公开(公告)号：US20150292949A1

公开(公告)日：2015-10-15

申请号：US14646835

申请日：2013-11-01

Applicant: Panasonic Intellectual Property Management Co., Ltd.

Inventor： Toshinari Noda ,  Takashi Kubo ,  Anping Gao

IPC: G01J5/02 ,  G01J5/34 ,  H01L37/02

CPC classification number: G01J5/023 ,  G01J5/024 ,  G01J5/046 ,  G01J5/34 ,  H01L37/02

Abstract: An infrared detecting device includes a substrate and a thermal photo detecting element. The substrate includes a concave portion, and a frame portion positioned on the periphery of the concave portion. The thermal photo detecting element includes leg portions and a detecting portion. The leg portions are connected on the frame portion so that the detecting portion is positioned above the concave portion. The thermal photo detecting element includes a first electrode layer disposed on the substrate, a detecting layer disposed on the first electrode layer, and a second electrode layer disposed on the detecting layer. The linear thermal expansion coefficient of the first electrode layer is larger than the linear thermal expansion coefficient of the substrate. The linear thermal expansion coefficient of the substrate is larger than the linear thermal expansion coefficient of the detecting layer.

Abstract translation: 红外线检测装置包括基板和热光检测元件。 基板包括凹部和位于凹部的周边上的框架部。 热光检测元件包括腿部和检测部。 腿部连接在框架部分上，使得检测部分位于凹部的上方。 热光检测元件包括设置在基板上的第一电极层，设置在第一电极层上的检测层和设置在检测层上的第二电极层。 第一电极层的线性热膨胀系数大于衬底的线性热膨胀系数。 基板的线性热膨胀系数大于检测层的线性热膨胀系数。