公开(公告)号：US20250011913A1

公开(公告)日：2025-01-09

申请号：US18898406

申请日：2024-09-26

Applicant: NHK SPRING CO., LTD.

Inventor： Satoshi HIRANO ,  Go TAKAHARA ,  Takatoshi NAMBU ,  Noriyoshi KANEDA ,  Hibiki YOKOYAMA ,  Michiyoshi SONE

IPC: C23C4/123 ,  B05B13/02

Abstract: This rotary device comprises a rotary stage detachably supporting a base material having an inlet and an outlet for a liquid at a predetermined temperature, and a flow path connecting the inlet to the outlet, a rotary support which supports a rotary stage, a rotary mechanism which rotates the rotary stage around the rotary support, and a liquid supply part which supplies the liquid to the base material. The rotary stage has a liquid supply port for supplying the liquid to the base material, and a liquid discharge port for discharging the liquid from the base material. The rotary support has therein a first pipe connected to the liquid supply port, and a second pipe connected to the liquid discharge port. In addition, the thermal spraying apparatus comprises the rotary device and a thermal spray gun.

公开(公告)号：US20210398839A1

公开(公告)日：2021-12-23

申请号：US17463786

申请日：2021-09-01

Applicant: NHK SPRING CO., LTD.

Inventor： Toshihiko HANAMACHI ,  Shuhei MOROTA ,  Masaru TAKIMOTO ,  Yoshihito ARAKI ,  Hibiki YOKOYAMA ,  Masahiro FUJII

IPC: H01L21/683 ,  H01J37/32 ,  C23C4/12

Abstract: A stage includes a base material having a first surface and a second surface adjacent to the first surface, and an insulating film including a plurality of particles, each of the plurality of particles having a flat surface. The flat surface included in the insulating film is provided along the first surface and the second surface. The base material includes a third surface in a direction 180 degrees opposite to the first surface, and a part of the flat surface included in the insulating film is provided along the third surface, and a surface obtained by extending the first surface and a surface obtained by extending the second surface intersect at 90 degrees. The base material includes a third surface in a direction 180 degrees opposite to the first surface, and a part of the flat surface included in the insulating film is provided along the third surface.

公开(公告)号：US20240342740A1

公开(公告)日：2024-10-17

申请号：US18751200

申请日：2024-06-22

Applicant: NHK SPRING CO., LTD.

Inventor： Noriyoshi KANEDA ,  Hibiki YOKOYAMA ,  Masahiro FUJII

IPC: B05B12/26

CPC classification number: B05B12/26

Abstract: A masking fixture according to an embodiment of the present disclosure includes an insertion portion fitted into an opening of a workpiece, a covering portion above the insertion portion covering the opening of the workpiece, and an eave portion above the covering portion projecting outwards from an outer edge of the covering portion. In the masking fixture, the eave portion may be arranged higher than the top surface of the workpiece when the insertion portion is fitted into the opening of the workpiece, and a protruding portion may be arranged at the top of the eave portion. The masking fixture may be made of resin.

公开(公告)号：US20230207286A1

公开(公告)日：2023-06-29

申请号：US18176749

申请日：2023-03-01

Applicant: NHK SPRING CO., LTD.

Inventor： Hibiki YOKOYAMA ,  Naoya KIDA ,  Jun FUTAKUCHIYA ,  Noriyoshi KANEDA ,  Michiyoshi SONE

IPC: H01J37/32 ,  C23C4/11

CPC classification number: H01J37/32715 ,  C23C4/11

Abstract: A stage includes a base material including a step portion and an insulating film. The step portion includes a first surface recessed from a top surface of the base material and a second surface recessed from a side surface of the base material. The insulating film includes a plurality of first layers on the first surface and a plurality of second layers on the second surface. In the step portion, each first end portion of the plurality of first layers and each second end portion of the plurality of second layers are alternately stacked. The first surface and the second surface are connected via a corner, and each first end portion and each second end portion are alternately stacked at the corner.

公开(公告)号：US20240425964A1

公开(公告)日：2024-12-26

申请号：US18826386

申请日：2024-09-06

Applicant: NHK SPRING CO., LTD.

Inventor： Hibiki YOKOYAMA ,  Noriyoshi KANEDA ,  Michiyoshi SONE ,  Satoshi HIRANO ,  Go TAKAHARA ,  Takatoshi NAMBU

IPC: C23C4/18

Abstract: According to an embodiment of the present invention, a thermal spraying equipment including a thermal spraying machine including a thermal spraying torch thermally spraying a material onto a base material, a thermal spraying booth where thermal spraying machine is arranged, one or more peripheral devices used with the thermal spraying machine, a safety door separating an inside and an outside of the thermal spraying booth, and a centralized control board arranged outside of the thermal spraying booth, the centralized control board enabling centralized operation of the thermal spraying machine and the one or more peripheral devices. The centralized control board controls the spraying machine not to be driven in the case where the safety door is not locked normally.

公开(公告)号：US20240347371A1

公开(公告)日：2024-10-17

申请号：US18751140

申请日：2024-06-21

Applicant: NHK SPRING CO., LTD.

Inventor： Yusuke OTSUKA ,  Naoya KIDA ,  Jun FUTAKUCHIYA ,  Noriyoshi KANEDA ,  Hibiki YOKOYAMA ,  Michiyoshi SONE ,  Hiroki SAKAMOTO

IPC: H01L21/687 ,  H01J37/32

CPC classification number: H01L21/68757 ,  H01J37/32715 ,  H01J2237/2007

Abstract: A laminate structure of the disclosure is a laminate structure for a semiconductor manufacturing device, and includes a substrate containing aluminum and including a first face, an intermediate layer arranged on the first face of the substrate and containing aluminum oxide, and a cover layer arranged on the intermediate layer and containing metal atoms. The intermediate layer includes a partition wall forming a plurality of voids in a cross-sectional shape parallel to the first face. The intermediate layer includes a boundary layer covering the first face of the substrate. The cover layer is arranged in some of the plurality of voids in the intermediate layer. The plurality of voids includes voids adjacent to the boundary layer and separated from the cover layer.

公开(公告)号：US20240327967A1

公开(公告)日：2024-10-03

申请号：US18738218

申请日：2024-06-10

Applicant: NHK SPRING CO., LTD.

Inventor： Hibiki YOKOYAMA ,  Jun FUTAKUCHIYA ,  Noriyoshi KANEDA ,  Michiyoshi SONE ,  Masahiro FUJII ,  Takatoshi NAMBU

IPC: C23C4/01

CPC classification number: C23C4/01

Abstract: The metal mask has a body having a first surface in contact with a surface of a workpiece, a second surface opposite the first surface and a third surface between the first surface and the second surface, and an eave portion continuous with the body portion and projecting outwards from the first surface, the eave portion being arranged away from the surface of the workpiece. The third surface (side surface) of the body portion of the metal mask may have a stepped portion formed of the eave portion. The third surface (side surface) of the body part has an inclined surface that extends from the first surface to the second surface and may have a structure in which the eave portion is arranged above the inclined surface.