公开(公告)号：US20120128892A1

公开(公告)日：2012-05-24

申请号：US13114096

申请日：2011-05-24

申请人： Noriaki TOYODA ,  Isao Yamada ,  Masaki Narushima ,  Masayuki Harashima ,  Eisuke Morisaki

发明人： Noriaki TOYODA ,  Isao Yamada ,  Masaki Narushima ,  Masayuki Harashima ,  Eisuke Morisaki

IPC分类号： C23C16/02 ,  C23C16/34

CPC分类号： H01L21/02024 ,  C30B33/00 ,  H01L29/1608

摘要： A disclosed surface processing method includes a first processing step, wherein a gas cluster beam is generated from a source material that does not contain nitrogen, and irradiated to a member to be processed, and a second processing step, wherein a nitrogen gas cluster beam is generated and irradiated to the member to be processed.

摘要翻译： 所公开的表面处理方法包括：第一处理步骤，其中从不含氮的源材料产生气体束束并照射到待处理的构件;以及第二处理步骤，其中氮气簇束为 产生并照射到待处理的构件。

公开(公告)号：US20120125889A1

公开(公告)日：2012-05-24

申请号：US13113746

申请日：2011-05-23

申请人： Noriaki TOYODA ,  Isao Yamada ,  Masaki Narushima

发明人： Noriaki TOYODA ,  Isao Yamada ,  Masaki Narushima

IPC分类号： B44C1/22 ,  B08B7/00

CPC分类号： H01J37/08 ,  G03F7/427 ,  H01J2237/006 ,  H01J2237/0812 ,  H01J2237/31 ,  H01L21/02041 ,  H01L21/31116

摘要： A cluster beam generating apparatus that generates a cluster beam includes a mixer that mixes a gas source material and a liquid source material; a nozzle that supplies a cluster beam including clusters originating from the gas source material and the liquid source material that are mixed in the mixer; and a temperature adjusting portion that adjusts a temperature of the nozzle, thereby controlling a ratio of the clusters originating from the gas source material and the clusters originating from the liquid source material in the cluster beam.

摘要翻译： 产生聚束束的聚束束发生装置包括混合气体源材料和液体源材料的混合器; 提供包括源自气源材料的簇和混合在混合器中的液体源材料的簇束的喷嘴; 以及温度调节部，其调节喷嘴的温度，从而控制源自气体源材料的簇和源自簇流束中的液体源材料的簇的比例。