Lapping apparatus and lapping method
    1.
    发明申请
    Lapping apparatus and lapping method 失效
    研磨装置和研磨方法

    公开(公告)号:US20040166767A1

    公开(公告)日:2004-08-26

    申请号:US10774528

    申请日:2004-02-10

    IPC分类号: B24B051/00

    摘要: A lapping apparatus lapping a work having a pre-machined surface comprises a lapping film which includes a thin substrate having a surface provided with abrasive grains, a shoe disposed at a back surface side of the lapping film, a shoe driving unit which drives the shoe toward the work in order to press the abrasive-grained surface of the lapping film to the pre-machined surface of the work, a rotational driving unit which drives the work rotationally, a detecting unit which detects the position of the rotating work in the rotating direction, and a controlling unit which controls the pressing force of the shoe driving unit so as to drive the shoe correspondingly to the position of the work in the rotating direction during machining.

    摘要翻译: 研磨具有预加工表面的工件的研磨装置包括研磨膜,其包括具有设置有磨粒的表面的薄基材,设置在研磨膜的背面侧的鞋,驱动鞋的鞋驱动单元 朝向工作以将研磨膜的磨粒表面压到工件的预加工表面上,旋转驱动单元,其旋转地驱动工作;检测单元,其检测旋转工件在旋转中的位置 方向和控制单元,其控制鞋驱动单元的按压力,以便在加工期间相应于工件在旋转方向上的位置驱动鞋。

    Surface finishing apparatus and related method
    3.
    发明申请
    Surface finishing apparatus and related method 有权
    表面处理装置及相关方法

    公开(公告)号:US20040166776A1

    公开(公告)日:2004-08-26

    申请号:US10772429

    申请日:2004-02-06

    IPC分类号: B24B007/30

    摘要: An apparatus and method for surface finishing a workpiece is disclosed as including a workpiece supporting mechanism supporting a workpiece having a target shaped periphery with a given width to be surface finished and a tool holder holding a surface finish tool in abutting contact with the target shaped periphery of the workpiece. A pressure applying mechanism is operative to apply a pressure force to the surface finish tool through the tool holder to cause the surface finish tool to be held in pressured contact with the target shaped periphery, with the pressure force exhibiting a given distribution pattern depending upon an axial direction of the workpiece. A drive mechanism rotates the workpiece to allow the surface finish tool to surface finish the target shaped periphery into a given geometrical profile, variably contoured along an axis of the workpiece depending on the given pressure distribution pattern.

    摘要翻译: 公开了一种用于表面处理工件的装置和方法,包括:工件支撑机构,其支撑具有待表面加工的给定宽度的目标形状周边的工件;以及保持表面加工工具以与目标形状周边抵接的工具架 的工件。 压力施加机构可操作以通过工具保持器向表面加工工具施加压力,以使表面精加工工具与目标形状的周边保持压力接触,其中压力显示给定的分布图案,这取决于 工件的轴向。 驱动机构使工件旋转以允许表面光洁度工具将目标形状的周边表面光洁成给定的几何轮廓,根据给定的压力分布图案沿着工件的轴线可变地轮廓。