Method for supplying a process with an enriched carrier gas

    公开(公告)号:US09914997B2

    公开(公告)日:2018-03-13

    申请号:US14772679

    申请日:2014-03-28

    CPC classification number: C23C16/4482 B01D1/14 C23C16/18 C23C16/4481 C23C16/52

    Abstract: A method for supplying a process with an enriched carrier gas. A first apparatus and a second apparatus are provided. The first apparatus has a precursor and is configured to bring a carrier gas into contact with the precursor and to enrich the carrier gas with the precursor. The second apparatus has a precursor and is configured to bring a carrier gas into contact with the precursor and to enrich the carrier gas with the precursor. The first apparatus supplies the second apparatus with an enriched carrier gas. The second apparatus supplies the enriched carrier gas for the process. A temperature of the first apparatus is controlled as a function of a quantity of precursor in the second apparatus.

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