公开(公告)号：US20240353445A1

公开(公告)日：2024-10-24

申请号：US18761394

申请日：2024-07-02

Applicant: NHK Spring Co., Ltd.

Inventor： Naruhiko Nishiwaki ,  Masahiro Takahashi ,  Kazuya Soma ,  Satoshi Shoji ,  Shuji Takahashi

IPC: G01R1/073 ,  H01L21/66

CPC classification number: G01R1/07342 ,  G01R1/07314 ,  H01L22/00

Abstract: A probe card includes: a plurality of conductive contact probes; a probe head configured to accommodate ends of the plurality of contact probes; a laminated member laminated on the probe head on a side opposite to a side of the probe head; and a fastening member including a screw and a nut configured to fasten the probe head and the laminated member to each other, the screw including a head provided on the side of the probe head in which the contact probes extend outwardly, and a shaft inserted through the probe head and the laminated member, the shaft extending and having a diameter smaller than a diameter of the head. The shaft is fixed to the probe head, is threadedly connected to the nut on an end side opposite to the head side, and is configured to fasten the probe head and the laminated member to each other.

公开(公告)号：US12092660B2

公开(公告)日：2024-09-17

申请号：US17909593

申请日：2021-03-02

Applicant: NHK Spring Co., Ltd.

Inventor： Naruhiko Nishiwaki ,  Masahiro Takahashi ,  Kazuya Soma ,  Satoshi Shoji ,  Shuji Takahashi

IPC: G01R1/073 ,  H01L21/66

CPC classification number: G01R1/07342 ,  G01R1/07314 ,  H01L22/00

Abstract: A probe card includes: a plurality of conductive contact probes; a probe head configured to accommodate ends of the plurality of contact probes; a laminated member laminated on the probe head on a side opposite to a side of the probe head; and a fastening member including a screw and a nut configured to fasten the probe head and the laminated member to each other, the screw including a head provided on the side of the probe head in which the contact probes extend outwardly, and a shaft inserted through the probe head and the laminated member, the shaft extending and having a diameter smaller than a diameter of the head. The shaft is fixed to the probe head, is threadedly connected to the nut on an end side opposite to the head side, and is configured to fasten the probe head and the laminated member to each other.