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    Tip structure of platinum-platinum silicide-silicon composite field sensor probe and method for forming MSTA strucutre on the probe
    1.
    发明授权
    Tip structure of platinum-platinum silicide-silicon composite field sensor probe and method for forming MSTA strucutre on the probe 有权
    铂铂硅化硅 - 硅复合材料场传感器探头的尖端结构和探针上形成MSTA结构的方法

    公开(公告)号：US09255944B1

    公开(公告)日：2016-02-09

    申请号：US14665121

    申请日：2015-03-23

    申请人： National Applied Research Laboratories

    发明人： Chun-Ting Lin ,  Ming-Hua Shiao ,  Shu-Hung Tung ,  Mao-Nan Chang

    IPC分类号： G01Q70/14 ,  G01Q70/18

    CPC分类号： G01Q70/18 ,  G01Q70/14

    摘要： A platinum-platinum silicide modified silicon composite tip apex, and a method for forming the aforesaid tip apex are disclosed, where a metallic precursor solution and a silicon probe are reacted to form a local platinum nano-structure, which could be precisely controlled with local selectivity, and a local platinum silicide layer is formed between the platinum nano-structure and the silicon probe with an atmospheric microwave annealing (a-MWA) process conducted as well, largely enhancing the conductivity of the tip and spatial resolution of the field detection in field sensitive scanning probe microscopy. In addition to exemption from a stray-field effect and thus having better image quality, the platinum silicide-containing probe could more efficiently enhance the interfacial electron transfer efficiency as compared to the probe tip having only a platinum nano-structure, so that the probe could be applicable to a controlled conductive probe having high spatial resolution.

    摘要翻译： 公开了一种铂 - 铂硅化物改性硅复合顶尖，以及形成上述顶尖的方法，其中使金属前体溶液和硅探针反应形成局部铂纳米结构，其可以用局部 选择性，并且在铂纳米结构和硅探针之间形成局部铂硅化物层，同时进行大气微波退火（a-MWA）工艺，大大提高了尖端的导电性和场检测的空间分辨率 场敏感扫描探针显微镜。 与仅具有铂纳米结构的探针头相比，除了免除杂散场效应并且因此具有更好的图像质量之外，与仅具有铂纳米结构的探针头相比，含铂硅化物探针可以更有效地提高界面电子转移效率，使得探针 可以适用于具有高空间分辨率的受控导电探针。

    Method of irradiating ultraviolet light on silicon substrate surface for improving quality of native oxide layer and apparatus using the same
    2.
    发明授权
    Method of irradiating ultraviolet light on silicon substrate surface for improving quality of native oxide layer and apparatus using the same 有权

    公开(公告)号：US10026620B1

    公开(公告)日：2018-07-17

    申请号：US15630110

    申请日：2017-06-22

    申请人： National Applied Research Laboratories

    发明人： Mao-Nan Chang ,  Tsung-Yu Chan ,  Chia-Yi Wu ,  Chun-Ting Lin ,  Ming-Hua Shiao

    IPC分类号： H01L21/3105

    摘要： The present invention relates to the growth of a native oxide layer on a surface of a silicon substrate. Deep ultraviolet (UV) light is irradiated to thereby effectively improve the quality of the native oxide layer. By improving the quality, the difficulty of the surface treatment of a cross-section sample for scanning capacitance microscopy (SCM) is improved. The life cycle and reliability of the sample are also improved with enhanced reproducibility for the measurement of SCM. Thus, the present invention provides an improved method and an apparatus using the same to prepare a cross-sectional sample for SCM. The feasibility and the concrete method for enhancing oxide layer quality on a silicon substrate surface by UV light irradiation under a humidity-controlled environment are established. The optimum parameters of irradiation time for n-type and p-type samples are made.

    Method for Modifying Probe Tip
    3.
    发明申请
    Method for Modifying Probe Tip 审中-公开
    修正探针尖的方法

    公开(公告)号：US20140193585A1

    公开(公告)日：2014-07-10

    申请号：US13799941

    申请日：2013-03-13

    申请人： Instrument Technology Research Center, National Applied Research Laboratories

    发明人： Chun-Ting Lin ,  Ming-Han Yu ,  Ming-Hua Shiao ,  Mao-Nan Chang

    IPC分类号： B05D3/02

    CPC分类号： G01Q70/16 ,  C23C18/54 ,  G01R1/06738 ,  G01R3/00

    摘要： A method for modifying the probe tip of a microscope, including the following steps of providing a substrate, providing a metal precursor solution with fluoride ion on the substrate, using the probe tip to dip into the metal precursor solution with fluoride ion on the substrate in order to form a nano-metal particle on the probe tip by the reduction reaction of at least one metal ion in the metal precursor solution. As the result, the probe tip having the nano-metal particle thereon can increase the spatial-resolution of the measuring performance of the field sensitive scanning probe microscope due to the great reduction of stray field effects.

    摘要翻译： 一种用于改变显微镜的探针尖端的方法，包括以下步骤：提供衬底，在衬底上提供具有氟离子的金属前体溶液，使用探针尖端在衬底上以氟离子浸入金属前体溶液中 为了通过金属前体溶液中的至少一种金属离子的还原反应在探针尖端上形成纳米金属颗粒。 结果，由于杂散场效应的大幅降低，其上具有纳米金属颗粒的探针尖端可以增加场敏扫描探针显微镜的测量性能的空间分辨率。

    METAMATERIAL STRUCTURE AND THE METHOD OF MANUFACTURING THE SAME
    6.
    发明申请
    METAMATERIAL STRUCTURE AND THE METHOD OF MANUFACTURING THE SAME 审中-公开
    金属结构及其制造方法

    公开(公告)号：US20140218265A1

    公开(公告)日：2014-08-07

    申请号：US13836427

    申请日：2013-03-15

    申请人： NATIONAL APPLIED RESEARCH LABORATORIES

    发明人： Che-Chin Chen ,  Yu-Hsiang Tang ,  Chun-Ting Lin ,  Ming-Hua Shiao ,  Din Ping Tsai

    IPC分类号： H01Q15/10

    CPC分类号： H01Q15/10 ,  H01Q15/0086

    摘要： A metamaterial structure and method of manufacturing the same are disclosed. The metamaterial includes a substrate, a first resonance unit and a second resonance unit. The surface of the substrate has a bump. The first resonance unit and the second resonance unit are disposed on an adhesive direction from the bump, whereby forming the sterical resonance unit, which is able to increase the coupling efficiency of incident light in some specific frequency and form an in-situ reconfigurable metamaterial.

    摘要翻译： 公开了一种超材料结构及其制造方法。 超材料包括衬底，第一谐振单元和第二谐振单元。 衬底的表面具有凸起。 第一谐振单元和第二谐振单元从凸块沿着粘合方向设置，从而形成空间谐振单元，其能够增加入射光在特定频率下的耦合效率，并形成原位可重构的超材料。