METHOD FOR REPAIRING PATTERN DEFECT ON ELECTRONIC CIRCUIT AND APPARATUS THEREFOR
    1.
    发明申请
    METHOD FOR REPAIRING PATTERN DEFECT ON ELECTRONIC CIRCUIT AND APPARATUS THEREFOR 有权
    用于修复电子电路图形缺陷的方法及其设备

    公开(公告)号:US20090196978A1

    公开(公告)日:2009-08-06

    申请号:US12359405

    申请日:2009-01-26

    IPC分类号: C23C16/52 B05C11/00

    摘要: The pattern defect repairing apparatus comprises an application head, a waste ejection board, a waste ejection vessel, a waste ejection board moving stage, a head lifting stage, and an application unit base. The application head comprises an ink-jet head and a head holder. An ink jet head has an ejection nozzle, and is attached to the head holder and able to be moved up and down by the head lifting stage. The waste ejection vessel is provided to the waste ejection board and able to be moved between a waste ejection position and a retreated position by the waste ejection board moving stage. Repairing material is ejected for waste onto the waste ejection board set in the vicinity of the nozzle immediately before application to repair the defect. The tip end of the nozzle is prevented from being dried.

    摘要翻译: 图案缺陷修复装置包括应用头,废弃排出板,废弃排出容器,废弃排出板移动台,头部提升台以及应用单元基座。 应用头包括喷墨头和头架。 喷墨头具有喷射嘴,并且附接到头部保持器并且能够通过头部提升台上下移动。 废弃物排出容器设置在废弃物排出板上,能够通过废弃排出板移动台在废弃物排出位置和退避位置之间移动。 修理材料在应用前立即将废料排出到设置在喷嘴附近的废弃物排出板上,以修复缺陷。 防止喷嘴的前端被干燥。

    Method for repairing pattern defect on electronic circuit and apparatus therefor
    2.
    发明授权
    Method for repairing pattern defect on electronic circuit and apparatus therefor 有权
    修复电子电路图案缺陷的方法及其设备

    公开(公告)号:US08206775B2

    公开(公告)日:2012-06-26

    申请号:US12359405

    申请日:2009-01-26

    摘要: The pattern defect repairing apparatus comprises an application head, a waste ejection board, a waste ejection vessel, a waste ejection board moving stage, a head lifting stage, and an application unit base. The application head comprises an ink-jet head and a head holder. An ink jet head has an ejection nozzle, and is attached to the head holder and able to be moved up and down by the head lifting stage. The waste ejection vessel is provided to the waste ejection board and able to be moved between a waste ejection position and a retreated position by the waste ejection board moving stage. Repairing material is ejected for waste onto the waste ejection board set in the vicinity of the nozzle immediately before application to repair the defect. The tip end of the nozzle is prevented from being dried.

    摘要翻译: 图案缺陷修复装置包括应用头,废弃排出板,废弃排出容器,废弃排出板移动台,头部提升台以及应用单元基座。 应用头包括喷墨头和头架。 喷墨头具有喷射嘴,并且附接到头部保持器并且能够通过头部提升台上下移动。 废弃物排出容器设置在废弃物排出板上,能够通过废弃排出板移动台在废弃物排出位置和退避位置之间移动。 修理材料在应用前立即将废料排出到设置在喷嘴附近的废弃物排出板上,以修复缺陷。 防止喷嘴的前端被干燥。