公开(公告)号：US20200043638A1

公开(公告)日：2020-02-06

申请号：US16598100

申请日：2019-10-10

Applicant: NHK SPRING CO., LTD.

Inventor： Toshihiko HANAMACHI ,  Kenji SEKIYA ,  Go TAKAHARA ,  Naoya AIKAWA ,  Yuta KISARA ,  Arata TATSUMI

IPC: H01C1/03

Abstract: A heather unit including a small diameter sheath heater with improved reliability is provided. The heater unit includes a first substrate having a first joint surface and a second substrate having a second joint surface being joined together, a groove arranged on at least one of the first joint surface or the second joint surface, and a sheath heater arranged inside the groove. The sheath heater includes a metal sheath, a heating wire having a band shape, the heating wire arranged with a space within the metal sheath so as to rotate with respect to an axis direction of the metal sheath, an insulating material arranged in the space, and connection terminals arranged at one end of the metal sheath, the connection terminals electrically connected with both ends of the heating wire respectively.

公开(公告)号：US20220151031A1

公开(公告)日：2022-05-12

申请号：US17582848

申请日：2022-01-24

Applicant: NHK SPRING CO., LTD.

Inventor： Naoya KIDA ,  Arata TATSUMI ,  Kenji SEKIYA ,  Naoya AIKAWA ,  Masaya TAKANASHI

IPC: H05B3/56 ,  H05B3/06 ,  H05B3/18

Abstract: A heater includes a folded heater wire, a first insulator provided on the heater wire, a metal sheath provided so as to be in contact with the first insulator, a first insulating member arranged parallel to a first end part of the heater wire taken out from a first end part of the metal sheath, a second insulating member arranged parallel to the first insulating member and parallel to a second end part of the heater wire taken out from the first end part of the metal sheath, a second insulator in contact with the first and the second insulating members and the metal sheath, and a lid member covering the first insulating member, the lid member being in contact with the metal sheath, the first and the second insulating members via the second insulator, and arranged parallel to the first and the second insulating members and the metal sheath.

公开(公告)号：US20210217638A1

公开(公告)日：2021-07-15

申请号：US17219316

申请日：2021-03-31

Applicant: NHK SPRING CO., LTD.

Inventor： Toshihiko HANAMACHI ,  Arata TATSUMI ,  Kenji SEKIYA ,  Naoya AIKAWA ,  Masaya TAKANASHI

IPC: H01L21/67 ,  C23C16/46 ,  H01J37/32 ,  H05B3/28 ,  C23C16/458 ,  H01J37/34 ,  H01L21/687

Abstract: Disclosed is a stage including a first supporting plate, a second supporting plate under the first supporting plate, a shaft under the second supporting plate and overlapping with the first supporting plate and the second supporting plate, and at least one sheath heater passing through the second supporting plate. The at least one sheath heater is arranged so as to extend on a first surface and a second surface which are parallel to an upper surface of the second supporting plate and which are different in distance from the first supporting plate from each other.

公开(公告)号：US20200045779A1

公开(公告)日：2020-02-06

申请号：US16653094

申请日：2019-10-15

Applicant: NHK SPRING CO., LTD.

Inventor： Toshihiko HANAMACHI ,  Kenji SEKIYA ,  Daisuke HASHIMOTO ,  Satoshi HIRANO ,  Masaru TAKIMOTO ,  Go TAKAHARA ,  Yoshihito ARAKI ,  Arata TATSUMI ,  Takashi KAWASAKI ,  Yuki TOYAMA ,  Satoshi ANZAI

IPC: H05B3/48 ,  H05B3/18 ,  H05B3/03

Abstract: A small diameter sheath heater with improved reliability is provided. The sheath heater according to one embodiment of the present invention includes a metal sheath, a heating wire having a band shape, the heating wire arranged with a gap within the metal sheath so as to rotate with respect to an axis direction of the metal sheath, an insulating material arranged in the gap, and connection terminals arranged at one end of the metal sheath, the connection terminals electrically connected with both ends of the heating wire respectively.

公开(公告)号：US20190385827A1

公开(公告)日：2019-12-19

申请号：US16553988

申请日：2019-08-28

Applicant: NHK SPRING CO., LTD.

Inventor： Go TAKAHARA ,  Toshihiko HANAMACHI ,  Arata TATSUMI

IPC: H01J37/32 ,  H01L21/687 ,  H01L21/67

Abstract: A substrate supporting unit is provided. The substrate supporting unit possesses a shaft, a first heater, and a stage. The first heater is located in the shaft and is configured to heat an upper portion of the shaft. The stage is located over the shaft and includes a first plate, a second plate over the first plate, and a second heater between the first plate and the second plate.

公开(公告)号：US20180361464A1

公开(公告)日：2018-12-20

申请号：US16109372

申请日：2018-08-22

Applicant: NHK SPRING CO., LTD.

Inventor： Satoshi HIRANO ,  Arata TATSUMI ,  Takatoshi NANBU

IPC: B21J15/48 ,  G05B19/402 ,  G05B19/409 ,  H01L21/687

Abstract: A caulking jig comprises a main body, a blade portion having a blade edge, a projection member fit in the main body, an urging member which urges the projection member, and an engagement mechanism configured to engage the projection member to the main body. In a state in which the projection member is not engaged, the projection member is held at a projected position where a distal end portion of the projection member is projected from the blade edge. In a state in which the projection member is engaged, the projection member is held at an entered position where the distal end portion is retracted to a more entered position than the blade edge.

公开(公告)号：US20220155156A1

公开(公告)日：2022-05-19

申请号：US17590780

申请日：2022-02-01

Applicant: NHK SPRING CO., LTD.

Inventor： Naoya KIDA ,  Arata TATSUMI ,  Kenji SEKIYA ,  Naoya AIKAWA ,  Masaya TAKANASHI

IPC: G01K7/06

Abstract: A temperature sensor includes a block body, a first thermocouple, and a second thermocouple. The first thermocouple includes a first strand, a second strand, a first insulator surrounding the first strand and the second strand, and a first metal sheath surrounding the first insulator. The second thermocouple includes a third strand, a fourth strand, a second insulator surrounding the third strand and the fourth strand, and a second metal sheath surrounding the second insulator. An end portion of each of the first thermocouple and the second thermocouple is buried in the block body.

公开(公告)号：US20210235550A1

公开(公告)日：2021-07-29

申请号：US17232519

申请日：2021-04-16

Applicant: NHK SPRING CO., LTD.

Inventor： Toshihiko HANAMACHI ,  Arata TATSUMI ,  Kenji SEKIYA ,  Naoya AIKAWA ,  Masaya TAKANASHI

IPC: H05B3/48 ,  H01L21/67 ,  H01J37/32 ,  C23C14/50 ,  C23C16/458 ,  C23C16/46

Abstract: A heater comprises a folded heater wire, a first insulator provided on the folded heater wire, a metal sheath in contact with a part of the first insulator, a first insulating member arranged in parallel to a part of a first end of the folded heater wire taken out from a first end of the metal sheath, a second insulating member arranged in parallel to a part of the first insulating member and parallel to a part of a second end of the folded heater wire taken out from the first end of the metal sheath, a third insulating member arranged in parallel to a part of the first insulating member and the second insulating member, and bundle the first insulating member and the second insulating member, and a cylindrical member arranged in parallel to a part of the metal sheath and the third insulating member.