公开(公告)号：US09255944B1

公开(公告)日：2016-02-09

申请号：US14665121

申请日：2015-03-23

Applicant: National Applied Research Laboratories

Inventor： Chun-Ting Lin ,  Ming-Hua Shiao ,  Shu-Hung Tung ,  Mao-Nan Chang

IPC: G01Q70/14 ,  G01Q70/18

CPC classification number: G01Q70/18 ,  G01Q70/14

Abstract: A platinum-platinum silicide modified silicon composite tip apex, and a method for forming the aforesaid tip apex are disclosed, where a metallic precursor solution and a silicon probe are reacted to form a local platinum nano-structure, which could be precisely controlled with local selectivity, and a local platinum silicide layer is formed between the platinum nano-structure and the silicon probe with an atmospheric microwave annealing (a-MWA) process conducted as well, largely enhancing the conductivity of the tip and spatial resolution of the field detection in field sensitive scanning probe microscopy. In addition to exemption from a stray-field effect and thus having better image quality, the platinum silicide-containing probe could more efficiently enhance the interfacial electron transfer efficiency as compared to the probe tip having only a platinum nano-structure, so that the probe could be applicable to a controlled conductive probe having high spatial resolution.

Abstract translation: 公开了一种铂 - 铂硅化物改性硅复合顶尖，以及形成上述顶尖的方法，其中使金属前体溶液和硅探针反应形成局部铂纳米结构，其可以用局部 选择性，并且在铂纳米结构和硅探针之间形成局部铂硅化物层，同时进行大气微波退火（a-MWA）工艺，大大提高了尖端的导电性和场检测的空间分辨率 场敏感扫描探针显微镜。 与仅具有铂纳米结构的探针头相比，除了免除杂散场效应并且因此具有更好的图像质量之外，与仅具有铂纳米结构的探针头相比，含铂硅化物探针可以更有效地提高界面电子转移效率，使得探针 可以适用于具有高空间分辨率的受控导电探针。