公开(公告)号：US20200045779A1

公开(公告)日：2020-02-06

申请号：US16653094

申请日：2019-10-15

Applicant: NHK SPRING CO., LTD.

Inventor： Toshihiko HANAMACHI ,  Kenji SEKIYA ,  Daisuke HASHIMOTO ,  Satoshi HIRANO ,  Masaru TAKIMOTO ,  Go TAKAHARA ,  Yoshihito ARAKI ,  Arata TATSUMI ,  Takashi KAWASAKI ,  Yuki TOYAMA ,  Satoshi ANZAI

IPC: H05B3/48 ,  H05B3/18 ,  H05B3/03

Abstract: A small diameter sheath heater with improved reliability is provided. The sheath heater according to one embodiment of the present invention includes a metal sheath, a heating wire having a band shape, the heating wire arranged with a gap within the metal sheath so as to rotate with respect to an axis direction of the metal sheath, an insulating material arranged in the gap, and connection terminals arranged at one end of the metal sheath, the connection terminals electrically connected with both ends of the heating wire respectively.

公开(公告)号：US20240425964A1

公开(公告)日：2024-12-26

申请号：US18826386

申请日：2024-09-06

Applicant: NHK SPRING CO., LTD.

Inventor： Hibiki YOKOYAMA ,  Noriyoshi KANEDA ,  Michiyoshi SONE ,  Satoshi HIRANO ,  Go TAKAHARA ,  Takatoshi NAMBU

IPC: C23C4/18

Abstract: According to an embodiment of the present invention, a thermal spraying equipment including a thermal spraying machine including a thermal spraying torch thermally spraying a material onto a base material, a thermal spraying booth where thermal spraying machine is arranged, one or more peripheral devices used with the thermal spraying machine, a safety door separating an inside and an outside of the thermal spraying booth, and a centralized control board arranged outside of the thermal spraying booth, the centralized control board enabling centralized operation of the thermal spraying machine and the one or more peripheral devices. The centralized control board controls the spraying machine not to be driven in the case where the safety door is not locked normally.

公开(公告)号：US20250011913A1

公开(公告)日：2025-01-09

申请号：US18898406

申请日：2024-09-26

Applicant: NHK SPRING CO., LTD.

Inventor： Satoshi HIRANO ,  Go TAKAHARA ,  Takatoshi NAMBU ,  Noriyoshi KANEDA ,  Hibiki YOKOYAMA ,  Michiyoshi SONE

IPC: C23C4/123 ,  B05B13/02

Abstract: This rotary device comprises a rotary stage detachably supporting a base material having an inlet and an outlet for a liquid at a predetermined temperature, and a flow path connecting the inlet to the outlet, a rotary support which supports a rotary stage, a rotary mechanism which rotates the rotary stage around the rotary support, and a liquid supply part which supplies the liquid to the base material. The rotary stage has a liquid supply port for supplying the liquid to the base material, and a liquid discharge port for discharging the liquid from the base material. The rotary support has therein a first pipe connected to the liquid supply port, and a second pipe connected to the liquid discharge port. In addition, the thermal spraying apparatus comprises the rotary device and a thermal spray gun.

公开(公告)号：US20190385827A1

公开(公告)日：2019-12-19

申请号：US16553988

申请日：2019-08-28

Applicant: NHK SPRING CO., LTD.

Inventor： Go TAKAHARA ,  Toshihiko HANAMACHI ,  Arata TATSUMI

IPC: H01J37/32 ,  H01L21/687 ,  H01L21/67

Abstract: A substrate supporting unit is provided. The substrate supporting unit possesses a shaft, a first heater, and a stage. The first heater is located in the shaft and is configured to heat an upper portion of the shaft. The stage is located over the shaft and includes a first plate, a second plate over the first plate, and a second heater between the first plate and the second plate.

公开(公告)号：US20200043638A1

公开(公告)日：2020-02-06

申请号：US16598100

申请日：2019-10-10

Applicant: NHK SPRING CO., LTD.

Inventor： Toshihiko HANAMACHI ,  Kenji SEKIYA ,  Go TAKAHARA ,  Naoya AIKAWA ,  Yuta KISARA ,  Arata TATSUMI

IPC: H01C1/03

Abstract: A heather unit including a small diameter sheath heater with improved reliability is provided. The heater unit includes a first substrate having a first joint surface and a second substrate having a second joint surface being joined together, a groove arranged on at least one of the first joint surface or the second joint surface, and a sheath heater arranged inside the groove. The sheath heater includes a metal sheath, a heating wire having a band shape, the heating wire arranged with a space within the metal sheath so as to rotate with respect to an axis direction of the metal sheath, an insulating material arranged in the space, and connection terminals arranged at one end of the metal sheath, the connection terminals electrically connected with both ends of the heating wire respectively.

公开(公告)号：US20190228953A1

公开(公告)日：2019-07-25

申请号：US16367643

申请日：2019-03-28

Applicant: NHK SPRING CO., LTD.

Inventor： Toshihiro TACHIKAWA ,  Naoya AIKAWA ,  Go TAKAHARA ,  Kohei SUZUKI ,  Hiroshi MITSUDA

IPC: H01J37/32 ,  H01L21/67 ,  H01L21/683 ,  H01J37/34 ,  C23C16/46 ,  C23C16/458 ,  C23C14/50

Abstract: Provided is a stage for precisely controlling a substrate temperature and a manufacturing method thereof. Alternatively, a film-forming apparatus or a film-processing apparatus having the stage is provided. The stage includes a base material and a heater layer over the base material. The heater layer has a first insulating film, a heater wire over the first insulating film, and a second insulating film over the heater wire. The heater wire includes more than one kind of metal selected from tungsten, nickel. chromium cobalt, and molybdenum.