公开(公告)号：US20210398839A1

公开(公告)日：2021-12-23

申请号：US17463786

申请日：2021-09-01

Applicant: NHK SPRING CO., LTD.

Inventor： Toshihiko HANAMACHI ,  Shuhei MOROTA ,  Masaru TAKIMOTO ,  Yoshihito ARAKI ,  Hibiki YOKOYAMA ,  Masahiro FUJII

IPC: H01L21/683 ,  H01J37/32 ,  C23C4/12

Abstract: A stage includes a base material having a first surface and a second surface adjacent to the first surface, and an insulating film including a plurality of particles, each of the plurality of particles having a flat surface. The flat surface included in the insulating film is provided along the first surface and the second surface. The base material includes a third surface in a direction 180 degrees opposite to the first surface, and a part of the flat surface included in the insulating film is provided along the third surface, and a surface obtained by extending the first surface and a surface obtained by extending the second surface intersect at 90 degrees. The base material includes a third surface in a direction 180 degrees opposite to the first surface, and a part of the flat surface included in the insulating film is provided along the third surface.