公开(公告)号：US20210367393A1

公开(公告)日：2021-11-25

申请号：US17396928

申请日：2021-08-09

申请人： National University Corporation Nagaoka University of Technology ,  Gigaphoton Inc.

发明人： Weihua JIANG ,  Hiroshi UMEDA ,  Koji KAKIZAKI

IPC分类号： H01S3/097 ,  H01F27/24 ,  H01F27/28 ,  G03F7/20

摘要： A high voltage pulse generation device includes n transformer cores configuring a transformer, n being a natural number of 2 or more, each of the n transformer cores being configured to form a magnetic circuit along a first plane and to have a width in a first direction parallel to the first plane larger than a width in a second direction parallel to the first plane and perpendicular to the first direction; n primary electric circuits of the transformer connected in parallel to each other, each of the n primary electric circuits including at least one primary coil, and m pulse generation units connected in parallel to the at least one primary coil, m being a natural number equal to or more than 2; and a secondary electric circuit of the transformer including a secondary coil and connected to a pair of discharge electrodes.

公开(公告)号：US20200209760A1

公开(公告)日：2020-07-02

申请号：US16812784

申请日：2020-03-09

申请人： Gigaphoton Inc.

发明人： Koji KAKIZAKI ,  Masakazu KOBAYASHI ,  Akira SUWA ,  Osamu WAKABAYASHI

IPC分类号： G03F7/20 ,  H01S3/225 ,  H01S3/11

摘要： A laser processing method of performing laser processing on a transparent material that is transparent to ultraviolet light by using a laser processing system includes: performing relative positioning of a transfer position of a transfer image and the transparent material in an optical axis direction of a pulse laser beam so that the transfer position is set at a position inside the transparent material at a predetermined depth ΔZsf from a surface of the transparent material in the optical axis direction; and irradiating the transparent material with the pulse laser beam having a pulse width of 1 ns to 100 ns inclusive and a beam diameter of 10 μm to 150 μm inclusive at the transfer position.