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公开(公告)号:US09244094B2
公开(公告)日:2016-01-26
申请号:US14718493
申请日:2015-05-21
Inventor: Hitoshi Yosida , Nobuyuki Ibara , Hideki Ueda , Takeshi Okada , Takeshi Mori , Masatosi Nomura , Katumi Kakimoto , Yuji Suzuki
IPC: G01P15/125 , G01P15/08 , G01P15/18
CPC classification number: G01P15/125 , G01P15/0802 , G01P15/18 , G01P2015/0831
Abstract: An acceleration sensor includes a weight portion having a recess section and a solid section, beam portions, a movable electrode provided on the opposite surface of the weight portion from an open surface of the recess section to extend over the recess section and the solid section, a first fixed electrode arranged at the opposite side of the movable electrode from the recess section, and a second fixed electrode arranged at the opposite side of the movable electrode from the solid section. The acceleration sensor detects acceleration using a change in capacitance between the movable electrode and the fixed electrodes caused by rotation of the weight portion. The beam portions are shifted toward the recess section such that an angle between a perpendicular line extending from a gravity center position of the weight portion to the rotation axis and a surface of the movable electrode becomes equal to 45 degrees.
Abstract translation: 加速度传感器包括具有凹部和实心部分的重量部分,梁部分,设置在重物部分的与凹部的开口表面相反的表面上以在凹部和实心部分上延伸的可动电极, 布置在可动电极的与凹部相反的一侧的第一固定电极,以及布置在可动电极与固体部分的相反侧的第二固定电极。 加速度传感器使用重量部分的旋转引起的可移动电极和固定电极之间的电容变化来检测加速度。 梁部分朝向凹部移动,使得从重量部分的重心位置到旋转轴线延伸的垂直线与可动电极的表面之间的角度等于45度。
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公开(公告)号:US20160025768A1
公开(公告)日:2016-01-28
申请号:US14874845
申请日:2015-10-05
Inventor: Hitoshi Yosida , Nobuyuki Ibara , Hideki Ueda , Takeshi Okada , Takeshi Mori , Masatosi Nomura , Katumi Kakimoto , Yuji Suzuki
IPC: G01P15/125
CPC classification number: G01P15/125 , G01P15/0802 , G01P15/18 , G01P2015/0831
Abstract: An acceleration sensor includes a weight portion having a recess section and a solid section, beam portions, a movable electrode provided on the opposite surface of the weight portion from an open surface of the recess section to extend over the recess section and the solid section, a first fixed electrode arranged at the opposite side of the movable electrode from the recess section, and a second fixed electrode arranged at the opposite side of the movable electrode from the solid section. The acceleration sensor detects acceleration using a change in capacitance between the movable electrode and the fixed electrodes caused by rotation of the weight portion. The beam portions are shifted toward the recess section such that an angle between a perpendicular line extending from a gravity center position of the weight portion to the rotation axis and a surface of the movable electrode becomes equal to 45 degrees.
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公开(公告)号:US20150253350A1
公开(公告)日:2015-09-10
申请号:US14718493
申请日:2015-05-21
Inventor: Hitoshi Yosida , Nobuyuki Ibara , Hideki Ueda , Takeshi Okada , Takeshi Mori , Masatosi Nomura , Katumi Kakimoto , Yuji Suzuki
IPC: G01P15/125 , G01P15/08 , G01P15/18
CPC classification number: G01P15/125 , G01P15/0802 , G01P15/18 , G01P2015/0831
Abstract: An acceleration sensor includes a weight portion having a recess section and a solid section, beam portions, a movable electrode provided on the opposite surface of the weight portion from an open surface of the recess section to extend over the recess section and the solid section, a first fixed electrode arranged at the opposite side of the movable electrode from the recess section, and a second fixed electrode arranged at the opposite side of the movable electrode from the solid section. The acceleration sensor detects acceleration using a change in capacitance between the movable electrode and the fixed electrodes caused by rotation of the weight portion. The beam portions are shifted toward the recess section such that an angle between a perpendicular line extending from a gravity center position of the weight portion to the rotation axis and a surface of the movable electrode becomes equal to 45 degrees.
Abstract translation: 加速度传感器包括具有凹部和实心部分的重量部分,梁部分,设置在重物部分的与凹部的开口表面相反的表面上以在凹部和实心部分上延伸的可动电极, 布置在可动电极的与凹部相反的一侧的第一固定电极,以及布置在可动电极与固体部分的相反侧的第二固定电极。 加速度传感器使用重量部分的旋转引起的可移动电极和固定电极之间的电容变化来检测加速度。 梁部分朝向凹部移动,使得从重量部分的重心位置到旋转轴线延伸的垂直线与可动电极的表面之间的角度等于45度。
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