公开(公告)号：US20110204023A1

公开(公告)日：2011-08-25

申请号：US12715522

申请日：2010-03-02

申请人： No-Hyun Huh ,  Gyoo-Dong Kim ,  Chang-Woo Nam ,  Sung-Min Park ,  Dae-Kyu Choi

发明人： No-Hyun Huh ,  Gyoo-Dong Kim ,  Chang-Woo Nam ,  Sung-Min Park ,  Dae-Kyu Choi

IPC分类号： C23F1/00 ,  C23F1/08

CPC分类号： H01J37/32165 ,  H01J37/321 ,  H01J37/3211 ,  H01J37/32449

摘要： Disclosed is a multi-inductively coupled plasma reactor and method thereof. In a multi-inductively coupled plasma reacting method, an etching method to increase a specific portion of a substrate to be processed includes etching a specific portion of a substrate to be processed; and depositing a passivation layer on a surface of the specific portion etched, wherein the etching and depositing steps are repeatedly proceeded, and one of both steps is executed when there is plasma formed by a central plasma source and a peripheral plasma source. According to the multi-inductively coupled plasma reactor and method thereof of the invention, it is possible that plasma is uniformly processed on the entire area of the substrate since the central plasma source and the peripheral source are provided separately. Further, it is possible to form an independent multiple plasma area without electrical interference in the plasma reactor using the interference prevention electrode grounded between the central plasma source and the peripheral plasma source. Further, the plasma formed by the central plasma source and the peripheral plasma source is used to deeply etch a specific portion of the substrate to be processed.

摘要翻译： 公开了一种多电感耦合等离子体反应器及其方法。 在多电感耦合等离子体反应方法中，用于增加要处理的衬底的特定部分的蚀刻方法包括蚀刻要处理的衬底的特定部分; 以及在蚀刻的特定部分的表面上沉积钝化层，其中反复进行蚀刻和沉积步骤，并且当存在由中心等离子体源和外围等离子体源形成的等离子体时，执行两个步骤之一。 根据本发明的多电感耦合等离子体反应器及其方法，由于中心等离子体源和外围源分别设置，因此可以在衬底的整个区域上均匀地处理等离子体。 此外，可以使用在中心等离子体源和外围等离子体源之间接地的防干扰电极在等离子体反应器中形成无电干扰的独立多等离子体区域。 此外，由中央等离子体源和外围等离子体源形成的等离子体用于深刻蚀刻待处理衬底的特定部分。

公开(公告)号：US06169413A

公开(公告)日：2001-01-02

申请号：US08854723

申请日：1997-05-12

申请人： Woon-Juk Paek ,  Jeong-Min Kang ,  Dae-Geun Ryoo ,  Young-Bok Sung ,  Chang-Woo Nam

发明人： Woon-Juk Paek ,  Jeong-Min Kang ,  Dae-Geun Ryoo ,  Young-Bok Sung ,  Chang-Woo Nam

IPC分类号： G01R3102

CPC分类号： G06F11/2221 ,  G01R31/2849 ,  G06F11/24 ,  G11B27/36

摘要： A system for multi-testing a number of hard disk drives (HDDs) comprises a burn-in chamber of high temperature for orderly stacking the HDDs in rows and columns, a control chamber thermally insulated from the burn-in chamber by a partition wall for detachably mounting a plurality of HDD test computers in rows and columns electrically connected with the HDDs with each HDD test computer testing corresponding ones of said HDDs, and a host computer for controlling an internal environment of the burn-in chamber and operation of the HDD test computers.

摘要翻译： 用于多个测试多个硬盘驱动器（HDD）的系统包括一个高温老化室，用于以行和列顺序堆叠HDD;控制室，其通过分隔壁与老化室隔热， 每个HDD测试计算机测试对应的所述HDD，以及主计算机，用于控制老化室的内部环境和HDD测试的操作，可拆卸地将多个HDD测试计算机安装在与HDD电连接的行和列中 电脑。

公开(公告)号：US6104555A

公开(公告)日：2000-08-15

申请号：US10820

申请日：1998-01-22

申请人： Chang-Woo Nam

发明人： Chang-Woo Nam

IPC分类号： G06F3/06 ,  G11B5/86 ,  G11B20/10 ,  G11B20/12 ,  G11B27/00 ,  G11B27/034 ,  G11B3/64

CPC分类号： G06F3/0607 ,  G06F3/0632 ,  G06F3/0647 ,  G06F3/0689 ,  G11B27/034 ,  G11B5/86 ,  G11B2220/20 ,  G11B27/002

摘要： A device for copying programs installed on an original hard disk drive into duplicating hard disk drives is disclosed. The storage area of an original HDD is divided into a plurality of sub-storage areas corresponding to different HDD models so as to store initial programs corresponding to the different HDD models in respective sub-storage areas. Thereby, the above original initial programs corresponding to the different HDD models are copied into respective duplicating HDDs.

摘要翻译： 公开了一种用于将安装在原始硬盘驱动器上的程序复制到复制硬盘驱动器中的装置。 原始HDD的存储区域被划分为与不同HDD模型相对应的多个子存储区域，以便将相应于不同HDD模型的初始程序存储在各个子存储区域中。 由此，将与不同HDD型号相对应的上述原始初始程序复制到相应的复制HDD中。