Abstract:
A control vent system is disclosed for reducing volatile impurities in a gaseous product of ultra-high purity delivered from a storage vessel containing an inventory of a non-cryogenic liquid product, as well as a method and a system for delivering the product from the storage vessel. The control vent system includes a vent line attached to the storage vessel and a condenser in the vent line. Coolant (e.g., a refrigerant) is transferred between the condenser and a source of coolant, such as a refrigeration unit. The method of reducing volatile impurities includes three steps. The first step is to vent part of the gaseous vapor from the gaseous vapor space to a condenser. The second step is to cool the vented gaseous vapor in the condenser to a temperature below the boiling point of the liquid product and above the boiling points of the volatile impurities. As a result, a first portion of the vented gaseous vapor is condensed and a second portion of the vented gaseous vapor is not condensed. The final step is to vent the second portion of the vented gaseous vapor from the condenser.
Abstract:
A method and an apparatus are disclosed for detecting an occurrence of a liquid dry condition in a container containing a liquefied compressed gas while the gaseous phase of the liquefied compressed gas is being removed from the container over time. The apparatus includes a first sensor, a second sensor, and a computer, preferably a programmed logic controller (PLC). The first sensor senses temperature (T) inside the container and provides a signal indicative thereof. The second sensor senses pressure (P) inside the container and provides a signal indicative thereof. The computer receives signals from the first and second sensors, and determines the rates of change in the pressure (dP/dt) and the temperature (dT/dt) inside the container over time. The computer identifies an occurrence of a sudden increase in the rate of change in the temperature (dT/dt) inside the container and a substantial simultaneous occurrence of a sudden decrease in the rate of change in the pressure (dP/dt) inside the container, said substantially simultaneous occurrences indicating an occurrence of a liquid dry condition in the container. The preferred embodiment includes a third sensor for sensing ambient temperature (Ta) and for providing a signal indicative thereof. The computer receives a signal from the third sensor and accounts for a change in the ambient temperature in determining the rate of change in the temperature (dT/dt) inside the container over time.
Abstract:
A method and an apparatus are disclosed for detecting an occurrence of a liquid dry condition in a container containing a liquefied compressed gas while the gaseous phase of the liquefied compressed gas is being removed from the container over time. The apparatus includes a first sensor, a second sensor, and a computer, preferably a programmed logic controller (PLC). The first sensor senses temperature (T) inside the container and provides a signal indicative thereof. The second sensor senses pressure (P) inside the container and provides a signal indicative thereof. The computer receives signals from the first and second sensors, and determines the rates of change in the pressure (dP/dt) and the temperature (dT/dt) inside the container over time. The computer identifies an occurrence of a sudden increase in the rate of change in the temperature (dT/dt) inside the container and a substantial simultaneous occurrence of a sudden decrease in the rate of change in the pressure (dP/dt) inside the container, said substantially simultaneous occurrences indicating an occurrence of a liquid dry condition in the container. The preferred embodiment includes a third sensor for sensing ambient temperature (Ta) and for providing a signal indicative thereof. The computer receives a signal from the third sensor and accounts for a change in the ambient temperature in determining the rate of change in the temperature (dT/dt) inside the container over time.
Abstract:
A method [and an apparatus are] is disclosed for detecting an occurrence of a liquid dry condition in a container containing a liquefied compressed gas while the gaseous phase of the liquefied compressed gas is being removed from the container over time. The [apparatus includes] method uses a first sensor, a second sensor, and a computer, preferably a programmed logic controller (PLC). The first sensor senses temperature (T) inside the container and provides a signal indicative thereof. The second sensor senses pressure (P) inside the container and provides a signal indicative thereof. The computer receives signals from the first and second sensors, and determines the rates of change in the pressure (dP/dt) and the temperature (dT/dt) inside the container over time. The computer identifies an occurrence of a sudden increase in the rate of change in the temperature (dT/dt) inside the container and a substantial simultaneous occurrence of a sudden decrease in the rate of change in the pressure (dP/dt) inside the container, [said] substantially simultaneous occurrences indicating an occurrence of a liquid dry condition in the container. [The preferred embodiment includes a third sensor for sensing ambient temperature (T.sub.a) and for providing a signal indicative thereof. The computer receives a signal from the third sensor and accounts for a change in the ambient temperature in determining the rate of change in the temperature (dT/dt) inside the container over time.]
Abstract:
Method and apparatus for transporting, storing and delivering dangerous chemicals in a high pressure stacked tube array configuration. Tubes are divided into sub-groups with outside tubes containing inert gases and inside tubes containing chemicals. Inside and outside tubes in each sub-group are manifolded to permit off loading of dangerous chemicals into outside tubes in the event of a leak in an inside tube or tubes in the sub-group. The apparatus includes a manifold system for segregation of source chemicals to provide two independent outlets.
Abstract:
A method and apparatus for storing ultra high purity non-cryogenic liquefied compressed gases, such as ammonia (NH.sub.3), and delivering a vaporized gaseous product from those liquefied gases for semiconductor processing applications. The delivery method includes withdrawing and heating gaseous product from a storage vessel containing the liquefied compressed gas, and then piping the heated gas through the liquid contained in the storage vessel in a heat exchange fashion. The heat exchange with the liquid inside the vessel induces boiling to maintain a vaporized gaseous product under a minimum positive pressure in said vessel. After liberating its heat, the gaseous product is delivered to a semiconductor manufacturing point of use.