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    Method for Modifying Probe Tip
    2.
    发明申请
    Method for Modifying Probe Tip 审中-公开
    修正探针尖的方法

    公开(公告)号：US20140193585A1

    公开(公告)日：2014-07-10

    申请号：US13799941

    申请日：2013-03-13

    Applicant: Instrument Technology Research Center, National Applied Research Laboratories

    Inventor： Chun-Ting Lin ,  Ming-Han Yu ,  Ming-Hua Shiao ,  Mao-Nan Chang

    IPC: B05D3/02

    CPC classification number: G01Q70/16 ,  C23C18/54 ,  G01R1/06738 ,  G01R3/00

    Abstract: A method for modifying the probe tip of a microscope, including the following steps of providing a substrate, providing a metal precursor solution with fluoride ion on the substrate, using the probe tip to dip into the metal precursor solution with fluoride ion on the substrate in order to form a nano-metal particle on the probe tip by the reduction reaction of at least one metal ion in the metal precursor solution. As the result, the probe tip having the nano-metal particle thereon can increase the spatial-resolution of the measuring performance of the field sensitive scanning probe microscope due to the great reduction of stray field effects.

    Abstract translation: 一种用于改变显微镜的探针尖端的方法，包括以下步骤：提供衬底，在衬底上提供具有氟离子的金属前体溶液，使用探针尖端在衬底上以氟离子浸入金属前体溶液中 为了通过金属前体溶液中的至少一种金属离子的还原反应在探针尖端上形成纳米金属颗粒。 结果，由于杂散场效应的大幅降低，其上具有纳米金属颗粒的探针尖端可以增加场敏扫描探针显微镜的测量性能的空间分辨率。

    Tip structure of platinum-platinum silicide-silicon composite field sensor probe and method for forming MSTA strucutre on the probe
    3.
    发明授权
    Tip structure of platinum-platinum silicide-silicon composite field sensor probe and method for forming MSTA strucutre on the probe 有权
    铂铂硅化硅 - 硅复合材料场传感器探头的尖端结构和探针上形成MSTA结构的方法

    公开(公告)号：US09255944B1

    公开(公告)日：2016-02-09

    申请号：US14665121

    申请日：2015-03-23

    Applicant: National Applied Research Laboratories

    Inventor： Chun-Ting Lin ,  Ming-Hua Shiao ,  Shu-Hung Tung ,  Mao-Nan Chang

    IPC: G01Q70/14 ,  G01Q70/18

    CPC classification number: G01Q70/18 ,  G01Q70/14

    Abstract: A platinum-platinum silicide modified silicon composite tip apex, and a method for forming the aforesaid tip apex are disclosed, where a metallic precursor solution and a silicon probe are reacted to form a local platinum nano-structure, which could be precisely controlled with local selectivity, and a local platinum silicide layer is formed between the platinum nano-structure and the silicon probe with an atmospheric microwave annealing (a-MWA) process conducted as well, largely enhancing the conductivity of the tip and spatial resolution of the field detection in field sensitive scanning probe microscopy. In addition to exemption from a stray-field effect and thus having better image quality, the platinum silicide-containing probe could more efficiently enhance the interfacial electron transfer efficiency as compared to the probe tip having only a platinum nano-structure, so that the probe could be applicable to a controlled conductive probe having high spatial resolution.

    Abstract translation: 公开了一种铂 - 铂硅化物改性硅复合顶尖，以及形成上述顶尖的方法，其中使金属前体溶液和硅探针反应形成局部铂纳米结构，其可以用局部 选择性，并且在铂纳米结构和硅探针之间形成局部铂硅化物层，同时进行大气微波退火（a-MWA）工艺，大大提高了尖端的导电性和场检测的空间分辨率 场敏感扫描探针显微镜。 与仅具有铂纳米结构的探针头相比，除了免除杂散场效应并且因此具有更好的图像质量之外，与仅具有铂纳米结构的探针头相比，含铂硅化物探针可以更有效地提高界面电子转移效率，使得探针 可以适用于具有高空间分辨率的受控导电探针。

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