公开(公告)号：US12105114B2

公开(公告)日：2024-10-01

申请号：US18311302

申请日：2023-05-03

Applicant: NXP USA, Inc.

Inventor： Aaron A. Geisberger ,  Jun Tang

IPC: G01P15/125 ,  G01P15/08

CPC classification number: G01P15/125 ,  G01P2015/0871

Abstract: A microelectromechanical systems (MEMS) accelerometer comprises a compliant spring structure with a first beam, a second beam, and a rigid structure. One end of the first beam and one end of the second beam are coupled to the rigid structure and a proof mass is coupled to another end of the second beam. Further, a spring anchor is coupled to another end of the first beam. In response to the proof mass moving, an extension coupled to the rigid structure moves in an opposite direction to motion of the proof mass to contact the proof mass and stop the movement of the proof mass.

公开(公告)号：US20220282972A1

公开(公告)日：2022-09-08

申请号：US17189776

申请日：2021-03-02

Applicant: NXP USA, Inc.

Inventor： Aaron A. Geisberger

IPC: G01C19/5747 ,  G01C19/5712

Abstract: An angular rate sensor includes first and second proof masses spaced apart from a surface of a substrate. One each of first and second drive systems is interconnected with one each of the first and second proof masses. The first and second drive systems enable drive motion of the first and second proof masses along both of first and second axes in an orbital drive direction at a drive frequency, the first axis being perpendicular to the surface of the substrate and the second axis being parallel to the surface of the substrate. The sensor is sensitive to angular velocity about a third axis oriented parallel to the surface of the substrate and perpendicular to the second axis, and the drive frequency of the drive motion of the first and second proof masses changes in response to the angular velocity of the angular rate sensor about the third axis.

公开(公告)号：US20180252526A1

公开(公告)日：2018-09-06

申请号：US15450616

申请日：2017-03-06

Applicant: NXP USA, INC.

Inventor： Aaron A. Geisberger

IPC: G01C19/5776 ,  G01C19/5712

CPC classification number: G01C19/5776 ,  G01C19/5726 ,  G01C19/5733

Abstract: A MEMS device includes a mass system capable of undergoing oscillatory drive motion along a drive axis and oscillatory sense motion along a sense axis perpendicular to the drive axis. A quadrature compensation unit includes fixed and movable electrodes, each being lengthwise oriented along the drive axis. The movable electrode is coupled to the mass system. The fixed electrode has a first edge exhibiting a first stepped profile and the movable electrode has a second edge facing the first edge, the second edge exhibiting a second stepped profile. The fixed and movable electrodes are positioned in an immediately adjacent configuration such that when the movable electrode is not undergoing oscillatory motion, a gap between the first and second edges has a varying width corresponding to the first and second stepped edge profiles.

公开(公告)号：US20180231579A1

公开(公告)日：2018-08-16

申请号：US15432133

申请日：2017-02-14

Applicant: NXP USA, INC.

Inventor： Aaron A. Geisberger ,  Fengyuan Li

IPC: G01P15/125

CPC classification number: G01P15/125 ,  G01P2015/0808 ,  G01P2015/0814 ,  G01P2015/0831 ,  G01P2015/0871

Abstract: A microelectromechanical systems (MEMS) device, such as a single axis accelerometer, includes a movable mass suspended from a substrate. The movable mass has a first portion and a second portion. A first spring system interconnects the first portion of the movable mass with the second portion of the movable mass. A second spring system interconnects the first portion with an anchor system. The first spring system enables movement of the second portion of the movable mass in response to a shock event force imposed on the movable mass in a first direction that is orthogonal to a sense direction, wherein the first spring system inhibits movement of the first portion of the movable mass in the first direction in response to the shock event force. However, the first and second movable masses move together in response to an acceleration force in the sense direction.

公开(公告)号：US20250002331A1

公开(公告)日：2025-01-02

申请号：US18346154

申请日：2023-06-30

Applicant: NXP USA, Inc.

Inventor： Mostafa Soliman ,  Aaron A. Geisberger

IPC: B81B7/02 ,  B81C1/00 ,  G01C19/574

Abstract: A MEMS device and method of forming the same includes paired masses suspended above a substrate includes linkages that couple pairs of masses to each other. Inner sense linkages couple interior edges of adjacent masses to each other. The inner sense linkages are configured to exhibit a first stiffness when the adjacent masses coupled to each inner sense linkage move out-of-phase relative to each other along a preferred axis of the inner sense linkages and to exhibit a second, increased stiffness in response to in-phase motion of the adjacent masses coupled to each inner sense linkage.

公开(公告)号：US20230266358A1

公开(公告)日：2023-08-24

申请号：US18311302

申请日：2023-05-03

Applicant: NXP USA, Inc.

Inventor： Aaron A. Geisberger ,  Jun Tang

IPC: G01P15/125

CPC classification number: G01P15/125 ,  G01P2015/0871

Abstract: A microelectromechanical systems (MEMS) accelerometer comprises a compliant spring structure with a first beam, a second beam, and a rigid structure. One end of the first beam and one end of the second beam are coupled to the rigid structure and a proof mass is coupled to another end of the second beam. Further, a spring anchor is coupled to another end of the first beam. In response to the proof mass moving, an extension coupled to the rigid structure moves in an opposite direction to motion of the proof mass to contact the proof mass and stop the movement of the proof mass.

公开(公告)号：US20180017387A1

公开(公告)日：2018-01-18

申请号：US15637955

申请日：2017-06-29

Applicant: NXP USA, INC.

Inventor： Thierry Cassagnes ,  Gerhard Trauth ,  Margaret Leslie Kniffin ,  Aaron A. Geisberger

IPC: G01C19/5726 ,  G01C19/5755 ,  B81C1/00 ,  G01C19/5769

CPC classification number: G01C19/5726 ,  B81B2201/0285 ,  B81C1/00198 ,  B81C1/00246 ,  G01C19/5733 ,  G01C19/5755 ,  G01C19/5769

Abstract: An integrated device includes a MEMS device, such as a gyroscope, having a movable mass spaced apart from a substrate, the movable mass being configured to oscillate in a drive direction relative to the substrate. The integrated device further comprises an integrated circuit (IC) die having a surface coupled with the MEMS device such that the movable mass is interposed between the substrate and the surface of the IC die. An electrode structure is formed on the surface of the IC die, the electrode structure including a plurality of electrode segments vertically spaced apart from the movable mass. Openings extend through the movable mass and the electrode segments overlie the openings. Suitably selected electrode segments can be activated to electrostatically attract the movable mass toward sense electrodes vertically spaced apart from the MEMS to reduce quadrature motion of the movable mass.

公开(公告)号：US11460301B2

公开(公告)日：2022-10-04

申请号：US17189776

申请日：2021-03-02

Applicant: NXP USA, Inc.

Inventor： Aaron A. Geisberger

IPC: G01C19/56 ,  G01C19/5712 ,  G01C19/5747

Abstract: An angular rate sensor includes first and second proof masses spaced apart from a surface of a substrate. One each of first and second drive systems is interconnected with one each of the first and second proof masses. The first and second drive systems enable drive motion of the first and second proof masses along both of first and second axes in an orbital drive direction at a drive frequency, the first axis being perpendicular to the surface of the substrate and the second axis being parallel to the surface of the substrate. The sensor is sensitive to angular velocity about a third axis oriented parallel to the surface of the substrate and perpendicular to the second axis, and the drive frequency of the drive motion of the first and second proof masses changes in response to the angular velocity of the angular rate sensor about the third axis.

公开(公告)号：US20190120872A1

公开(公告)日：2019-04-25

申请号：US15791673

申请日：2017-10-24

Applicant: NXP USA, Inc.

Inventor： Aaron A. Geisberger

IPC: G01P15/125

Abstract: A MEMS device includes a substrate, a proof mass capable of moving relative to the substrate, and a motion limit structure. The motion limit structure includes an arm structure flexibly coupled to the proof mass or the substrate. The arm structure has a first contact region and a second contact region. In response to a shock force that causes the proof mass to move, the first contact region contacts a first stop region on the other one of the proof mass and the substrate. Following contact of the first contact region with the first stop region and upon continuation of the shock force, the second contact region contacts a second stop region on the other one of the proof mass and the substrate such that the contact between the second contact and stop regions reduces a contact force between the first contact and stop regions.

公开(公告)号：US10247753B2

公开(公告)日：2019-04-02

申请号：US15432133

申请日：2017-02-14

Applicant: NXP USA, INC.

Inventor： Aaron A. Geisberger ,  Fengyuan Li

IPC: G01P15/125 ,  G01P15/08

Abstract: A microelectromechanical systems (MEMS) device, such as a single axis accelerometer, includes a movable mass suspended from a substrate. The movable mass has a first portion and a second portion. A first spring system interconnects the first portion of the movable mass with the second portion of the movable mass. A second spring system interconnects the first portion with an anchor system. The first spring system enables movement of the second portion of the movable mass in response to a shock event force imposed on the movable mass in a first direction that is orthogonal to a sense direction, wherein the first spring system inhibits movement of the first portion of the movable mass in the first direction in response to the shock event force. However, the first and second movable masses move together in response to an acceleration force in the sense direction.