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公开(公告)号:US11081325B2
公开(公告)日:2021-08-03
申请号:US14917094
申请日:2014-09-03
发明人: Peter Polcik , Enrico Franzke , Marcus Wolff
IPC分类号: H01J37/34 , C23C14/34 , C23C14/06 , C04B35/447 , C04B35/645 , H01M10/0562 , H01M6/40 , C23C14/14 , H01M10/0525
摘要: The present invention relates to a conductive target material comprising essentially one lithium compound, preferably lithium phosphate, and carbon, and also typical impurities. The invention further relates to a process for producing a conductive target material and to the use thereof.
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公开(公告)号:US11862444B2
公开(公告)日:2024-01-02
申请号:US16753898
申请日:2018-09-05
申请人: PLANSEE SE
IPC分类号: H01J37/34 , C23C14/34 , C23C14/08 , C04B35/495 , C04B35/645
CPC分类号: H01J37/3429 , C04B35/495 , C04B35/645 , C04B35/6455 , C23C14/083 , C23C14/3414 , C23C14/3485 , H01J37/3426 , C04B2235/3251 , C04B2235/3256 , C04B2235/5436 , C04B2235/604 , C04B2235/666
摘要: An electrically conductive, oxidic target material includes a proportion of substoichiometric molybdenum oxide phases of at least 60% by volume, an MoO2 phase in a proportion of 2-20% by volume, and optionally an MoO3 phase in a proportion of 0-20% by volume. The substoichiometric molybdenum oxide phase proportion is formed by one or more substoichiometric MoO3-y phase(s), where y is in each case in a range from 0.05 to 0.25. A process for producing the target material and a process for using the target material are also provided.
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