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公开(公告)号:US20060113628A1
公开(公告)日:2006-06-01
申请号:US11333212
申请日:2006-01-18
申请人: Naoki Idani , Toshiyuki Karasawa , Ryota Nanjo
发明人: Naoki Idani , Toshiyuki Karasawa , Ryota Nanjo
IPC分类号: H01L29/00
CPC分类号: G06F17/5068 , H01L21/31053
摘要: Designing method of an electronic device subjected to a chemical mechanical polishing process in a fabrication process thereof is conducted according to the steps of: dividing a substrate surface into first sub-regions; optimizing a coverage ratio of hard-to-polish regions in the first sub-regions to fall in a first predetermined range corresponding to the first sub-regions; dividing the substrate surface into second sub-regions different from the first sub-regions; and optimizing a coverage ratio of the hard-to-polish regions in the second sub-regions to fall in a second predetermined range corresponding to the second sub-regions, wherein patterns having a shorter edge of 5 μm or less are excluded from the optimization.
摘要翻译: 根据以下步骤进行在其制造工艺中进行化学机械抛光工艺的电子器件的设计方法:将衬底表面分成第一子区; 优化所述第一子区域中的硬抛光区域的覆盖率落在对应于所述第一子区域的第一预定范围内; 将基板表面分成与第一子区域不同的第二子区域; 并且优化所述第二子区域中的所述硬抛光区域的覆盖率落入对应于所述第二子区域的第二预定范围中,其中具有5μm或更小边缘的边缘的图案被从所述优化中排除 。
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公开(公告)号:US07017133B2
公开(公告)日:2006-03-21
申请号:US10849368
申请日:2004-05-20
申请人: Naoki Idani , Toshiyuki Karasawa , Ryota Nanjo
发明人: Naoki Idani , Toshiyuki Karasawa , Ryota Nanjo
IPC分类号: G06F17/50
CPC分类号: G06F17/5068 , H01L21/31053
摘要: Designing method of an electronic device subjected to a chemical mechanical polishing process in a fabrication process thereof is conducted according to the steps of: dividing a substrate surface into first sub-regions; optimizing a coverage ratio of hard-to-polish regions in the first sub-regions to fall in a first predetermined range corresponding to the first sub-regions; dividing the substrate surface into second sub-regions different from the first sub-regions; and optimizing a coverage ratio of the hard-to-polish regions in the second sub-regions to fall in a second predetermined range corresponding to the second sub-regions, wherein patterns having a shorter edge of 5 μm or less are excluded from the optimization.
摘要翻译: 根据以下步骤进行在其制造工艺中进行化学机械抛光工艺的电子器件的设计方法:将衬底表面分成第一子区; 优化所述第一子区域中的硬抛光区域的覆盖率落在对应于所述第一子区域的第一预定范围内; 将基板表面分成与第一子区域不同的第二子区域; 并且优化所述第二子区域中的所述硬抛光区域的覆盖率落入对应于所述第二子区域的第二预定范围中,其中具有5μm或更小边缘的边缘的图案被从所述优化中排除 。
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公开(公告)号:US07424688B2
公开(公告)日:2008-09-09
申请号:US11333212
申请日:2006-01-18
申请人: Naoki Idani , Toshiyuki Karasawa , Ryota Nanjo
发明人: Naoki Idani , Toshiyuki Karasawa , Ryota Nanjo
IPC分类号: G06F17/50
CPC分类号: G06F17/5068 , H01L21/31053
摘要: Designing method of an electronic device subjected to a chemical mechanical polishing process in a fabrication process thereof is conducted according to the steps of: dividing a substrate surface into first sub-regions; optimizing a coverage ratio of hard-to-polish regions in the first sub-regions to fall in a first predetermined range corresponding to the first sub-regions; dividing the substrate surface into second sub-regions different from the first sub-regions; and optimizing a coverage ratio of the hard-to-polish regions in the second sub-regions to fall in a second predetermined range corresponding to the second sub-regions, wherein patterns having a shorter edge of 5 μm or less are excluded from the optimization.
摘要翻译: 根据以下步骤进行在其制造工艺中进行化学机械抛光工艺的电子器件的设计方法:将衬底表面分成第一子区; 优化所述第一子区域中的硬抛光区域的覆盖率落在对应于所述第一子区域的第一预定范围内; 将基板表面分成与第一子区域不同的第二子区域; 并且优化所述第二子区域中的所述硬抛光区域的覆盖率落入对应于所述第二子区域的第二预定范围中,其中具有5μm或更小边缘的边缘的图案被从所述优化中排除 。
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公开(公告)号:US20050160381A1
公开(公告)日:2005-07-21
申请号:US10849368
申请日:2004-05-20
申请人: Naoki Idani , Toshiyuki Karasawa , Ryota Nanjo
发明人: Naoki Idani , Toshiyuki Karasawa , Ryota Nanjo
IPC分类号: H01L21/76 , G06F17/50 , H01L21/304 , H01L21/3105 , H01L21/3205 , H01L21/82 , H01L21/822 , H01L27/04
CPC分类号: G06F17/5068 , H01L21/31053
摘要: Designing method of an electronic device subjected to a chemical mechanical polishing process in a fabrication process thereof is conducted according to the steps of: dividing a substrate surface into first sub-regions; optimizing a coverage ratio of hard-to-polish regions in the first sub-regions to fall in a first predetermined range corresponding to the first sub-regions; dividing the substrate surface into second sub-regions different from the first sub-regions; and optimizing a coverage ratio of the hard-to-polish regions in the second sub-regions to fall in a second predetermined range corresponding to the second sub-regions, wherein patterns having a shorter edge of 5 μm or less are excluded from the optimization.
摘要翻译: 根据以下步骤进行在其制造工艺中进行化学机械抛光工艺的电子器件的设计方法:将衬底表面分成第一子区; 优化所述第一子区域中的硬抛光区域的覆盖率落在对应于所述第一子区域的第一预定范围内; 将基板表面分成与第一子区域不同的第二子区域; 并且优化所述第二子区域中的所述硬抛光区域的覆盖率落入对应于所述第二子区域的第二预定范围中,其中具有5μm或更小边缘的边缘的图案被从所述优化中排除 。
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公开(公告)号:US08406617B2
公开(公告)日:2013-03-26
申请号:US13257402
申请日:2010-04-08
申请人: Katsushige Yanagisawa , Akihiro Nagata , Tadashi Takeda , Shinji Minamisawa , Yuichi Takei , Hisahiro Ishihara , Toshiyuki Karasawa , Kiyoshi Miyazaki
发明人: Katsushige Yanagisawa , Akihiro Nagata , Tadashi Takeda , Shinji Minamisawa , Yuichi Takei , Hisahiro Ishihara , Toshiyuki Karasawa , Kiyoshi Miyazaki
IPC分类号: G03B17/00
CPC分类号: G03B13/36 , G02B27/646 , G03B5/00 , H04N5/2251 , H04N5/2257 , H04N5/23248
摘要: A photographic optical device may include a movable module having a camera module on which a lens and an imaging element are mounted, a support body, and a shake correction mechanism. The movable module may be provided with a sensor for detecting an inclination of the camera module and a cover member which structures an outer peripheral face of the movable module. The shake correction mechanism may be provided with a swing drive mechanism for swinging the movable module so that the optical axis is inclined. The swing drive mechanism may be provided with a drive magnet and a drive coil.
摘要翻译: 照相光学装置可以包括具有其上安装有透镜和成像元件的相机模块的可移动模块,支撑体和抖动校正机构。 可移动模块可以设置有用于检测相机模块的倾斜的传感器和构成可移动模块的外周面的盖构件。 抖动校正机构可以设置有用于使可移动模块摆动以使光轴倾斜的摆动驱动机构。 摆动驱动机构可以设置有驱动磁体和驱动线圈。
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公开(公告)号:US08224169B2
公开(公告)日:2012-07-17
申请号:US12914448
申请日:2010-10-28
申请人: Toshifumi Tsuruta , Kiyoshi Miyazaki , Tadashi Takeda , Hisahiro Ishihara , Katsushige Yanagisawa , Toshiyuki Karasawa , Yuichi Takei , Akihiro Nagata , Shinji Minamisawa
发明人: Toshifumi Tsuruta , Kiyoshi Miyazaki , Tadashi Takeda , Hisahiro Ishihara , Katsushige Yanagisawa , Toshiyuki Karasawa , Yuichi Takei , Akihiro Nagata , Shinji Minamisawa
CPC分类号: G03B17/00 , G02B7/022 , G02B7/08 , G02B27/646 , H04N5/2253 , H04N5/2257 , H04N5/23248
摘要: An optical imaging device, wherein an imaging unit is displaced to correct the vibrations, and the imaging unit is supported on a stationary object by a total of four suspension wires. A first imaging unit drive mechanism and a second imaging unit drive mechanism are provided as a pair at two positions on either side of the optical axis L. In the imaging unit drive mechanisms, imaging unit drive magnets, are held on the imaging unit side, which is the movable side, and imaging unit drive coils, are held on the stationary object side.
摘要翻译: 一种光学成像装置,其中成像单元移位以校正振动,并且成像单元由总共四个悬挂线支撑在静止物体上。 第一成像单元驱动机构和第二成像单元驱动机构一对设置在光轴L的两侧的两个位置。在成像单元驱动机构中,成像单元驱动磁体被保持在成像单元侧, 作为可动侧,成像单元驱动线圈保持在静止物侧。
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公开(公告)号:US20120020654A1
公开(公告)日:2012-01-26
申请号:US13257402
申请日:2010-04-08
申请人: Katsushige Yanagisawa , Akihiro Nagata , Tadashi Takeda , Shinji Minamisawa , Yuichi Takei , Hisahiro Ishihara , Toshiyuki Karasawa , Kiyoshi Miyazaki
发明人: Katsushige Yanagisawa , Akihiro Nagata , Tadashi Takeda , Shinji Minamisawa , Yuichi Takei , Hisahiro Ishihara , Toshiyuki Karasawa , Kiyoshi Miyazaki
IPC分类号: G02B27/64
CPC分类号: G03B13/36 , G02B27/646 , G03B5/00 , H04N5/2251 , H04N5/2257 , H04N5/23248
摘要: A photographic optical device may include a movable module having a camera module on which a lens and an imaging element are mounted, a support body, and a shake correction mechanism. The movable module may be provided with a sensor for detecting an inclination of the camera module and a cover member which structures an outer peripheral face of the movable module. The shake correction mechanism may be provided with a swing drive mechanism for swinging the movable module so that the optical axis is inclined. The swing drive mechanism may be provided with a drive magnet and a drive coil.
摘要翻译: 照相光学装置可以包括具有其上安装有透镜和成像元件的相机模块的可移动模块,支撑体和抖动校正机构。 可移动模块可以设置有用于检测相机模块的倾斜的传感器和构成可移动模块的外周面的盖构件。 抖动校正机构可以设置有用于使可移动模块摆动以使光轴倾斜的摆动驱动机构。 摆动驱动机构可以设置有驱动磁体和驱动线圈。
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公开(公告)号:US20130128360A1
公开(公告)日:2013-05-23
申请号:US13813229
申请日:2011-07-22
IPC分类号: G02B27/64
CPC分类号: G02B27/64 , G02B27/646 , G03B5/00 , G03B2205/0023 , G03B2205/0069 , H04N5/2252
摘要: An optical unit may include a fixed body, a movable module w rich holds an optical element, a swing support point which swingably supports the movable module, and a shake correction drive mechanism structured to swing the movable module with the swing support point as a swing center. The swing support point may be structured of an abutte d portion of two members in an optical axis direction between a bottom part of the movable module and a bottom part of the fixed body. At least one of the two members may be made of elastic material.
摘要翻译: 光学单元可以包括固定体,可移动模块富有保持光学元件,可摆动地支撑可移动模块的摆动支撑点和摇摆校正驱动机构,其构造成使可动模块与摆动支撑点摆动摆动 中央。 摆动支撑点可以由可移动模块的底部和固定体的底部之间的光轴方向上的两个构件的邻接部分构成。 两个构件中的至少一个可以由弹性材料制成。
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公开(公告)号:US20130100304A1
公开(公告)日:2013-04-25
申请号:US13702426
申请日:2011-05-24
申请人: Tatsuki Wade , Shinroku Asakawa , Shinji Minamisawa , Toshiyuki Karasawa , Katsushige Yanagisawa , Yoshihiro Hamada , Hayato Naito , Ryoji Komatsu , Hisahiro Ishihara
发明人: Tatsuki Wade , Shinroku Asakawa , Shinji Minamisawa , Toshiyuki Karasawa , Katsushige Yanagisawa , Yoshihiro Hamada , Hayato Naito , Ryoji Komatsu , Hisahiro Ishihara
IPC分类号: H04N5/232
CPC分类号: H04N5/23264 , G02B27/646 , G03B5/00 , G03B2205/0023 , G03B2205/0069 , H04N5/23258 , H04N5/23287
摘要: An optical unit may include a fixed body; a movable module which holds an optical element; a swing support point which swingably supports the movable module; a shake correction drive mechanism which swings the movable module with the swing support point as a swing center around two axial lines intersecting an optical axis direction of the optical element between an outer peripheral face of the movable module and the fixed body; a first photo reflector provided between a bottom part of the movable module and the fixed body at a position superposing on one of the two axial lines and that detects displacement of the movable module; and a second photo reflector provided between the bottom part of the movable module and the fixed body at a position superposing on the other of the two axial lines and that detects displacement of the movable module.
摘要翻译: 光学单元可以包括固定体; 保持光学元件的可移动模块; 可摆动地支撑可移动模块的摆动支撑点; 摇动校正驱动机构,其使作为摆动支承点的可动模块摆动在与所述可移动模块的外周面与所述固定体之间的与所述光学元件的光轴方向交叉的两条轴线的摆动中心; 第一光反射器,设置在所述可移动模块的底部和所述固定体之间,叠置在所述两条轴线中的一条轴线上并且检测所述可移动模块的位移的位置; 以及设置在所述可移动模块的底部与所述固定体之间的叠加在所述两条轴线中的另一条上的位置并且检测所述可移动模块的位移的第二光反射体。
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公开(公告)号:US08279289B2
公开(公告)日:2012-10-02
申请号:US12579136
申请日:2009-10-14
申请人: Akihiro Nagata , Toshiyuki Karasawa , Yuichi Takei , Tadashi Takeda , Hisahiro Ishihara , Shinji Minamisawa , Katsushige Yanagisawa , Kiyoshi Miyazaki
发明人: Akihiro Nagata , Toshiyuki Karasawa , Yuichi Takei , Tadashi Takeda , Hisahiro Ishihara , Shinji Minamisawa , Katsushige Yanagisawa , Kiyoshi Miyazaki
CPC分类号: H04N5/2254 , G02B27/646 , H04N5/2257 , H04N5/23248 , H04N5/23287
摘要: An optical unit with shake correcting function may include a movable module having a lens, a fixed body supporting the movable module, a shake detection sensor for detecting shake of the movable module, and at least one pair of magnetic drive mechanism for shake correction which is structured on both sides of the movable module so that the movable module is swung with respect to the fixed body on the basis of detection result of the shake detection sensor to correct the shake of the movable module. The magnetic drive mechanism for shake correction is disposed so that a shake correction magnet is held by the fixed body and a shake correction coil is held by the movable module. Further, a shake correction coil may be disposed in a first region, where magnetic lines of force generated by a shake correction magnet are directed in directions generally going away from a supporting point part and/or a second region where magnetic lines of force generated by the shake correction magnet are directed in directions generally going toward the supporting point part.
摘要翻译: 具有抖动校正功能的光学单元可以包括具有透镜的可移动模块,支撑可移动模块的固定体,用于检测可动模块的抖动的抖动检测传感器,以及用于抖动校正的至少一对磁驱动机构, 结构在可动模块的两侧,使得可移动模块基于抖动检测传感器的检测结果相对于固定体摆动,以校正可移动模块的抖动。 用于抖动校正的磁驱动机构被布置成使得振动校正磁体被固定体保持,并且抖动校正线圈由可移动模块保持。 此外,抖动校正线圈可以设置在第一区域中,其中由振动校正磁体产生的磁力线通常沿着远离支撑点部分的方向指向,和/或第二区域,其中由 振动校正磁体沿着通常朝向支撑点部分的方向指向。
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