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公开(公告)号:US11885621B2
公开(公告)日:2024-01-30
申请号:US17415340
申请日:2020-02-04
Inventor: Koichiro Nakashima , Takashi Uchida , Yusuke Nakamura , Hideki Ueda , Naruhito Noda , Toshitsugu Konishi , Toshio Yamazaki
IPC: G01C19/5783 , B81B7/00 , G01C19/5684
CPC classification number: G01C19/5783 , B81B7/007 , B81B7/0048 , G01C19/5684 , B81B2201/0242
Abstract: A sensor device includes a sensor element, a substrate, and a bonding wire. Over the substrate, provided is the sensor element. The bonding wire forms at least part of a connection path that electrically connects the sensor element and the substrate together. The bonding wire is provided to connect two connection surfaces that intersect with each other.
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公开(公告)号:US20160025768A1
公开(公告)日:2016-01-28
申请号:US14874845
申请日:2015-10-05
Inventor: Hitoshi Yosida , Nobuyuki Ibara , Hideki Ueda , Takeshi Okada , Takeshi Mori , Masatosi Nomura , Katumi Kakimoto , Yuji Suzuki
IPC: G01P15/125
CPC classification number: G01P15/125 , G01P15/0802 , G01P15/18 , G01P2015/0831
Abstract: An acceleration sensor includes a weight portion having a recess section and a solid section, beam portions, a movable electrode provided on the opposite surface of the weight portion from an open surface of the recess section to extend over the recess section and the solid section, a first fixed electrode arranged at the opposite side of the movable electrode from the recess section, and a second fixed electrode arranged at the opposite side of the movable electrode from the solid section. The acceleration sensor detects acceleration using a change in capacitance between the movable electrode and the fixed electrodes caused by rotation of the weight portion. The beam portions are shifted toward the recess section such that an angle between a perpendicular line extending from a gravity center position of the weight portion to the rotation axis and a surface of the movable electrode becomes equal to 45 degrees.
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公开(公告)号:US20150253350A1
公开(公告)日:2015-09-10
申请号:US14718493
申请日:2015-05-21
Inventor: Hitoshi Yosida , Nobuyuki Ibara , Hideki Ueda , Takeshi Okada , Takeshi Mori , Masatosi Nomura , Katumi Kakimoto , Yuji Suzuki
IPC: G01P15/125 , G01P15/08 , G01P15/18
CPC classification number: G01P15/125 , G01P15/0802 , G01P15/18 , G01P2015/0831
Abstract: An acceleration sensor includes a weight portion having a recess section and a solid section, beam portions, a movable electrode provided on the opposite surface of the weight portion from an open surface of the recess section to extend over the recess section and the solid section, a first fixed electrode arranged at the opposite side of the movable electrode from the recess section, and a second fixed electrode arranged at the opposite side of the movable electrode from the solid section. The acceleration sensor detects acceleration using a change in capacitance between the movable electrode and the fixed electrodes caused by rotation of the weight portion. The beam portions are shifted toward the recess section such that an angle between a perpendicular line extending from a gravity center position of the weight portion to the rotation axis and a surface of the movable electrode becomes equal to 45 degrees.
Abstract translation: 加速度传感器包括具有凹部和实心部分的重量部分,梁部分,设置在重物部分的与凹部的开口表面相反的表面上以在凹部和实心部分上延伸的可动电极, 布置在可动电极的与凹部相反的一侧的第一固定电极,以及布置在可动电极与固体部分的相反侧的第二固定电极。 加速度传感器使用重量部分的旋转引起的可移动电极和固定电极之间的电容变化来检测加速度。 梁部分朝向凹部移动,使得从重量部分的重心位置到旋转轴线延伸的垂直线与可动电极的表面之间的角度等于45度。
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公开(公告)号:US12140430B2
公开(公告)日:2024-11-12
申请号:US17774381
申请日:2020-11-06
Inventor: Hideki Ueda , Yusuke Nakamura , Koichiro Nakashima , Takashi Uchida , Toshio Yamazaki , Hiroyuki Fujii , Chikara Nara
IPC: G01C19/5783 , B81B7/00
Abstract: A sensor device includes a sensor element, a supporting member, a substrate, and a bonding wire. The supporting member is electrically connected to the sensor element. The substrate is electrically connected to the supporting member. The bonding wire forms at least part of a connection path that electrically connects the sensor element and the supporting member together. The substrate and an installation member on which the sensor element is installed intersect with each other. The sensor element and the supporting member are separated from each other.
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公开(公告)号:US10534013B2
公开(公告)日:2020-01-14
申请号:US15526333
申请日:2016-01-08
Inventor: Yuki Maegawa , Hideki Ueda , Hideaki Fujiura , Takeshi Uemura , Hiroshi Nakatsuka , Tsuyoshi Sakaue , Rie Okamoto , Shoya Kida
IPC: H05K5/00 , G01P1/02 , G01P15/125 , H05K5/02 , H05K5/03
Abstract: A sensor includes a sensor element, a package accommodating the sensor element in an inside of the package, a grounding electrode disposed in the package, a lid covering an opening of the package, and a lead extending from the package. The lead includes first and second portions. The first portion of the lead is electrically connected to the grounding electrode and extends along a side surface of the package with a gap provided between the first portion and the side surface. The second portion of the lead is disposed between the lid and the package and extends toward the inside of the package. In this sensor, the opening can be sealed without soldering and reliably connect the lid to the grounding electrode.
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公开(公告)号:US10126322B2
公开(公告)日:2018-11-13
申请号:US15617777
申请日:2017-06-08
Inventor: Hitoshi Yoshida , Nobuyuki Ibara , Hideki Ueda , Takeshi Okada , Takeshi Mori , Masatoshi Nomura , Katsumi Kakimoto , Yuji Suzuki
IPC: G01P15/125 , G01P15/08 , G01P15/18
Abstract: An acceleration sensor includes a weight portion having a recess section and a solid section, beam portions, a movable electrode provided on the opposite surface of the weight portion from an open surface of the recess section to extend over the recess section and the solid section, a first fixed electrode arranged at the opposite side of the movable electrode from the recess section, and a second fixed electrode arranged at the opposite side of the movable electrode from the solid section. The acceleration sensor detects acceleration using a change in capacitance between the movable electrode and the fixed electrodes caused by rotation of the weight portion. The beam portions are shifted toward the recess section such that an angle between a perpendicular line extending from a gravity center position of the weight portion to the rotation axis and a surface of the movable electrode becomes equal to 45 degrees.
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公开(公告)号:US09702895B2
公开(公告)日:2017-07-11
申请号:US14874845
申请日:2015-10-05
Inventor: Hitoshi Yoshida , Nobuyuki Ibara , Hideki Ueda , Takeshi Okada , Takeshi Mori , Masatoshi Nomura , Katsumi Kakimoto , Yuji Suzuki
IPC: G01P15/125 , G01P15/08 , G01P15/18
CPC classification number: G01P15/125 , G01P15/0802 , G01P15/18 , G01P2015/0831
Abstract: An acceleration sensor includes a weight portion having a recess section and a solid section, beam portions, a movable electrode provided on the opposite surface of the weight portion from an open surface of the recess section to extend over the recess section and the solid section, a first fixed electrode arranged at the opposite side of the movable electrode from the recess section, and a second fixed electrode arranged at the opposite side of the movable electrode from the solid section. The acceleration sensor detects acceleration using a change in capacitance between the movable electrode and the fixed electrodes caused by rotation of the weight portion. The beam portions are shifted toward the recess section such that an angle between a perpendicular line extending from a gravity center position of the weight portion to the rotation axis and a surface of the movable electrode becomes equal to 45 degrees.
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公开(公告)号:US09244094B2
公开(公告)日:2016-01-26
申请号:US14718493
申请日:2015-05-21
Inventor: Hitoshi Yosida , Nobuyuki Ibara , Hideki Ueda , Takeshi Okada , Takeshi Mori , Masatosi Nomura , Katumi Kakimoto , Yuji Suzuki
IPC: G01P15/125 , G01P15/08 , G01P15/18
CPC classification number: G01P15/125 , G01P15/0802 , G01P15/18 , G01P2015/0831
Abstract: An acceleration sensor includes a weight portion having a recess section and a solid section, beam portions, a movable electrode provided on the opposite surface of the weight portion from an open surface of the recess section to extend over the recess section and the solid section, a first fixed electrode arranged at the opposite side of the movable electrode from the recess section, and a second fixed electrode arranged at the opposite side of the movable electrode from the solid section. The acceleration sensor detects acceleration using a change in capacitance between the movable electrode and the fixed electrodes caused by rotation of the weight portion. The beam portions are shifted toward the recess section such that an angle between a perpendicular line extending from a gravity center position of the weight portion to the rotation axis and a surface of the movable electrode becomes equal to 45 degrees.
Abstract translation: 加速度传感器包括具有凹部和实心部分的重量部分,梁部分,设置在重物部分的与凹部的开口表面相反的表面上以在凹部和实心部分上延伸的可动电极, 布置在可动电极的与凹部相反的一侧的第一固定电极,以及布置在可动电极与固体部分的相反侧的第二固定电极。 加速度传感器使用重量部分的旋转引起的可移动电极和固定电极之间的电容变化来检测加速度。 梁部分朝向凹部移动,使得从重量部分的重心位置到旋转轴线延伸的垂直线与可动电极的表面之间的角度等于45度。
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公开(公告)号:US09550663B2
公开(公告)日:2017-01-24
申请号:US14764572
申请日:2014-02-03
Inventor: Kazuo Goda , Takumi Taura , Shinichi Kishimoto , Hideki Ueda , Takeshi Mori
IPC: H01L29/84 , B81B3/00 , G01P15/125 , G01P15/08
CPC classification number: B81B3/0008 , B81B2201/0235 , G01P15/125 , G01P2015/0834 , H01L29/84
Abstract: A MEMS device includes a movable section, a frame, a beam, and an electrode substrate. The frame surrounds a surrounding of the movable section. The beam extends from at least a part of the frame, and is connected to the movable section. The electrode substrate includes a fixed electrode, an extended electrode, and a substrate section. The fixed electrode is formed on the electrode substrate in at least a part of a region facing a swing section. The extended electrode is connected to the fixed electrode, and is formed on the electrode substrate in at least a part of a region facing the shaft.
Abstract translation: MEMS器件包括可移动部分,框架,光束和电极基板。 框架围绕可动部分的周围。 梁从框架的至少一部分延伸,并连接到可移动部分。 电极基板包括固定电极,延伸电极和基板部分。 在面向摆动部的区域的至少一部分中,在电极基板上形成固定电极。 延伸电极连接到固定电极,并且在面向轴的区域的至少一部分中形成在电极基板上。
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公开(公告)号:US12117466B2
公开(公告)日:2024-10-15
申请号:US17882309
申请日:2022-08-05
Inventor: Hideki Ueda , Koichiro Nakashima
IPC: G01P3/483 , G01P15/08 , G01P15/125
CPC classification number: G01P3/483 , G01P15/125 , G01P2015/0831
Abstract: A sensor device includes a conductive layer. The conductive layer is interposed between a first principal surface of an IC chip and a sensor element and faces the sensor element via a resin-based adhesive layer. The sensor element includes: a moving part including a moving electrode; a fixed part including a fixed electrode forming capacitance between the moving electrode and itself; a first terminal connected to the moving electrode; and a second terminal connected to the fixed electrode. The IC chip includes: a signal processor that processes a detection signal from the second terminal; a first voltage generator that generates a first voltage as an operating voltage for the processor; and a second voltage generator that generates a second voltage corresponding to the sensor element's reference potential applied to the first terminal. The conductive layer is electrically connected to the first terminal.
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