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    Method for making asymmetric double-gate transistors by which asymmetric and symmetric double-gate transistors can be made on the same substrate
    1.
    发明授权
    Method for making asymmetric double-gate transistors by which asymmetric and symmetric double-gate transistors can be made on the same substrate 有权
    制造不对称双栅极晶体管的方法，通过该方法可以在同一衬底上制造不对称和对称双栅极晶体管

    公开(公告)号：US08232168B2

    公开(公告)日：2012-07-31

    申请号：US12521311

    申请日：2007-12-28

    申请人： Maud Vinet ,  Olivier Thomas ,  Olivier Rozeau ,  Thierry Poiroux

    发明人： Maud Vinet ,  Olivier Thomas ,  Olivier Rozeau ,  Thierry Poiroux

    IPC分类号： H01L21/336

    CPC分类号： H01L27/1104 ,  G11C11/412 ,  H01L27/11 ,  H01L29/78645

    摘要： A method for fabricating a microelectronic device with one or plural double-gate transistors, including: a) forming one or plural structures on a substrate including at least a first block configured to form a first gate of a double-gate transistor, and at least a second block configured to form the second gate of said double-gate, the first block and the second block being located on opposite sides of at least one semiconducting zone and separated from the semiconducting zone by a first gate dielectric zone and a second gate dielectric zone respectively, and b) doping at least one or plural semiconducting zones in the second block of at least one given structure among the structures, using at least one implantation selective relative to the first block, the second block being covered by a hard mask, a critical dimension of the hard mask being larger than the critical dimension of the second block.

    摘要翻译： 一种用于制造具有一个或多个双栅极晶体管的微电子器件的方法，包括：a）在至少包括构成为形成双栅极晶体管的第一栅极的第一块的至少一个衬底上形成一个或多个结构，并且至少 第二块，其被配置为形成所述双栅极的第二栅极，所述第一块和所述第二块位于至少一个半导体区的相对侧上，并且通过第一栅极介电区和第二栅极电介质与所述半导体区分离 并且b）使用相对于第一块选择性的至少一种植入，在所述结构中掺杂至少一个给定结构的第二块中的至少一个或多个半导体区域，所述第二块被硬掩模覆盖， 硬掩模的临界尺寸大于第二块的临界尺寸。

    Suspended-gate MOS transistor with non-volatile operation
    2.
    发明授权
    Suspended-gate MOS transistor with non-volatile operation 有权
    具有非易失性操作的悬挂栅极MOS晶体管

    公开(公告)号：US07812410B2

    公开(公告)日：2010-10-12

    申请号：US12168417

    申请日：2008-07-07

    申请人： Michael Collonge ,  Maud Vinet ,  Olivier Thomas

    发明人： Michael Collonge ,  Maud Vinet ,  Olivier Thomas

    IPC分类号： H01L27/20 ,  H01L41/04 ,  H01L41/083

    CPC分类号： G11C23/00 ,  B82Y10/00 ,  G11C2213/17 ,  H01L29/515 ,  H01L29/78654

    摘要： A microelectronic device, including at least one transistor including: on a substrate, a semiconductor zone with a channel zone covered with a gate dielectric zone, a mobile gate, suspended above the gate dielectric zone and separated from the gate dielectric zone by an empty space, which the gate is located at an adjustable distance from the gate dielectric zone, and a piezoelectric actuation device including a stack formed by at least one layer of piezoelectric material resting on a first biasing electrode, and a second biasing electrode resting on the piezoelectric material layer, wherein the gate is attached to the first biasing electrode and is in contact with the first biasing electrode, and the piezoelectric actuation device is configured to move the gate with respect to the channel zone.

    摘要翻译： 一种微电子器件，包括至少一个晶体管，其包括：在衬底上，具有覆盖有栅极介电区的沟道区的半导体区，悬浮在栅极介电区上方的移动栅极，并与栅极介电区隔开空位 栅极位于与栅极介电区域可调节的距离处，以及压电致动装置，其包括由至少一层静电在第一偏置电极上的压电材料形成的叠层，以及沉积在压电材料上的第二偏置电极 层，其中所述栅极附接到所述第一偏置电极并且与所述第一偏置电极接触，并且所述压电致动装置被配置为相对于所述沟道区移动所述栅极。

    Memory cell provided with dual-gate transistors, with independent asymmetric gates
    3.
    发明申请
    Memory cell provided with dual-gate transistors, with independent asymmetric gates 有权
    具有双栅极晶体管的存储单元，具有独立的非对称栅极

    公开(公告)号：US20080175039A1

    公开(公告)日：2008-07-24

    申请号：US12005666

    申请日：2007-12-26

    申请人： Olivier Thomas ,  Maud Vinet

    发明人： Olivier Thomas ,  Maud Vinet

    IPC分类号： G11C11/00

    CPC分类号： G11C11/412 ,  H01L27/11 ,  H01L27/1104 ,  H01L29/785

    摘要： The invention concerns a random access memory cell comprising: at least one first plurality of symmetrical dual-gate transistors (TL1T, TL1F, TD1T, TD1F, TL2T, TL2F) forming a flip-flop, at least a first asymmetric dual-gate access transistor (TA1T, TAW1T) and at least a second asymmetric dual-gate access transistor (TA1F, TAW1F) disposed respectively between a first bit line (BLT, WBLT) and a first storage node (T), and between a second bit line (BLF, WBLF) and a second storage node (F), a first gate of the first access transistor (TA1T, TAW1T) and a first gate of the second access transistor (TA1F, TAW1F) being connected to a first word line (WL, WWL) able to route a biasing signal, a second gate (TA1F, TAW1F) of the first access transistor connected to the second storage node (F) and a second gate of the second access transistor connected to the first storage node (T).

    摘要翻译： 本发明涉及一种随机存取存储器单元，包括：至少一个第一多个对称双栅极晶体管（TL 1，T 1，T 1，T 1 T 形成触发器的至少第一不对称双重元件，第一非对称双重元件，第二非对称双重元件 至少一个第二非对称双栅极存取晶体管（TA 1，...，T 1） 分别设置在第一位线（BL ，WBL＆gt; T＆gt;）和第一存储节点（T）之间，以及 第一存取晶体管的第一栅极（TA1 T < / SUB>，TAW 1 T）和第二存取晶体管（TA 1 F 1，TAW 1 F 1）的第一栅极连接到 能够路由偏置信号的第一字线（WL，WWL），第一存取转发器的第二门（TA 1，F 1，TAW 1＆lt; F 1） 存储器连接到第二存储节点（F）和连接到第一存储节点（T）的第二存取晶体管的第二栅极。

    Method for fabricating asymmetric double-gate transistors by which asymmetric and symmetric double-gate transistors can be made on the same substrate
    4.
    发明授权
    Method for fabricating asymmetric double-gate transistors by which asymmetric and symmetric double-gate transistors can be made on the same substrate 有权
    用于制造不对称双栅极晶体管的方法，通过该方法可以在同一衬底上制造不对称和对称双栅极晶体管

    公开(公告)号：US08105906B2

    公开(公告)日：2012-01-31

    申请号：US12521377

    申请日：2007-12-28

    申请人： Maud Vinet ,  Olivier Thomas ,  Olivier Rozeau ,  Thierry Poiroux

    发明人： Maud Vinet ,  Olivier Thomas ,  Olivier Rozeau ,  Thierry Poiroux

    IPC分类号： H01L21/336

    CPC分类号： H01L27/1104 ,  G11C11/412 ,  H01L27/11 ,  H01L29/78645

    摘要： A method for fabricating a microelectronic device with one or plural asymmetric double-gate transistors, including: a) forming one or plural structures on a substrate including at least a first semiconducting block configured to form a first gate of a double-gate transistor, and at least a second semiconducting block configured to form a second gate of the double-gate transistor, the first block and the second block being located on opposite sides of at least one semiconducting zone and separated from the semiconducting zone by a first gate dielectric zone and a second gate dielectric zone respectively, and b) doping at least one or plural semiconducting zones in the second block of at least one given structure among the structures, using at least one implantation selective relative to the first block.

    摘要翻译： 一种用于制造具有一个或多个非对称双栅极晶体管的微电子器件的方法，包括：a）在至少包括形成双栅晶体管的第一栅极的第一半导体块的衬底上形成一个或多个结构，以及 至少第二半导体块，其被配置为形成所述双栅极晶体管的第二栅极，所述第一块和所述第二块位于至少一个半导体区的相对侧上，并且通过第一栅极介电区与所述半导体区分离;以及 分别为第二栅极介电区，以及b）使用相对于第一块选择性的至少一种注入，在结构中的至少一个给定结构的第二块中至少掺杂一个或多个半导体区域。

    SRAM memory cell having transistors integrated at several levels and the threshold voltage VT of which is dynamically adjustable
    5.
    发明授权
    SRAM memory cell having transistors integrated at several levels and the threshold voltage VT of which is dynamically adjustable 有权
    SRAM存储单元具有以多个级别集成的晶体管，其阈值电压VT可动态调整

    公开(公告)号：US08013399B2

    公开(公告)日：2011-09-06

    申请号：US12466733

    申请日：2009-05-15

    申请人： Olivier Thomas ,  Perrine Batude ,  Arnaud Pouydebasque ,  Maud Vinet

    发明人： Olivier Thomas ,  Perrine Batude ,  Arnaud Pouydebasque ,  Maud Vinet

    IPC分类号： H01L27/088

    CPC分类号： H01L27/1104 ,  H01L27/0688 ,  H01L27/11 ,  H01L27/1108 ,  H01L27/1203

    摘要： A static random access memory cell which, on a substrate surmounted by a stack of layers, including: a first plurality of transistors situated at a given level of the stack of which at least one first access transistor and at least one second access transistor are connected to a word line and are arranged between a first bit line and a first storage node and a second bit line and a second storage node, respectively; and a second plurality of transistors forming a flip-flop and situated at least one other level of the stack, beneath said given level, wherein the transistors of the second plurality of transistors each comprising a gate electrode situated opposite a channel region of a transistor of the first plurality of transistors and separated from this channel region by an insulating region provided to enable coupling of said gate electrode and said channel region.

    摘要翻译： 一种静态随机存取存储单元，其在由层叠层所覆盖的衬底上，包括：第一多个晶体管，位于堆叠的给定电平，其中至少一个第一存取晶体管和至少一个第二存取晶体管连接 分别布置在第一位线和第一存储节点以及第二位线和第二存储节点之间; 以及第二多个晶体管，其形成触发器并且位于所述给定电平以下的所述堆叠的至少另一个电平，其中所述第二多个晶体管的晶体管每个包括位于与所述晶体管的晶体管的沟道区相对的栅电极 所述第一多个晶体管并且由所述沟道区域与被设置成能够耦合所述栅极电极和所述沟道区域的绝缘区域分离。

    METHOD FOR MAKING ASYMMETRIC DOUBLE-GATE TRANSISTORS BY WHICH ASYMMETRIC AND SYMMETRIC DOUBLE-GATE TRANSISTORS CAN BE MADE ON THE SAME SUBSTRATE
    6.
    发明申请
    METHOD FOR MAKING ASYMMETRIC DOUBLE-GATE TRANSISTORS BY WHICH ASYMMETRIC AND SYMMETRIC DOUBLE-GATE TRANSISTORS CAN BE MADE ON THE SAME SUBSTRATE 有权
    用不对称和对称双栅极晶体管制作不对称双栅极晶体管的方法可以在相同的基板上

    公开(公告)号：US20100317167A1

    公开(公告)日：2010-12-16

    申请号：US12521311

    申请日：2007-12-28

    申请人： Maud Vinet ,  Olivier Thomas ,  Olivier Rozeau ,  Thierry Poiroux

    发明人： Maud Vinet ,  Olivier Thomas ,  Olivier Rozeau ,  Thierry Poiroux

    IPC分类号： H01L21/336

    CPC分类号： H01L27/1104 ,  G11C11/412 ,  H01L27/11 ,  H01L29/78645

    摘要： A method for fabricating a microelectronic device with one or plural double-gate transistors, including: a) forming one or plural structures on a substrate including at least a first block configured to form a first gate of a double-gate transistor, and at least a second block configured to form the second gate of said double-gate, the first block and the second block being located on opposite sides of at least one semiconducting zone and separated from the semiconducting zone by a first gate dielectric zone and a second gate dielectric zone respectively, and b) doping at least one or plural semiconducting zones in the second block of at least one given structure among the structures, using at least one implantation selective relative to the first block, the second block being covered by a hard mask, a critical dimension of the hard mask being larger than the critical dimension of the second block.

    摘要翻译： 一种用于制造具有一个或多个双栅极晶体管的微电子器件的方法，包括：a）在至少包括构成为形成双栅极晶体管的第一栅极的第一块的至少一个衬底上形成一个或多个结构，并且至少 第二块，其被配置为形成所述双栅极的第二栅极，所述第一块和所述第二块位于至少一个半导体区的相对侧上，并且通过第一栅极介电区和第二栅极电介质与所述半导体区分离 并且b）使用相对于第一块选择性的至少一种植入，在所述结构中掺杂至少一个给定结构的第二块中的至少一个或多个半导体区域，所述第二块被硬掩模覆盖， 硬掩模的临界尺寸大于第二块的临界尺寸。