公开(公告)号：US20180348728A1

公开(公告)日：2018-12-06

申请号：US15986103

申请日：2018-05-22

Applicant: OMRON Corporation

Inventor： Yuya OTA ,  Kosuke TSURUTA ,  Shinsuke KAWANOUE ,  Gaku SHIRAMIZU ,  Yasuaki ABE ,  Akira NAKAJIMA ,  Reiko HATTORI ,  Toshifumi MINEMOTO ,  Yuki HIROHASHI

IPC: G05B19/05 ,  G05B19/418 ,  G06F17/15 ,  G06F17/18

CPC classification number: G05B23/0275 ,  G05B19/41885 ,  G05B2219/31472

Abstract: A process analysis apparatus according to an aspect may include a first acquisition unit that acquires a plurality of pieces of state data related to states of a plurality of mechanisms that constitute a manufacturing line, a second acquisition unit that acquires a control program for controlling an operation of the manufacturing line, a first analyzer that analyzes the acquired plurality of pieces of state data so as to identify a connection state between the plurality of mechanisms, a second analyzer that analyzes the acquired control program so as to identify an order relationship between the plurality of mechanisms, and a relationship identifying unit that identifies a causal relationship between the plurality of mechanisms in a process that is carried out on the manufacturing line, based on the identified connection state and order relationship.

公开(公告)号：US20210200177A1

公开(公告)日：2021-07-01

申请号：US17269259

申请日：2020-02-18

Applicant: OMRON Corporation

Inventor： Yuya OTA ,  Reiko HATTORI ,  Kosuke TSURUTA

IPC: G05B19/05 ,  G05B19/418

Abstract: A technology for associating and ascertaining the location of device variables which are in a control program and correspond to devices, and the dependency relations between the device variables, when division programming is carried out, is provided. A graph display device according to one aspect of the present invention generates a first directed graph, which comprises a plurality of first nodes respectively representing the device variables, and edges representing the existence of a dependency relation, and a second directed graph, which comprises a plurality of regions corresponding respectively to each subprogram, a plurality of first nodes, and edges, wherein the first nodes are arranged in a region of a subprogram that uses the device variable to be expressed from among the plurality of regions. In response to an instruction from a user the display device switches between displaying the generated first directed graph and displaying the generated second directed graph.

公开(公告)号：US20190181025A1

公开(公告)日：2019-06-13

申请号：US16133140

申请日：2018-09-17

Applicant: OMRON Corporation

Inventor： Yuya OTA ,  Toru FUJII ,  Shin EGAMI ,  Kosuke TSURUTA ,  Hiroki KOYAMA

IPC: H01L21/67 ,  G06N99/00 ,  G06N3/08 ,  H01L21/306

Abstract: A monitoring system according to an aspect may construct a predictive model that predicts a value of a removal amount depending on values of an accumulated operating time and an accumulated number of processed wafers, based on learning data; acquires actual values of the accumulated operating time, the accumulated number of processed wafers, and the removal amount with respect to a wet etching apparatus when it is in operation; calculates a predicted value of the removal amount by inputting the acquired actual values of the accumulated operating time and the accumulated number of processed wafers to the predictive model; calculates the difference between the predicted value and the actual value of the removal amount, as an indicator value serving as a measure of how necessary it is to replace a chemical solution; and outputs information regarding replacement of the chemical solution based on the calculated indicator value.

公开(公告)号：US20210325840A1

公开(公告)日：2021-10-21

申请号：US17269996

申请日：2020-02-20

Applicant: OMRON Corporation

Inventor： Yuya OTA ,  Reiko HATTORI ,  Kosuke TSURUTA

IPC: G05B19/05

Abstract: A graph display device according to one aspect of the present invention generates a first directed graph, which contains a plurality of first nodes respectively representing device variables, edges representing the existence of a dependency relation, and a block representing a function, and a second directed graph, which contains a plurality of first nodes, edges, a block, and a plurality of second nodes arranged in the block and respectively representing function parameters. In response to an instruction from a user the display device switches between displaying the generated first directed graph and displaying the generated second directed graph.

公开(公告)号：US20180203439A1

公开(公告)日：2018-07-19

申请号：US15845238

申请日：2017-12-18

Applicant: OMRON Corporation

Inventor： Reiko HATTORI ,  Kosuke TSURUTA ,  Kota MIYAMOTO ,  Yuya OTA ,  Hideki HIGASHIKAGE ,  Yuki HIROHASHI ,  Noriyuki OIKAWA

IPC: G05B19/418 ,  G05B23/02 ,  G06N3/02 ,  G06N5/04 ,  G06F17/18

CPC classification number: G05B19/41875 ,  G05B23/0221 ,  G05B23/0245 ,  G05B23/0254 ,  G05B23/0267 ,  G05B2219/32187 ,  G05B2219/32194 ,  G05B2219/32201 ,  G05B2219/32222 ,  G06F17/18 ,  G06N3/02 ,  G06N5/04 ,  Y02P90/02 ,  Y02P90/14 ,  Y02P90/22

Abstract: A prediction model creation apparatus includes a feature amount acquisition unit that acquires values of types of feature amounts that are calculated from operating state data indicating an operating state of a production facility that produces a product, for both a normal time at which the production facility produces the product normally and a defective time at which a defect occurs in the product that is produced, a feature amount selection unit that selects a feature amount effective in predicting the defect from among the acquired types of feature amounts, based on a predetermined algorithm that specifies a degree of association between the defect and the types of feature amounts, from the values of the types of feature amounts acquired at the normal time and the defective time, and a prediction model construction unit that constructs a prediction model for predicting occurrence of the defect, using the selected feature amount.

公开(公告)号：US20210397148A1

公开(公告)日：2021-12-23

申请号：US17270449

申请日：2020-02-20

Applicant: OMRON Corporation

Inventor： Yuya OTA ,  Reiko HATTORI ,  Kosuke TSURUTA ,  Akira NAKAJIMA ,  Shinsuke KAWANOUE

IPC: G05B19/042

Abstract: An analysis device according to one aspect of the present invention supplies a definition for a dependency relation between an input parameter and an output parameter of a standard function, which cannot be derived in a dependency analysis of a control program, the definition being supplied by use of function structure information which is external information. In other words, an analysis device according to this configuration identifies a dependency relation between an input parameter and an output parameter of the standard function on the basis of function structure information that defines a dependency relation between the input parameter and the output parameter of the standard function. Therefore, the dependency relation between the input and the output of a standard function becomes clear, so the dependency relations between a plurality of device variables that mediate the standard function can be identified.

公开(公告)号：US20210255597A1

公开(公告)日：2021-08-19

申请号：US17270451

申请日：2020-02-20

Applicant: OMRON Corporation

Inventor： Yuya OTA ,  Reiko HATTORI ,  Kosuke TSURUTA

IPC: G05B19/05

Abstract: A technology for associating and ascertaining dependency relations between device variables corresponding to respective devices with dependency relations of device variables for respective parameters of a function in a control program is provided. A graph display device according to one aspect of the present invention generates a first directed graph including a plurality of first nodes that respectively express device variables and edges that express having dependency relations, and a second directed graph including the plurality of first nodes, the edges, and a block that expresses the function, and switches and displays the generated first directed graph and second directed graph on a display device.

公开(公告)号：US20160019323A1

公开(公告)日：2016-01-21

申请号：US14773904

申请日：2013-08-16

Applicant: OMRON CORPORATION

Inventor： Kosuke TSURUTA ,  Takuya NAKAI

IPC: G06F17/50

CPC classification number: G06F17/5009 ,  H01L31/02021 ,  H02S50/00 ,  Y02E10/50

Abstract: A generated power estimation model to be used for estimating an expected generated power amount that is expected to be generated by a solar power generation module is constructed based on a daily correlative relationship between a generated power amount generated by a solar power generation module that generates power by receiving sunlight, and an energy amount of sunlight emitted to the solar power generation module. Furthermore, the expected generated power amount is estimated based on the generated power estimation model, and it is determined whether or not an abnormality has occurred by comparing the expected generated power amount and the generated power amount actually generated by the solar power generation module. This technique can be applied to a solar power generation system, for example.

Abstract translation: 基于由产生太阳能发电模块的太阳能发电模块产生的发电电力量之间的日常相关关系，构建用于估计由太阳能发电模块预期产生的预期发电量的发电功率估计模型 通过接收太阳光和发射到太阳能发电模块的太阳能的能量。 此外，基于所生成的功率估计模型来估计预期发电量，并且通过比较预期发电量和由太阳能发电模块实际产生的发电量来确定是否发生了异常。 例如，该技术可以应用于太阳能发电系统。