Acceleration Sensor
    2.
    发明申请
    Acceleration Sensor 审中-公开

    公开(公告)号:US20160025768A1

    公开(公告)日:2016-01-28

    申请号:US14874845

    申请日:2015-10-05

    CPC classification number: G01P15/125 G01P15/0802 G01P15/18 G01P2015/0831

    Abstract: An acceleration sensor includes a weight portion having a recess section and a solid section, beam portions, a movable electrode provided on the opposite surface of the weight portion from an open surface of the recess section to extend over the recess section and the solid section, a first fixed electrode arranged at the opposite side of the movable electrode from the recess section, and a second fixed electrode arranged at the opposite side of the movable electrode from the solid section. The acceleration sensor detects acceleration using a change in capacitance between the movable electrode and the fixed electrodes caused by rotation of the weight portion. The beam portions are shifted toward the recess section such that an angle between a perpendicular line extending from a gravity center position of the weight portion to the rotation axis and a surface of the movable electrode becomes equal to 45 degrees.

    Acceleration Sensor
    3.
    发明申请
    Acceleration Sensor 审中-公开
    加速度传感器

    公开(公告)号:US20150253350A1

    公开(公告)日:2015-09-10

    申请号:US14718493

    申请日:2015-05-21

    CPC classification number: G01P15/125 G01P15/0802 G01P15/18 G01P2015/0831

    Abstract: An acceleration sensor includes a weight portion having a recess section and a solid section, beam portions, a movable electrode provided on the opposite surface of the weight portion from an open surface of the recess section to extend over the recess section and the solid section, a first fixed electrode arranged at the opposite side of the movable electrode from the recess section, and a second fixed electrode arranged at the opposite side of the movable electrode from the solid section. The acceleration sensor detects acceleration using a change in capacitance between the movable electrode and the fixed electrodes caused by rotation of the weight portion. The beam portions are shifted toward the recess section such that an angle between a perpendicular line extending from a gravity center position of the weight portion to the rotation axis and a surface of the movable electrode becomes equal to 45 degrees.

    Abstract translation: 加速度传感器包括具有凹部和实心部分的重量部分,梁部分,设置在重物部分的与凹部的开口表面相反的表面上以在凹部和实心部分上延伸的可动电极, 布置在可动电极的与凹部相反的一侧的第一固定电极,以及布置在可动电极与固体部分的相反侧的第二固定电极。 加速度传感器使用重量部分的旋转引起的可移动电极和固定电极之间的电容变化来检测加速度。 梁部分朝向凹部移动,使得从重量部分的重心位置到旋转轴线延伸的垂直线与可动电极的表面之间的角度等于45度。

    Acceleration sensor
    6.
    发明授权

    公开(公告)号:US10126322B2

    公开(公告)日:2018-11-13

    申请号:US15617777

    申请日:2017-06-08

    Abstract: An acceleration sensor includes a weight portion having a recess section and a solid section, beam portions, a movable electrode provided on the opposite surface of the weight portion from an open surface of the recess section to extend over the recess section and the solid section, a first fixed electrode arranged at the opposite side of the movable electrode from the recess section, and a second fixed electrode arranged at the opposite side of the movable electrode from the solid section. The acceleration sensor detects acceleration using a change in capacitance between the movable electrode and the fixed electrodes caused by rotation of the weight portion. The beam portions are shifted toward the recess section such that an angle between a perpendicular line extending from a gravity center position of the weight portion to the rotation axis and a surface of the movable electrode becomes equal to 45 degrees.

    Acceleration sensor
    7.
    发明授权

    公开(公告)号:US09702895B2

    公开(公告)日:2017-07-11

    申请号:US14874845

    申请日:2015-10-05

    CPC classification number: G01P15/125 G01P15/0802 G01P15/18 G01P2015/0831

    Abstract: An acceleration sensor includes a weight portion having a recess section and a solid section, beam portions, a movable electrode provided on the opposite surface of the weight portion from an open surface of the recess section to extend over the recess section and the solid section, a first fixed electrode arranged at the opposite side of the movable electrode from the recess section, and a second fixed electrode arranged at the opposite side of the movable electrode from the solid section. The acceleration sensor detects acceleration using a change in capacitance between the movable electrode and the fixed electrodes caused by rotation of the weight portion. The beam portions are shifted toward the recess section such that an angle between a perpendicular line extending from a gravity center position of the weight portion to the rotation axis and a surface of the movable electrode becomes equal to 45 degrees.

    Acceleration sensor
    8.
    发明授权
    Acceleration sensor 有权
    加速度传感器

    公开(公告)号:US09244094B2

    公开(公告)日:2016-01-26

    申请号:US14718493

    申请日:2015-05-21

    CPC classification number: G01P15/125 G01P15/0802 G01P15/18 G01P2015/0831

    Abstract: An acceleration sensor includes a weight portion having a recess section and a solid section, beam portions, a movable electrode provided on the opposite surface of the weight portion from an open surface of the recess section to extend over the recess section and the solid section, a first fixed electrode arranged at the opposite side of the movable electrode from the recess section, and a second fixed electrode arranged at the opposite side of the movable electrode from the solid section. The acceleration sensor detects acceleration using a change in capacitance between the movable electrode and the fixed electrodes caused by rotation of the weight portion. The beam portions are shifted toward the recess section such that an angle between a perpendicular line extending from a gravity center position of the weight portion to the rotation axis and a surface of the movable electrode becomes equal to 45 degrees.

    Abstract translation: 加速度传感器包括具有凹部和实心部分的重量部分,梁部分,设置在重物部分的与凹部的开口表面相反的表面上以在凹部和实心部分上延伸的可动电极, 布置在可动电极的与凹部相反的一侧的第一固定电极,以及布置在可动电极与固体部分的相反侧的第二固定电极。 加速度传感器使用重量部分的旋转引起的可移动电极和固定电极之间的电容变化来检测加速度。 梁部分朝向凹部移动,使得从重量部分的重心位置到旋转轴线延伸的垂直线与可动电极的表面之间的角度等于45度。

    MEMS device
    9.
    发明授权
    MEMS device 有权
    MEMS器件

    公开(公告)号:US09550663B2

    公开(公告)日:2017-01-24

    申请号:US14764572

    申请日:2014-02-03

    Abstract: A MEMS device includes a movable section, a frame, a beam, and an electrode substrate. The frame surrounds a surrounding of the movable section. The beam extends from at least a part of the frame, and is connected to the movable section. The electrode substrate includes a fixed electrode, an extended electrode, and a substrate section. The fixed electrode is formed on the electrode substrate in at least a part of a region facing a swing section. The extended electrode is connected to the fixed electrode, and is formed on the electrode substrate in at least a part of a region facing the shaft.

    Abstract translation: MEMS器件包括可移动部分,框架,光束和电极基板。 框架围绕可动部分的周围。 梁从框架的至少一部分延伸,并连接到可移动部分。 电极基板包括固定电极,延伸电极和基板部分。 在面向摆动部的区域的至少一部分中,在电极基板上形成固定电极。 延伸电极连接到固定电极,并且在面向轴的区域的至少一部分中形成在电极基板上。

    Sensor device
    10.
    发明授权

    公开(公告)号:US12117466B2

    公开(公告)日:2024-10-15

    申请号:US17882309

    申请日:2022-08-05

    CPC classification number: G01P3/483 G01P15/125 G01P2015/0831

    Abstract: A sensor device includes a conductive layer. The conductive layer is interposed between a first principal surface of an IC chip and a sensor element and faces the sensor element via a resin-based adhesive layer. The sensor element includes: a moving part including a moving electrode; a fixed part including a fixed electrode forming capacitance between the moving electrode and itself; a first terminal connected to the moving electrode; and a second terminal connected to the fixed electrode. The IC chip includes: a signal processor that processes a detection signal from the second terminal; a first voltage generator that generates a first voltage as an operating voltage for the processor; and a second voltage generator that generates a second voltage corresponding to the sensor element's reference potential applied to the first terminal. The conductive layer is electrically connected to the first terminal.

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