公开(公告)号：US11029673B2

公开(公告)日：2021-06-08

申请号：US16006614

申请日：2018-06-12

申请人： PDF Solutions, Inc.

发明人： Tomonori Honda ,  Rohan D. Kekatpure ,  Jeffrey Drue David

IPC分类号： G05B19/418 ,  H01L21/67 ,  G05B13/02

摘要： Robust machine learning predictions. Temporal dependencies of process targets for different machine learning models can be captured and evaluated for the impact on process performance for target. The most robust of these different models is selected for deployment based on minimizing variance for the desired performance characteristic.

公开(公告)号：US10777470B2

公开(公告)日：2020-09-15

申请号：US16365538

申请日：2019-03-26

申请人： PDF Solutions, Inc.

发明人： Lin Lee Cheong ,  Tomonori Honda ,  Rohan D. Kekatpure ,  Lakshmikar Kuravi ,  Jeffrey Drue David

IPC分类号： G06F11/22 ,  G06F17/50 ,  H01L21/66 ,  G06N20/00 ,  G01R31/26

摘要： Testing data is evaluated by machine learning tools to determine whether to include or exclude chips from further testing.