reciprocating motion precisely, thereby achieving large-area, uniform selenization and sulfurization of the one-piece glass substrate.