公开(公告)号：US20160336941A1

公开(公告)日：2016-11-17

申请号：US14961252

申请日：2015-12-07

Applicant: NATIONAL TSING HUA UNIVERSITY

Inventor： Sheng-Shian LI ,  Kuan-Hsien LEE ,  Cheng-Chi CHEN

IPC: H03L1/02

CPC classification number: H03B5/30 ,  B81B3/0081 ,  B81B2201/031 ,  B81B2203/0109 ,  B81B2203/0163 ,  H03B5/04 ,  H03H9/02259 ,  H03H9/2463 ,  H03H2009/02291 ,  H03H2009/02307 ,  H03H2009/02322

Abstract: An ultra low power thermally-actuated oscillator and driving circuit thereof are provided. The ultra low power thermally-actuated oscillator includes proof masses, thermally-actuated element and a plurality of driving elements. The proof masses is symmetrically disposed and suspended from a substrate by spring structure. The thermally-actuated element is a line structure to effectively reduce the motional impedance and direct current power. Wherein, the thermally-actuated element is connected to the proof masses or the spring structure. The plurality of driving elements are respectively disposed on both sides of the thermally-actuated element to provide a driving current. When the driving current flows through the thermally-actuated element, the thermally-actuated element will be deformed and thus the proof masses will be driven to produce a harmonic oscillation.

Abstract translation: 提供了一种超低功率热驱动振荡器及其驱动电路。 超低功率热致动振荡器包括检测质量块，热致动元件和多个驱动元件。 证明质量通过弹簧结构对称地设置和悬挂在基板上。 热致动元件是有效降低运动阻抗和直流电力的线结构。 其中，热致动元件连接到防弹块或弹簧结构。 多个驱动元件分别设置在热致动元件的两侧以提供驱动电流。 当驱动电流流过热致动元件时，热致动元件将变形，从而驱动检测质量产生谐波振荡。