公开(公告)号：US06552340B1

公开(公告)日：2003-04-22

申请号：US09686805

申请日：2000-10-12

Applicant: Ondrej L. Krivanek ,  Niklas Dellby ,  Andrew R. Lupini

Inventor： Ondrej L. Krivanek ,  Niklas Dellby ,  Andrew R. Lupini

IPC: H01J3721

CPC classification number: H01J37/153 ,  H01J37/21 ,  H01J37/28

Abstract: An autoadjusting charged-particle probe-forming apparatus improving the resolution of probe-forming charged-particle optical systems by minimizing optical aberrations. The apparatus comprises a source of charged particles, a probe-forming system of charged-particle lenses, a plurality of detectors optionally comprising a two-dimensional image detector, power supplies, a computer and appropriate software. Images are recorded by the two-dimensional detector and analyzed to determine the aberration characteristics of the apparatus. Alternately, multiple scanned images are recorded by a scanned image detector and also analyzed to determine the aberration characteristics of the apparatus. The aberration characteristics are used to automatically adjust the apparatus for improved optical performance.

Abstract translation: 一种自动调节带电粒子探针形成装置，通过最小化光学像差来提高探针形成带电粒子光学系统的分辨率。 该装置包括带电粒子源，带电粒子透镜的探针形成系统，可选地包括二维图像检测器的多个检测器，电源，计算机和适当的软件。 图像由二维检测器记录并进行分析，以确定装置的像差特性。 或者，多个扫描图像由扫描图像检测器记录，并且还被分析以确定装置的像差特性。 像差特性用于自动调整装置以改善光学性能。