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公开(公告)号：US20200045779A1
公开(公告)日：2020-02-06
申请号：US16653094
申请日：2019-10-15
Applicant: NHK SPRING CO., LTD.
Inventor： Toshihiko HANAMACHI , Kenji SEKIYA , Daisuke HASHIMOTO , Satoshi HIRANO , Masaru TAKIMOTO , Go TAKAHARA , Yoshihito ARAKI , Arata TATSUMI , Takashi KAWASAKI , Yuki TOYAMA , Satoshi ANZAI
Abstract: A small diameter sheath heater with improved reliability is provided. The sheath heater according to one embodiment of the present invention includes a metal sheath, a heating wire having a band shape, the heating wire arranged with a gap within the metal sheath so as to rotate with respect to an axis direction of the metal sheath, an insulating material arranged in the gap, and connection terminals arranged at one end of the metal sheath, the connection terminals electrically connected with both ends of the heating wire respectively.
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公开(公告)号：US20210398839A1
公开(公告)日：2021-12-23
申请号：US17463786
申请日：2021-09-01
Applicant: NHK SPRING CO., LTD.
Inventor： Toshihiko HANAMACHI , Shuhei MOROTA , Masaru TAKIMOTO , Yoshihito ARAKI , Hibiki YOKOYAMA , Masahiro FUJII
IPC: H01L21/683 , H01J37/32 , C23C4/12
Abstract: A stage includes a base material having a first surface and a second surface adjacent to the first surface, and an insulating film including a plurality of particles, each of the plurality of particles having a flat surface. The flat surface included in the insulating film is provided along the first surface and the second surface. The base material includes a third surface in a direction 180 degrees opposite to the first surface, and a part of the flat surface included in the insulating film is provided along the third surface, and a surface obtained by extending the first surface and a surface obtained by extending the second surface intersect at 90 degrees. The base material includes a third surface in a direction 180 degrees opposite to the first surface, and a part of the flat surface included in the insulating film is provided along the third surface.
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