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公开(公告)号：US20050214960A1
公开(公告)日：2005-09-29
申请号：US11102269
申请日：2005-04-07
申请人： Norio Sato , Katsuyuki Machida , Hakaru Kyuragi , Satoshi Shigematsu , Hiroki Morimura , Hiromu Ishii , Toshishige Shimamura
发明人： Norio Sato , Katsuyuki Machida , Hakaru Kyuragi , Satoshi Shigematsu , Hiroki Morimura , Hiromu Ishii , Toshishige Shimamura
CPC分类号： G06K9/0002 , Y10T29/49002 , Y10T29/49007 , Y10T29/49117 , Y10T29/4913
摘要： A method of manufacturing a surface shape recognition sensor. A sacrificial film is formed on an interlevel dielectric to cover a lower electrode while keeping an upper portion of a support electrode exposed. An upper electrode is formed on the sacrificial film and support electrode. The sacrificial film is selectively removed and a protective film is formed on the upper electrode. A photosensitive resin film having photosensitivity is formed on the protective film. A plurality of projections are formed in a region of the protective film above a capacitive detection element. In this manner a plurality of capacitive detection elements each having the lower electrode and upper electrode are formed.
摘要翻译： 一种制造表面形状识别传感器的方法。 牺牲膜形成在层间电介质上以覆盖下电极，同时保持支撑电极的上部暴露。 在牺牲膜和支撑电极上形成上电极。 选择性地除去牺牲膜，并在上电极上形成保护膜。 在保护膜上形成具有感光性的感光性树脂膜。 在电容式检测元件上方的保护膜的区域中形成有多个突起。 以这种方式形成多个具有下电极和上电极的电容检测元件。
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公开(公告)号：US06518083B2
公开(公告)日：2003-02-11
申请号：US10061045
申请日：2002-01-30
IPC分类号： H01L2100
CPC分类号： G06K9/0002
摘要： A surface shape recognition sensor includes a plurality of capacitive detection elements, a support electrode, and a protective film. The capacitive detection elements are formed from lower electrodes and a deformable plate-like upper electrode made of a metal. The lower electrodes are insulated and isolated from each other and stationarily laid out on a single plane of an interlevel dielectric formed on a semiconductor substrate. The upper electrode is laid out above the lower electrodes at a predetermined interval and has a plurality of opening portions. The support electrode is laid out around the lower electrodes while being insulated and isolated from the lower electrodes, and formed to be higher than the lower electrodes to support the upper electrode. The protective film is formed on the upper electrode to close the opening portions. The opening portions of the upper electrode are laid out in a region other than regions on a main part of the lower electrode and on the support electrode. A method of manufacturing the surface shape recognition sensor is also disclosed.
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公开(公告)号：US07360293B2
公开(公告)日：2008-04-22
申请号：US11102269
申请日：2005-04-07
申请人： Norio Sato , Katsuyuki Machida , Hakaru Kyuragi , Satoshi Shigematsu , Hiroki Morimura , Hiromu Ishii , Toshishige Shimamura
发明人： Norio Sato , Katsuyuki Machida , Hakaru Kyuragi , Satoshi Shigematsu , Hiroki Morimura , Hiromu Ishii , Toshishige Shimamura
IPC分类号： G01R3/00
CPC分类号： G06K9/0002 , Y10T29/49002 , Y10T29/49007 , Y10T29/49117 , Y10T29/4913
摘要： A method of manufacturing a surface shape recognition sensor. A sacrificial film is formed on an interlevel dielectric to cover a lower electrode while keeping an upper portion of a support electrode exposed. An upper electrode is formed on the sacrificial film and support electrode. The sacrificial film is selectively removed and a protective film is formed on the upper electrode. A photosensitive resin film having photosensitivity is formed on the protective film. A plurality of projections are formed in a region of the protective film above a capacitive detection element. In this manner a plurality of capacitive detection elements each having the lower electrode and upper electrode are formed.
摘要翻译： 一种制造表面形状识别传感器的方法。 牺牲膜形成在层间电介质上以覆盖下电极，同时保持支撑电极的上部暴露。 在牺牲膜和支撑电极上形成上电极。 选择性地除去牺牲膜，并在上电极上形成保护膜。 在保护膜上形成具有感光性的感光性树脂膜。 在电容检测元件上方的保护膜的区域中形成有多个突起。 以这种方式形成多个具有下电极和上电极的电容检测元件。
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公开(公告)号：US07123026B2
公开(公告)日：2006-10-17
申请号：US10052640
申请日：2002-01-18
申请人： Norio Sato , Katsuyuki Machida , Hakaru Kyuragi , Satoshi Shigematsu , Hiroki Morimura , Hiromu Ishii , Toshishige Shimamura
发明人： Norio Sato , Katsuyuki Machida , Hakaru Kyuragi , Satoshi Shigematsu , Hiroki Morimura , Hiromu Ishii , Toshishige Shimamura
CPC分类号： G06K9/0002 , Y10T29/49002 , Y10T29/49007 , Y10T29/49117 , Y10T29/4913
摘要： A surface shape recognition sensor includes capacitive detection elements, support electrode, protective film, and projections. The detection elements are formed from lower electrodes and a deformable plate-like upper electrode made of a metal. The lower electrodes are insulated and isolated from each other and stationarily laid out on a single plane of an interlevel dielectric formed on a semiconductor substrate. The upper electrode is laid out above the lower electrodes at a predetermined interval and has opening portions. The support electrode is laid out around the lower electrodes while being insulated and isolated from the lower electrodes, and formed to be higher than the lower electrodes to support the upper electrode. The protective film is formed on the upper electrode to close the opening portions. The projections per one pixel are laid out in a region of the protective film above the capacitive detection element.
摘要翻译： 表面形状识别传感器包括电容性检测元件，支撑电极，保护膜和突起。 检测元件由下电极和由金属制成的可变形的板状上电极形成。 下电极彼此绝缘并隔离并且固定地布置在形成在半导体衬底上的层间电介质的单个平面上。 上电极以预定间隔布置在下电极上方并具有开口部分。 支撑电极围绕下电极布置，同时与下电极绝缘和隔离，并且形成为高于下电极以支撑上电极。 保护膜形成在上电极上以封闭开口部分。 每个像素的突起布置在电容检测元件上方的保护膜的区域中。
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公开(公告)号：US06727561B2
公开(公告)日：2004-04-27
申请号：US10299523
申请日：2002-11-19
IPC分类号： H01L2982
CPC分类号： G06K9/0002
摘要： A surface shape recognition sensor includes a plurality of capacitive detection elements, a support electrode, and a protective film. The capacitive detection elements are formed from lower electrodes and a deformable plate-like upper electrode made of a metal. The lower electrodes are insulated and isolated from each other and stationarily laid out on a single plane of an interlevel dielectric formed on a semiconductor substrate. The upper electrode is laid out above the lower electrodes at a predetermined interval and has a plurality of opening portions. The support electrode is laid out around the lower electrodes while being insulated and isolated from the lower electrodes, and formed to be higher than the lower electrodes to support the upper electrode. The protective film is formed on the upper electrode to close the opening portions. The opening portions of the upper electrode are laid out in a region other than regions on a main part of the lower electrode and on the support electrode. A method of manufacturing the surface shape recognition sensor is also disclosed.
摘要翻译： 表面形状识别传感器包括多个电容检测元件，支撑电极和保护膜。 电容检测元件由下电极和由金属制成的可变形的板状上电极形成。 下电极彼此绝缘并隔离并且固定地布置在形成在半导体衬底上的层间电介质的单个平面上。 上电极以预定间隔布置在下电极上方，并具有多个开口部分。 支撑电极围绕下电极布置，同时与下电极绝缘和隔离，并且形成为高于下电极以支撑上电极。 保护膜形成在上电极上以封闭开口部分。 上电极的开口部分布置在下电极的主要部分和支撑电极上的区域之外的区域中。 还公开了一种制造表面形状识别传感器的方法。
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公开(公告)号：US07062075B2
公开(公告)日：2006-06-13
申请号：US10140742
申请日：2002-05-07
申请人： Hiroki Morimura , Toshishige Shimamura , Satoshi Shigematsu , Katsuyuki Machida , Hakaru Kyuragi
发明人： Hiroki Morimura , Toshishige Shimamura , Satoshi Shigematsu , Katsuyuki Machida , Hakaru Kyuragi
IPC分类号： G06K9/00
CPC分类号： G06K9/0002
摘要： A calibration mode signal line to which sensor cells are commonly connected is arranged. In a calibration mode, a calibration mode signal is supplied to the sensor cells through the calibration mode signal line to designate calibration. In each sensor cell, when the calibration mode signal is being supplied from the calibration mode signal line, and the sensor cell is selected by the decoder, calibration operation of adjusting the detection sensitivity of a sensor circuit is executed using a calibration circuit.
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公开(公告)号：US06714666B1
公开(公告)日：2004-03-30
申请号：US09590879
申请日：2000-06-09
IPC分类号： G06K900
CPC分类号： G06K9/0002
摘要： A surface shape recognition apparatus includes a plurality of sensor electrodes, passivation film, capacitance detection circuit, and ground electrode. The sensor electrodes are formed on an interlevel insulator on a substrate and insulated from each other. The passivation film is formed on the interlevel insulator to cover the upper and side surfaces of each sensor electrode. The passivation film is formed from a dielectric material. When a target recognition object comes into contact with the surface of the passivation film, the capacitance detection circuit detects an electrostatic capacitance formed between the sensor electrode and the surface of the target recognition object opposing the sensor electrode. The ground electrode passes static electricity on the surface of the passivation film.
摘要翻译： 表面形状识别装置包括多个传感器电极，钝化膜，电容检测电路和接地电极。 传感器电极形成在基板上的层间绝缘体上并彼此绝缘。 钝化膜形成在层间绝缘体上以覆盖每个传感器电极的上表面和侧表面。 钝化膜由电介质材料形成。 当目标识别对象与钝化膜的表面接触时，电容检测电路检测在传感器电极与与传感器电极相对的目标识别对象的表面之间形成的静电电容。 接地电极在钝化膜的表面上传递静电。
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公开(公告)号：US06917694B1
公开(公告)日：2005-07-12
申请号：US09573615
申请日：2000-05-17
CPC分类号： G06K9/00006 , A61B5/1172
摘要： A surface shape recognition apparatus includes detection circuit, comparison circuit, storage circuit, and control circuit. The detection circuit electrically detects a surface shape pattern in a partial region of the target collation surface of an object using a plurality of sensor elements and outputs detection data representing the surface shape pattern. The comparison circuit compares the detection data from the detection circuit with predetermined collation data and outputs a comparison result. The storage circuit stores template data representing the surface shape pattern of the entire target collation surface, the template data being obtained from the object in advance. The control circuit partially reads out, as collation data, the template data stored in the storage circuit from an arbitrary position, outputs the collation data to the comparison circuit, and performs determination for authentication between the template data and the object on the basis of the comparison result from the comparison circuit. A surface shape recognition method is also disclosed.
摘要翻译： 表面形状识别装置包括检测电路，比较电路，存储电路和控制电路。 检测电路使用多个传感器元件电检测物体的目标核对表面的部分区域中的表面形状图案，并输出表示形状图案的检测数据。 比较电路将来自检测电路的检测数据与预定核对数据进行比较，并输出比较结果。 存储电路存储表示整个目标对照表面的表面形状图案的模板数据，模板数据是从对象预先获得的。 控制电路作为核对数据部分地从任意位置读出存储在存储电路中的模板数据，将对照数据输出到比较电路，并基于该模板数据进行对模板数据与对象之间的认证的确定 比较电路的比较结果。 还公开了一种表面形状识别方法。
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公开(公告)号：US06556935B2
公开(公告)日：2003-04-29
申请号：US09877829
申请日：2001-06-08
申请人： Hiroki Morimura , Satoshi Shigematsu , Katsuyuki Machida , Hakaru Kyuragi , Toshishige Shimamura
发明人： Hiroki Morimura , Satoshi Shigematsu , Katsuyuki Machida , Hakaru Kyuragi , Toshishige Shimamura
IPC分类号： G01F2500
CPC分类号： G06K9/0002
摘要： A small shape recognizing capacitive sensor device includes detection elements, sensor circuits, and a correction circuit. The detection elements are arranged adjacent to each other. The sensor circuits are connected to the detection elements, respectively. The correction circuit corrects the output signal level of the sensor circuit. The output signal level correction circuit includes a calibration circuit, calibration reference signal generation circuit, and comparison circuit. The calibration circuit is connected to the output side of the sensor circuit. The calibration reference signal generation circuit generates a calibration reference signal. The comparison circuit compares the output from the sensor circuit with the calibration reference signal and supplies the difference output to the calibration circuit as a control signal. The calibration circuit corrects the level of the sensor circuit output on the basis of the control signal such that the difference between the output from the sensor circuit and the calibration reference signal becomes zero.
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公开(公告)号：US07205621B2
公开(公告)日：2007-04-17
申请号：US10512757
申请日：2004-02-13
CPC分类号： G06K9/0002 , Y10S438/942
摘要： A structure (113b) which includes an overhang and a support portion supporting substantially the center of the overhang, and in which the area of the support portion is smaller than the area of the overhang in the two-dimensional direction of an upper electrode (110b) is formed on the upper electrode (110a) in a region above each lower electrode 105a in one-to-one correspondence with the lower electrode (105a). An object of surface shape sensing, e.g., the tip of a finger (1602) touches the surface of the overhang of the structure (113b), and the support portion of the structure (113b) whose overhang is in contact with the object of sensing pushes down a portion of the upper electrode (110a) toward the lower electrode (105a), thereby deforming the upper electrode (110a).
摘要翻译： 1.一种结构（113b），其包括突出端和支撑部分，所述支撑部分基本上支撑所述突出部的中心，并且所述支撑部分的面积小于所述上部电极的二维方向上的所述突出部分的面积（ 110b）在每个下电极105a的上方的区域中形成在上电极（110a）上，与下电极（105a）一一对应地形成。 表面形状检测的目的，例如手指的尖端（1602）接触结构（113b）的突出部分的表面，并且结构（113b）的支撑部分（113b）的突出部与物体接触 的感测将上部电极（110a）的一部分朝向下部电极（105a）下压，从而使上部电极（110a）变形。
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