公开(公告)号：US20250010425A1

公开(公告)日：2025-01-09

申请号：US18897639

申请日：2024-09-26

Applicant: NHK SPRING CO., LTD.

Inventor： Masahiro FUJII ,  Daisuke FUJINO ,  Yoshihito ARAKI ,  Naoya AIKAWA ,  Nobuyuki FURUGORI ,  Tomonori KASONO

IPC: B24B37/04

Abstract: A polishing device according to an embodiment comprises: a supporting unit for supporting a polishing tool, a stage for holding an object to be polished; a first drive unit for causing the support unit and the stage to move relative to one another along a shape of a polishing surface of the object to be polished, and a second drive unit for causing the support unit to control synchronously with the first drive unit such that one predetermined end of a polishing member attached to the polishing tool faces in a movement direction of the polishing member.

公开(公告)号：US20210398839A1

公开(公告)日：2021-12-23

申请号：US17463786

申请日：2021-09-01

Applicant: NHK SPRING CO., LTD.

Inventor： Toshihiko HANAMACHI ,  Shuhei MOROTA ,  Masaru TAKIMOTO ,  Yoshihito ARAKI ,  Hibiki YOKOYAMA ,  Masahiro FUJII

IPC: H01L21/683 ,  H01J37/32 ,  C23C4/12

Abstract: A stage includes a base material having a first surface and a second surface adjacent to the first surface, and an insulating film including a plurality of particles, each of the plurality of particles having a flat surface. The flat surface included in the insulating film is provided along the first surface and the second surface. The base material includes a third surface in a direction 180 degrees opposite to the first surface, and a part of the flat surface included in the insulating film is provided along the third surface, and a surface obtained by extending the first surface and a surface obtained by extending the second surface intersect at 90 degrees. The base material includes a third surface in a direction 180 degrees opposite to the first surface, and a part of the flat surface included in the insulating film is provided along the third surface.

公开(公告)号：US20240327967A1

公开(公告)日：2024-10-03

申请号：US18738218

申请日：2024-06-10

Applicant: NHK SPRING CO., LTD.

Inventor： Hibiki YOKOYAMA ,  Jun FUTAKUCHIYA ,  Noriyoshi KANEDA ,  Michiyoshi SONE ,  Masahiro FUJII ,  Takatoshi NAMBU

IPC: C23C4/01

CPC classification number: C23C4/01

Abstract: The metal mask has a body having a first surface in contact with a surface of a workpiece, a second surface opposite the first surface and a third surface between the first surface and the second surface, and an eave portion continuous with the body portion and projecting outwards from the first surface, the eave portion being arranged away from the surface of the workpiece. The third surface (side surface) of the body portion of the metal mask may have a stepped portion formed of the eave portion. The third surface (side surface) of the body part has an inclined surface that extends from the first surface to the second surface and may have a structure in which the eave portion is arranged above the inclined surface.

公开(公告)号：US20240342740A1

公开(公告)日：2024-10-17

申请号：US18751200

申请日：2024-06-22

Applicant: NHK SPRING CO., LTD.

Inventor： Noriyoshi KANEDA ,  Hibiki YOKOYAMA ,  Masahiro FUJII

IPC: B05B12/26

CPC classification number: B05B12/26

Abstract: A masking fixture according to an embodiment of the present disclosure includes an insertion portion fitted into an opening of a workpiece, a covering portion above the insertion portion covering the opening of the workpiece, and an eave portion above the covering portion projecting outwards from an outer edge of the covering portion. In the masking fixture, the eave portion may be arranged higher than the top surface of the workpiece when the insertion portion is fitted into the opening of the workpiece, and a protruding portion may be arranged at the top of the eave portion. The masking fixture may be made of resin.