公开(公告)号：US20250109967A1

公开(公告)日：2025-04-03

申请号：US18979458

申请日：2024-12-12

Applicant: NXP USA, INC.

Inventor： Raghavendra N Sridhar ,  Gerhard Trauth ,  Keith L. Kraver ,  Sung Jin Jo

IPC: G01C25/00 ,  B81B7/02 ,  G01C19/5726 ,  G01C19/5762 ,  H04L27/12

Abstract: An oscillator drive circuit and a trim circuit are implemented inside an integrated circuit of a sensor. The drive circuit provides an oscillating drive signal at a resonant frequency to drive a movable mass of the sensor. The drive circuit includes a phase shift circuit having an input for receiving a first signal indicative of an oscillation of the movable mass and having an output. The phase shift circuit adds a phase shift component to the first signal and produces a second signal shifted in phase by the phase shift component. The trim circuit includes a first comparator for receiving the first signal, a second comparator for receiving the second signal, and a processing element. The processing element determines a phase lag between the first and second signals and produces trim code for use by the phase shift circuit, the trim code being configured to adjust the phase shift component.

公开(公告)号：US10715096B1

公开(公告)日：2020-07-14

申请号：US16782339

申请日：2020-02-05

Applicant: NXP USA, Inc.

Inventor： Keith Kraver ,  Sung Jo ,  Gerhard Trauth ,  Marianne Maleyran

IPC: H03H7/12 ,  H03H11/12 ,  H03H19/00 ,  H03M1/12

Abstract: Systems and methods for converting a capacitance signal into a band-limited voltage signal for improved signal processing are disclosed herein. Such systems can include a capacitance-to-voltage converter configured to convert a capacitive signal from a capacitive device that operates at a mechanical frequency into a raw voltage signal, a clock generator configured to convert the mechanical frequency into one or more clock signals, and a filter component configured to apply a band-pass filter response to the raw voltage signal to convert the raw voltage signal into a band-limited voltage signal. The clock generator can be configured to apply the one or more clock signals to the filter component to drive a first pole and a second pole of the band-pass filter response to track the mechanical frequency of the capacitive device such that the geometric mean of the first pole and the second pole is substantially equal to the mechanical frequency.

公开(公告)号：US20220326044A1

公开(公告)日：2022-10-13

申请号：US17654057

申请日：2022-03-08

Applicant: NXP USA, INC.

Inventor： Raghavendra N. Sridhar ,  Gerhard Trauth ,  Keith L. Kraver ,  Sung Jin Jo

IPC: G01C25/00 ,  G01C19/5762 ,  G01C19/5726 ,  H04L27/12 ,  B81B7/02

Abstract: An oscillator drive circuit and a trim circuit are implemented inside an integrated circuit of a sensor. The drive circuit provides an oscillating drive signal at a resonant frequency to drive a movable mass of the sensor. The drive circuit includes a phase shift circuit having an input for receiving a first signal indicative of an oscillation of the movable mass and having an output. The phase shift circuit adds a phase shift component to the first signal and produces a second signal shifted in phase by the phase shift component. The trim circuit includes a first comparator for receiving the first signal, a second comparator for receiving the second signal, and a processing element. The processing element determines a phase lag between the first and second signals and produces trim code for use by the phase shift circuit, the trim code being configured to adjust the phase shift component.

公开(公告)号：US12203774B2

公开(公告)日：2025-01-21

申请号：US17654057

申请日：2022-03-08

Applicant: NXP USA, INC.

Inventor： Raghavendra N Sridhar ,  Gerhard Trauth ,  Keith L. Kraver ,  Sung Jin Jo

IPC: G01C25/00 ,  B81B7/02 ,  G01C19/5726 ,  G01C19/5762 ,  H04L27/12

Abstract: An oscillator drive circuit and a trim circuit are implemented inside an integrated circuit of a sensor. The drive circuit provides an oscillating drive signal at a resonant frequency to drive a movable mass of the sensor. The drive circuit includes a phase shift circuit having an input for receiving a first signal indicative of an oscillation of the movable mass and having an output. The phase shift circuit adds a phase shift component to the first signal and produces a second signal shifted in phase by the phase shift component. The trim circuit includes a first comparator for receiving the first signal, a second comparator for receiving the second signal, and a processing element. The processing element determines a phase lag between the first and second signals and produces trim code for use by the phase shift circuit, the trim code being configured to adjust the phase shift component.

公开(公告)号：US10330475B2

公开(公告)日：2019-06-25

申请号：US15637955

申请日：2017-06-29

Applicant: NXP USA, INC.

Inventor： Thierry Cassagnes ,  Gerhard Trauth ,  Margaret Leslie Kniffin ,  Aaron A. Geisberger

IPC: G01C19/5726 ,  B81C1/00 ,  G01C19/5755 ,  G01C19/5769 ,  G01C19/5733

Abstract: An integrated device includes a MEMS device, such as a gyroscope, having a movable mass spaced apart from a substrate, the movable mass being configured to oscillate in a drive direction relative to the substrate. The integrated device further comprises an integrated circuit (IC) die having a surface coupled with the MEMS device such that the movable mass is interposed between the substrate and the surface of the IC die. An electrode structure is formed on the surface of the IC die, the electrode structure including a plurality of electrode segments vertically spaced apart from the movable mass. Openings extend through the movable mass and the electrode segments overlie the openings. Suitably selected electrode segments can be activated to electrostatically attract the movable mass toward sense electrodes vertically spaced apart from the MEMS to reduce quadrature motion of the movable mass.

公开(公告)号：US20180017387A1

公开(公告)日：2018-01-18

申请号：US15637955

申请日：2017-06-29

Applicant: NXP USA, INC.

Inventor： Thierry Cassagnes ,  Gerhard Trauth ,  Margaret Leslie Kniffin ,  Aaron A. Geisberger

IPC: G01C19/5726 ,  G01C19/5755 ,  B81C1/00 ,  G01C19/5769

CPC classification number: G01C19/5726 ,  B81B2201/0285 ,  B81C1/00198 ,  B81C1/00246 ,  G01C19/5733 ,  G01C19/5755 ,  G01C19/5769

Abstract: An integrated device includes a MEMS device, such as a gyroscope, having a movable mass spaced apart from a substrate, the movable mass being configured to oscillate in a drive direction relative to the substrate. The integrated device further comprises an integrated circuit (IC) die having a surface coupled with the MEMS device such that the movable mass is interposed between the substrate and the surface of the IC die. An electrode structure is formed on the surface of the IC die, the electrode structure including a plurality of electrode segments vertically spaced apart from the movable mass. Openings extend through the movable mass and the electrode segments overlie the openings. Suitably selected electrode segments can be activated to electrostatically attract the movable mass toward sense electrodes vertically spaced apart from the MEMS to reduce quadrature motion of the movable mass.