公开(公告)号：US06893532B1

公开(公告)日：2005-05-17

申请号：US10019245

申请日：1999-06-29

申请人： Noriyoshi Sato ,  Satoru Iizuka ,  Giichiro Uchida

发明人： Noriyoshi Sato ,  Satoru Iizuka ,  Giichiro Uchida

IPC分类号： H01J37/32 ,  H01L21/3065

CPC分类号： H01J37/32431 ,  H01J2237/022

摘要： An apparatus for processing particulate dust when a substrate is arranged in a high vacuum enclosure, plasma is generated in the high vacuum enclosure, and a reactive material is introduced into the high vacuum enclosure to perform processing of the substrate. At least one collecting electrode is provided around the substrate in the high vacuum enclosure other than the electrode that generates plasma, and particulates generated in plasma are efficiently removed by applying a predetermined electric potential of a direct-current or an alternating current to the collecting electrode, and thus a deposition problem onto an inner wall of the vacuum enclosure and a deterioration problem of processing accuracy and a film quality associated with flowing of the particulates onto the substrate are solved.

摘要翻译： 当将基板布置在高真空外壳中时处理颗粒状灰尘的装置，在高真空外壳中产生等离子体，并且将反应性材料引入高真空外壳中以执行基板的处理。 在除了产生等离子体的电极之外的高真空封壳中的基板周围设置至少一个集电极，并且通过向集电极施加直流电流或交流电的预定电位来有效地除去在等离子体中产生的微粒 ，因此解决了真空外壳的内壁上的沉积问题，以及与微粒流入基板相关的加工精度和膜质量的劣化问题。

公开(公告)号：US06835279B2

公开(公告)日：2004-12-28

申请号：US09123352

申请日：1998-07-28

申请人： Yunlong Li ,  Noriyoshi Sato ,  Satoru Iizuka

发明人： Yunlong Li ,  Noriyoshi Sato ,  Satoru Iizuka

IPC分类号： H05H100

CPC分类号： H01J37/32623 ,  H01J37/3266 ,  H05H1/46

摘要： The object of the present invention is to make possible generation of high-density plasma even in the center of a plasma generation region. A plasma generation apparatus comprises a vacuum vessel 11, gas induction unit 12, exhaust unit 13, cylindrical discharge electrode 14, high-frequency oscillators 19 and 21, ring-shaped permanent magnets 15 and 16, and two disk-shaped walls 17 and 18. The discharge electrode 14 is fashioned so as to enclose a plasma generation region 41. The permanent magnets 15 and 16 form prescribed magnetic force lines. These magnetic force lines have portions that are roughly parallel to the center axis 42 of the discharge electrode 14, the lengths of which parallel portions become longer as the magnetic force lines approach the center axis 42. The two walls 17 and 18 define the scope of the plasma generation region 41 in the dimension of the center axis 42 of the discharge electrode 14. These two walls 17 and 18 are positioned so as to sandwich therebetween the plasma generation region 41 in the dimension of the center axis 42. The plasma generation apparatus is also configured so that the magnetic force lines 43 passing through the center of the plasma generation 41 are shaped so that they do not intersect the two walls 17 and 18.

摘要翻译： 本发明的目的是即使在等离子体产生区域的中心也可能产生高密度等离子体。 等离子体产生装置包括真空容器11，气体感应单元12，排气单元13，圆柱形放电电极14，高频振荡器19和21，环形永磁体15和16以及两个盘形壁17和18 放电电极14被形成为包围等离子体产生区域41.永久磁铁15和16形成规定的磁力线。 这些磁力线具有大致平行于放电电极14的中心轴线42的部分，随着磁力线接近中心轴线42，其平行部分变长的长度。两个壁17和18限定了 等离子体产生区域41，其尺寸为放电电极14的中心轴线42的尺寸。这两个壁17和18被定位成在等离子体产生区域41之间夹着中心轴线42的尺寸。等离子体产生装置 通过等离子体产生部41的中心的磁力线43也被配置成使得它们不与两个壁17和18相交。

公开(公告)号：US06376796B2

公开(公告)日：2002-04-23

申请号：US09738989

申请日：2000-12-19

申请人： Noriyoshi Sato ,  Satoru Iizuka ,  Tsukasa Yoneyama ,  Hiroyasu Sato ,  Unryu Ogawa ,  Yoshio Tominaga ,  Yoichiro Numazawa ,  Yukito Nakagawa

发明人： Noriyoshi Sato ,  Satoru Iizuka ,  Tsukasa Yoneyama ,  Hiroyasu Sato ,  Unryu Ogawa ,  Yoshio Tominaga ,  Yoichiro Numazawa ,  Yukito Nakagawa

IPC分类号： B23K902

CPC分类号： H01J37/32192 ,  H05B7/00

摘要： A plasma processing system provided with a vacuum chamber for accommodating a substrate and for generation of plasma in a space in the front of the same, an antenna provided at the vacuum chamber, and a high frequency power source for supplying high frequency power to the antenna. The antenna emits high frequency power, generates plasma inside the vacuum chamber, and processes the surface of the substrate by the plasma. In the plasma processing system, the antenna has a disk-shaped conductor plate having a predetermined thickness. A coaxial waveguide having a folded portion is formed around the disk-shaped conductor plate. The folded portion of the waveguide is provided with a short-circuit 3 dB directional coupler having an impedance matching function. The antenna having the above structure prevents the generation of a standing wave in the high frequency wave propagation path from the high frequency power source to the vacuum chamber and generates high density plasma by supply of a large power. Due to this, processing of a large area substrate becomes possible.

摘要翻译： 一种等离子体处理系统，其具有用于容纳基板的真空室和用于在其前部的空间中产生等离子体，设置在真空室处的天线以及用于向天线提供高频功率的高频电源 。 天线发射高频功率，在真空室内产生等离子体，并通过等离子体处理衬底的表面。 在等离子体处理系统中，天线具有预定厚度的盘状导体板。 在盘形导体板周围形成具有折叠部分的同轴波导。 波导的折叠部分设置有具有阻抗匹配功能的短路3dB定向耦合器。 具有上述结构的天线防止在从高频电源到真空室的高频波传播路径中产生驻波，并通过大功率的供给产生高密度等离子体。 由此，能够对大面积基板进行加工。

公开(公告)号：US06380684B1

公开(公告)日：2002-04-30

申请号：US09573253

申请日：2000-05-18

申请人： Yunlong Li ,  Masanobu Sato ,  Yoshio Tominaga ,  Noriyoshi Sato ,  Satoru Iizuka

发明人： Yunlong Li ,  Masanobu Sato ,  Yoshio Tominaga ,  Noriyoshi Sato ,  Satoru Iizuka

IPC分类号： H05H146

CPC分类号： H01J37/32082 ,  H01J37/3266

摘要： A plasma generating apparatus and processing method, which generate high-density plasma, even in the central portion of the plasma generating zone. The apparatus comprises rectangular electrodes, a rectangular fistulous discharge electrode which surrounds the plasma generating zone, and a vacuum chamber of rectangular cross-section. Permanent magnets surround the discharge electrode, produce predetermined magnetic lines of force with portions which extend approximately parallel to the central axis of discharge electrode. A pair of parallel plate electrodes define the extension of the plasma generating zone in the direction of the central axis of the discharge electrode. The apparatus is configured such that the magnetic lines of force passing through the central portion of the plasma generating zone do not intersect with the electrodes.

摘要翻译： 即使在等离子体产生区域的中心部分也产生高密度等离子体的等离子体发生装置和处理方法。 该装置包括矩形电极，围绕等离子体生成区域的矩形排出电极和矩形横截面的真空室。 永磁体围绕放电电极，产生预定的磁力线，其部分大致平行于放电电极的中心轴延伸。 一对平行板电极限定等离子体生成区在放电电极的中心轴线方向上的延伸。 该装置被配置成使得通过等离子体产生区的中心部分的磁力线不与电极相交。

公开(公告)号：US06238512B1

公开(公告)日：2001-05-29

申请号：US09234488

申请日：1999-01-21

申请人： Yunlong Li ,  Noriyoshi Sato ,  Satoru Iizuka

发明人： Yunlong Li ,  Noriyoshi Sato ,  Satoru Iizuka

IPC分类号： C23F102

CPC分类号： H01J37/321 ,  H01J37/32357 ,  H01L21/67069

摘要： An object is to make it possible to prevent electron temperature distribution from becoming uneven at surface of a process object when dimensions of the process object are large. A region division unit 30 encloses the inside of a ring-shaped discharge electrode 15 in the vicinity of that discharge electrode 15, thereby dividing the interior region of a tube-shaped vacuum vessel 11 in a direction perpendicular to the center axis Z thereof into a plasma generation region R1 and a plasma diffusion region R2, This region division unit 30 has a tube-shaped grid 301. This grid 301 has a plurality of electron passing holes and exhibits electrical conductivity. This grid 301, furthermore, is set in place concentrically with the vacuum vessel 11 so as to be positioned on the outside of a substrate W.

摘要翻译： 其目的在于，能够防止在加工对象的尺寸较大时电极温度分布变得不均匀的区域。区域分割单元30将环状放电电极15的内部包围在 该放电电极15将管状真空容器11的内部区域沿垂直于其中心轴线Z的方向分成等离子体产生区域R1和等离子体扩散区域R2。该区域分割单元30具有管状真空容器11， 该栅格301具有多个电子通过孔并且具有导电性。 此外，该格栅301与真空容器11同心地设置在位，以便被定位在基板W的外侧。

公开(公告)号：US20060067914A1

公开(公告)日：2006-03-30

申请号：US11114904

申请日：2005-04-26

申请人： Satoru Iizuka ,  Toshiyuki Takai ,  Yumi Ito ,  Kozue Ito ,  Masuo Obinata

发明人： Satoru Iizuka ,  Toshiyuki Takai ,  Yumi Ito ,  Kozue Ito ,  Masuo Obinata

IPC分类号： A61K35/14 ,  C12N5/06 ,  C12N5/08

CPC分类号： A01K67/0275 ,  A01K2217/05 ,  A61K2039/5152 ,  C12N5/0646 ,  C12N2510/04 ,  C12N2517/02 ,  G01N33/505

摘要： The present invention provides an immortalized natural killer cell line retaining the function and characteristics intrinsic to natural killer cells, a method for establishing the same, a method for screening for useful substances using the immortalized natural killer cell line, and a cell vaccine. By culturing natural killer cells obtained by isolating natural killer cells from the spleen of a transgenic mouse to which a large T-antigen gene of SV40 temperature-sensitive mutant tsA58 is introduced, a cell line which proliferates and activates in the presence of Interleukin-2, has azurophilic granules within cytoplasm, and retains an ability to kill a target cell without presensitization and/or an ability to kill target cells coated with an antibody, is established.

摘要翻译： 本发明提供了保留天然杀伤细胞固有的功能和特征的永生化天然杀伤细胞系，其建立方法，使用永生化天然杀伤细胞系筛选有用物质的方法和细胞疫苗。 通过培养通过从引入SV40温敏突变体tsA58的大T抗原基因的转基因小鼠的脾分离天然杀伤细胞而获得的天然杀伤细胞，在白细胞介素-2存在下增殖和活化的细胞系 在细胞质内具有氮杂的颗粒，并且保留了在没有预敏化的情况下杀死靶细胞的能力和/或杀死被抗体包被的靶细胞的能力。