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公开(公告)号:US06890839B2
公开(公告)日:2005-05-10
申请号:US10257460
申请日:2002-01-15
申请人: Norihito Kawaguchi , Kenichiro Nishida , Mikito Ishii , Takehito Yagi , Miyuki Masaki , Atsushi Yoshinouchi , Koichiro Tanaka
发明人: Norihito Kawaguchi , Kenichiro Nishida , Mikito Ishii , Takehito Yagi , Miyuki Masaki , Atsushi Yoshinouchi , Koichiro Tanaka
IPC分类号: A61B18/20 , B23K26/06 , B23K26/073 , H01L21/268 , H01S3/00 , H01L21/00 , H01L21/20 , H01L21/26 , H01L21/331
CPC分类号: H01S3/005 , B23K26/0732
摘要: An object of the present invention is to provide a laser annealing method and apparatus capable of performing uniform beam emission. By means of the present invention, uniform beam application to a sample can be achieved because a linear cross-sectional configuration can be created in an optical system with a beam having a Gaussian distribution while areas of strong light intensity are avoided by rotating the beam from a laser light source at a prescribed angle by means of rotating means even when the beam pattern of the beam from the laser light source has a non-uniform intensity distribution.
摘要翻译: 本发明的一个目的是提供能够执行均匀的束发射的激光退火方法和装置。 通过本发明,可以实现对样品的均匀波束施加,因为可以在具有高斯分布的光束的光学系统中产生线性横截面配置,而通过将光束从 即使当来自激光光源的光束的光束图案具有不均匀的强度分布时,通过旋转装置以规定角度的激光光源。
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公开(公告)号:US06621636B2
公开(公告)日:2003-09-16
申请号:US10026340
申请日:2001-12-21
申请人: Koichiro Tanaka , Setsuo Nakajima , Takehito Yagi , Mikito Ishii , Kenichiro Nishida , Norihito Kawaguchi , Miyuki Masaki , Atsushi Yoshinouchi
发明人: Koichiro Tanaka , Setsuo Nakajima , Takehito Yagi , Mikito Ishii , Kenichiro Nishida , Norihito Kawaguchi , Miyuki Masaki , Atsushi Yoshinouchi
IPC分类号: G02B2710
CPC分类号: G02B27/108 , G02B27/145
摘要: A laser irradiation apparatus having a low running cost compared to the conventional, and a laser irradiation method using the laser irradiation apparatus, are provided. Crystal grains having a size in the same order as, or greater than, conventional grains are formed. The cooling speed of a semiconductor film is made slower, and it becomes possible to form crystal grains having a grain size in the same order as, or greater than, the size of grains formed in the case of irradiating laser light having a long output time to the semiconductor film. This is achieved by delaying one laser light with respect to another laser light, combining the laser lights, and performing irradiation to the semiconductor film in the case of irradiating laser light using a solid state laser as a light source, which has a short output time.
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公开(公告)号:US09988939B2
公开(公告)日:2018-06-05
申请号:US13821646
申请日:2011-09-12
申请人: Mikito Ishii
发明人: Mikito Ishii
CPC分类号: F01D25/24 , F01D9/045 , F01D25/125 , F02B37/24 , F05D2220/40 , F05D2230/642 , F05D2240/12 , F05D2260/38
摘要: A fixed vane-type turbocharger is provided with a fixed vane in a conduit between a bearing housing and a turbine housing. The fixed vane is configured by a movable member disposed on one of the mutually opposing front faces of the bearing housing and the turbine housing so as to be capable of forward and backward movement, and by vanes which are fixed to the front face of the movable member. A pressing member presses the movable member so that the distal ends of the vanes are brought into pressure contact between the rear face of the movable member and either the bearing housing or the turbine housing with the other opposing front face of these. The pressing member contacts the rear face of the movable member within a range in the radial direction where the vanes are disposed, and presses within this range.
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公开(公告)号:US20130170975A1
公开(公告)日:2013-07-04
申请号:US13821646
申请日:2011-09-12
申请人: Mikito Ishii
发明人: Mikito Ishii
IPC分类号: F01D25/24
CPC分类号: F01D25/24 , F01D9/045 , F01D25/125 , F02B37/24 , F05D2220/40 , F05D2230/642 , F05D2240/12 , F05D2260/38
摘要: The present invention relates to a fixed vane-type turbocharger provided with a fixed vane (15) in a conduit (9) between a bearing housing and a turbine housing (4). The fixed vane (15) is configured by a movable member (11) which is disposed on one of the mutually opposing front faces of the bearing housing and the turbine housing (4) so as to be capable of forward and backward movement, and by vanes (14) which are fixed to the front face of the movable member (11). A pressing means (16) is provided which presses the movable member (11) so that the distal ends of the vanes (14) are brought into pressure contact between the rear face of the movable member (11) and either the bearing housing or the turbine housing (4) with the other opposing front face of these. The pressing means (16) contacts the rear face of the movable means (11) within a range in the radial direction where the vanes (14) are disposed, and conducts pressing within this range.
摘要翻译: 固定叶片型涡轮增压器本发明涉及在轴承壳体和涡轮壳体(4)之间的导管(9)中设置有固定叶片(15)的固定叶片式涡轮增压器。 固定叶片(15)由可动构件(11)构成,该可动构件设置在轴承壳体和涡轮壳体(4)的相互相对的前表面中的一个上,以便能够向前和向后运动,并且由 固定在可动件(11)前表面上的叶片(14)。 提供了一种挤压装置(16),其按压可动构件(11),使得叶片(14)的远端在可动构件(11)的后表面与轴承壳体或 涡轮机壳体(4),其另一个相对的前表面。 按压装置(16)在设置有叶片(14)的径向的范围内与可移动装置(11)的后表面接触,并在该范围内进行按压。
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