公开(公告)号：US20190186043A1

公开(公告)日：2019-06-20

申请号：US15913980

申请日：2018-03-07

Applicant: NATIONAL CHUNG SHAN INSTITUTE OF SCIENCE AND TECHNOLOGY

Inventor： DAI-LIANG MA ,  TSAO-CHUN PENG ,  CHENG-JUNG KO ,  BANG-YING YU ,  CHIH-WEI KUO ,  YING-CONG ZHAO

IPC: C30B29/36 ,  C30B29/40 ,  H01L21/324

CPC classification number: C30B29/36 ,  C30B29/403 ,  H01L21/324

Abstract: A device for measuring distribution of thermal field in a crucible comprises a crucible comprising an upper lid, a body, a growth chamber and a material source zone; a thermally insulating material disposed outside the crucible; a movable heating component for heating the crucible; a plurality of thermocouples enclosed by insulating, high temperature resistant material and disposed in the crucible after being inserted into a plurality of holes on the upper lid to measure distribution of thermal field in the crucible. The thermocouples enclosed by insulating, high temperature resistant material are effective in measuring and adjusting temperature distribution in the crucible to achieve optimal temperature distribution for crystal growth in the crucible.

公开(公告)号：US20180057925A1

公开(公告)日：2018-03-01

申请号：US15353000

申请日：2016-11-16

Applicant: NATIONAL CHUNG SHAN INSTITUTE OF SCIENCE AND TECHNOLOGY

Inventor： DAI-LIANG MA ,  HSUEH-I CHEN ,  BO-CHENG LIN ,  CHENG-JUNG KO ,  YING-CONG ZHAO ,  CHIH-WEI KUO ,  SHU-YU YEH

IPC: C23C14/24 ,  C30B23/02 ,  C30B23/06 ,  C30B29/36 ,  C30B29/40 ,  C23C14/06 ,  C23C14/26

CPC classification number: C23C14/243 ,  C23C14/0635 ,  C23C14/0641 ,  C23C14/26 ,  C30B23/00 ,  C30B23/002 ,  C30B23/025 ,  C30B23/06 ,  C30B23/066 ,  C30B29/36 ,  C30B29/403

Abstract: A device for growing large-sized monocrystalline crystals, including a crucible adapted to grow crystals from a material source and with a seed crystal and including therein a seed crystal region, a growth chamber, and a material source region; a thermally insulating material disposed outside the crucible and below a heat dissipation component; and a plurality of heating components disposed outside the thermally insulating material to provide heat sources, wherein the heat dissipation component is of a heat dissipation inner diameter and a heat dissipation height which exceeds a thickness of the thermally insulating material.