公开(公告)号：US06304367B1

公开(公告)日：2001-10-16

申请号：US09315600

申请日：1999-05-20

申请人： Paolo Battilana ,  Giorgio Vergani ,  Claudio Boffito ,  Marco Succi ,  Luca Toia

发明人： Paolo Battilana ,  Giorgio Vergani ,  Claudio Boffito ,  Marco Succi ,  Luca Toia

IPC分类号： B01J2734

CPC分类号： B01D53/28 ,  B01D53/261 ,  B01J20/06

摘要： A process for the conversion of boric acid to dry boron oxide by thermal decomposition is described. Boron oxide may be produced as a powder or in the form of pellets, and in either form may additionally be enclosed in a gas permeable container to control particulate contamination. Applications are further disclosed for the use of boron oxide formed by this process to remove water from evacuated chambers and from gases. Specific applications include removing water from both inert gases and reactive gases, especially halogen and halogenated gases. Further applications directed to optical amplifiers and gas purifiers are also discussed.

摘要翻译： 描述了通过热分解将硼酸转化为干燥氧化硼的方法。 氧化硼可以以粉末形式或以颗粒的形式生产，并且任何形式的氧化物可另外封装在透气容器中以控制颗粒污染。 进一步公开了用于通过该方法形成的氧化硼从抽空室和气体中除去水的应用。 具体应用包括从惰性气体和反应气体中去除水分，特别是卤素和卤化气体。 还讨论了针对光放大器和气体净化器的进一步应用。

公开(公告)号：US06522457B2

公开(公告)日：2003-02-18

申请号：US09930815

申请日：2001-08-15

申请人： Paolo Battilana ,  Giorgio Vergani ,  Claudio Boffito ,  Marco Succi ,  Luca Toia

发明人： Paolo Battilana ,  Giorgio Vergani ,  Claudio Boffito ,  Marco Succi ,  Luca Toia

IPC分类号： B01J2734

CPC分类号： F26B5/005 ,  H01S3/0346

摘要： A process for the conversion of boric acid to dry boron oxide by thermal decomposition is described. Boron oxide may be produced as a powder or in the form of pellets, and in either form may additionally be enclosed in a gas permeable container to control particulate contamination. Applications are further disclosed for the use of boron oxide formed by this process to remove water from evacuated chambers and from gases. Specific applications include removing water from both inert gases and reactive gases, especially halogen and halogenated gases. Further applications directed to optical amplifiers and gas purifiers are also discussed.

摘要翻译： 描述了通过热分解将硼酸转化为干燥氧化硼的方法。 氧化硼可以以粉末形式或以颗粒的形式生产，并且任何形式的氧化物可另外封装在透气容器中以控制颗粒污染。 进一步公开了用于通过该方法形成的氧化硼从抽空室和气体中除去水的应用。 具体应用包括从惰性气体和反应气体中去除水分，特别是卤素和卤化气体。 还讨论了针对光放大器和气体净化器的进一步应用。

公开(公告)号：US07011799B2

公开(公告)日：2006-03-14

申请号：US10622916

申请日：2003-07-17

申请人： Giorgio Vergani ,  Marco Succi ,  Carolina Solcia

发明人： Giorgio Vergani ,  Marco Succi ,  Carolina Solcia

IPC分类号： C01C1/02 ,  B01D53/46

CPC分类号： C01C1/024

摘要： A method for removing oxygen from ammonia at low temperature is described. In one embodiment, oxygen contaminated ammonia is contacted with a getter material that includes iron and manganese that sorbs oxygen to yield ammonia that is substantially oxygen free. In one embodiment, the process of contacting ammonia with the getter material takes place at about 25° C. In another embodiment the weight ratio between iron and manganese is about 7:1. In another embodiment, the getter material is dispersed on an inert support of specific surface greater than 100 m2/g. In one embodiment, impure ammonia is contacted with getter material including iron and manganese that sorbs oxygen and with a drying agent that absorbs water to yield deoxygenated anhydrous ammonia. In yet another embodiment, an apparatus consisting of a gas inlet, gas purification chamber and gas outlet that deoxygenates ammonia when charged with getter material that includes iron and manganese is described. In one embodiment, getter material and drying agent are mixed together inside the gas purification chamber. In another aspect a method for producing semiconductor devices with high purity ammonia is described.

摘要翻译： 描述了一种在低温下从氨中除氧的方法。 在一个实施方案中，氧气污染的氨与包含铁和锰的吸气剂材料接触，吸附氧气产生基本上无氧的氨。 在一个实施方案中，使氨与吸气材料接触的过程在约25℃下进行。在另一个实施方案中，铁和锰之间的重量比为约7:1。 在另一个实施方案中，吸气剂材料分散在比例大于100m 2 / g的惰性载体上。 在一个实施方案中，不纯氨与吸附氧气的吸收剂材料（包括铁和锰）接触，并与吸收水的干燥剂接触以产生脱氧无水氨。 在另一个实施方案中，描述了一种装有气体入口，气体净化室和气体出口的装置，当装有包含铁和锰的吸气剂材料时，氨气脱氧。 在一个实施方案中，吸气剂材料和干燥剂在气体净化室内混合在一起。 另一方面，描述了一种制备具有高纯度氨的半导体器件的方法。

公开(公告)号：US06776970B1

公开(公告)日：2004-08-17

申请号：US08961792

申请日：1997-10-31

申请人： Giorgio Vergani ,  Marco Succi ,  Carolina Solcia

发明人： Giorgio Vergani ,  Marco Succi ,  Carolina Solcia

IPC分类号： B01J800

CPC分类号： C01C1/024

摘要： A method for removing oxygen from ammonia at low temperature is described. In one embodiment, oxygen contaminated ammonia is contacted with a getter material that includes iron and manganese that sorbs oxygen to yield ammonia that is substantially oxygen free. In one embodiment, the process of contacting ammonia with the getter material takes place at about 25° C. In another embodiment the weight ratio between iron and manganese is about 7:1. In another embodiment, the getter material is dispersed on an inert support of specific surface greater than 100 m2/g. In one embodiment, impure ammonia is contacted with getter material including iron and manganese that sorbs oxygen and with a drying agent that absorbs water to yield deoxygenated anhydrous ammonia. In yet another embodiment, an apparatus consisting of a gas inlet, gas purification chamber and gas outlet that deoxygenates ammonia when charged with getter material that includes iron and manganese is described. In one embodiment, getter material and drying agent are mixed together inside the gas purification chamber. In another aspect a method for producing semiconductor devices with high purity ammonia is described.

摘要翻译： 描述了一种在低温下从氨中除氧的方法。 在一个实施方案中，氧气污染的氨与包含铁和锰的吸气剂材料接触，吸附氧气产生基本上无氧的氨。 在一个实施方案中，使氨与吸气材料接触的过程在约25℃下进行。在另一个实施方案中，铁和锰之间的重量比为约7:1。 在另一个实施方案中，吸气剂材料分散在大于100m 2 / g的特定表面的惰性载体上。 在一个实施方案中，不纯氨与吸附氧气的吸收剂材料（包括铁和锰）接触，并与吸收水的干燥剂接触以产生脱氧无水氨。 在另一个实施方案中，描述了一种装有气体入口，气体净化室和气体出口的装置，当装有包含铁和锰的吸气剂材料时，氨气脱氧。 在一个实施方案中，吸气剂材料和干燥剂在气体净化室内混合在一起。 另一方面，描述了一种制备具有高纯度氨的半导体器件的方法。

公开(公告)号：US5716588A

公开(公告)日：1998-02-10

申请号：US686583

申请日：1996-07-26

申请人： Giorgio Vergani ,  Marco Succi ,  Carolina Solcia

发明人： Giorgio Vergani ,  Marco Succi ,  Carolina Solcia

IPC分类号： C01C1/02 ,  C01B21/07

CPC分类号： C01C1/024

摘要： A method for removing oxygen from ammonia at low temperature is described. In one embodiment, oxygen contaminated ammonia is contacted with a getter material that includes iron and manganese that sorbs oxygen to yield ammonia that is substantially oxygen free. In one embodiment, the process of contacting ammonia with the getter material takes place at about 25.degree. C. In another embodiment the weight ratio between iron and manganese is about 7:1. In another embodiment, the getter material is dispersed on an inert support of specific surface greater than 100 m.sup.2/ g. In one embodiment, impure ammonia is contacted with getter material including iron and manganese that sorbs oxygen and with a drying agent that absorbs water to yield deoxygenated anhydrous ammonia. In yet another embodiment, an apparatus consisting of a gas inlet, gas purification chamber and gas outlet that deoxygenates ammonia when charged with getter material that includes iron and manganese is described. In one embodiment, getter material and drying agent are mixed together inside the gas purification chamber. In another aspect a method for producing semiconductor devices with high purity ammonia is described.

摘要翻译： 描述了一种在低温下从氨中除氧的方法。 在一个实施方案中，氧气污染的氨与包含铁和锰的吸气剂材料接触，吸附氧气产生基本上无氧的氨。 在一个实施方案中，使氨与吸气材料接触的过程在约25℃下进行。在另一个实施方案中，铁和锰之间的重量比为约7:1。 在另一个实施方案中，吸气剂材料分散在大于100m 2 / g的特定表面的惰性载体上。 在一个实施方案中，不纯氨与吸附氧气的吸收剂材料（包括铁和锰）接触，并与吸收水的干燥剂接触以产生脱氧无水氨。 在另一个实施方案中，描述了一种装有气体入口，气体净化室和气体出口的装置，当装有包含铁和锰的吸气剂材料时，氨气脱氧。 在一个实施方案中，吸气剂材料和干燥剂在气体净化室内混合在一起。 另一方面，描述了一种制备具有高纯度氨的半导体器件的方法。

公开(公告)号：US20050074382A1

公开(公告)日：2005-04-07

申请号：US10622916

申请日：2003-07-17

申请人： Giorgio Vergani ,  Marco Succi ,  Carolina Solcia

发明人： Giorgio Vergani ,  Marco Succi ,  Carolina Solcia

IPC分类号： C01C1/02 ,  B01D53/34

CPC分类号： C01C1/024

摘要： A method for removing oxygen from ammonia at low temperature is described. In one embodiment, oxygen contaminated ammonia is contacted with a getter material that includes iron and manganese that sorbs oxygen to yield ammonia that is substantially oxygen free. In one embodiment, the process of contacting ammonia with the getter material takes place at about 25° C. In another embodiment the weight ratio between iron and manganese is about 7:1. In another embodiment, the getter material is dispersed on an inert support of specific surface greater than 100 m2/g. In one embodiment, impure ammonia is contacted with getter material including iron and manganese that sorbs oxygen and with a drying agent that absorbs water to yield deoxygenated anhydrous ammonia. In yet another embodiment, an apparatus consisting of a gas inlet, gas purification chamber and gas outlet that deoxygenates ammonia when charged with getter material that includes iron and manganese is described. In one embodiment, getter material and drying agent are mixed together inside the gas purification chamber. In another aspect a method for producing semiconductor devices with high purity ammonia is described.

摘要翻译： 描述了一种在低温下从氨中除氧的方法。 在一个实施方案中，氧气污染的氨与包含铁和锰的吸气剂材料接触，吸附氧气产生基本上无氧的氨。 在一个实施方案中，使氨与吸气材料接触的过程在约25℃下进行。在另一个实施方案中，铁和锰之间的重量比为约7:1。 在另一个实施方案中，吸气剂材料分散在大于100m 2 / g的特定表面的惰性载体上。 在一个实施方案中，不纯氨与吸附氧气的吸收剂材料（包括铁和锰）接触，并与吸收水的干燥剂接触以产生脱氧无水氨。 在另一个实施方案中，描述了一种装有气体入口，气体净化室和气体出口的装置，当装有包含铁和锰的吸气剂材料时，氨气脱氧。 在一个实施方案中，吸气剂材料和干燥剂在气体净化室内混合在一起。 另一方面，描述了一种制备具有高纯度氨的半导体器件的方法。

公开(公告)号：US06797182B2

公开(公告)日：2004-09-28

申请号：US10273862

申请日：2002-10-18

申请人： Giorgio Vergani ,  Marco Succi

发明人： Giorgio Vergani ,  Marco Succi

IPC分类号： B01D5300

CPC分类号： B01D53/02 ,  B01D53/04 ,  B01D2256/12 ,  B01D2257/706 ,  B01D2257/80 ,  B01D2258/0216 ,  B01J20/02 ,  B01J20/18 ,  C07F1/00 ,  C07F1/005 ,  C07F3/00 ,  C07F3/10 ,  C07F5/00 ,  C07F5/062 ,  C07F5/064 ,  C07F5/065 ,  C07F5/066 ,  C07F7/003 ,  C07F7/2208 ,  C07F9/90 ,  C07F9/94 ,  C07F17/00 ,  C07F17/02 ,  C23C16/18 ,  C23C16/4402

摘要： A process for the purification of organometallic compounds or heteroatomic organic compounds from oxygen, water and from the compounds deriving from the reaction of water and oxygen with the organometallic or heteroatomic compounds whose purification is sought, comprising the operation of contacting the organometallic or heteroatomic compound to be purified in the liquid state or in form of vapor, pure or in a carrier gas, with a hydrogenated getter alloy, and optionally also with one or more gas sorber materials selected among palladium on porous supports and a mixture of iron and manganese supported on zeolites.

摘要翻译： 从氧，水和衍生自水和氧的反应的化合物与要求纯化的有机金属或杂原子化合物纯化有机金属化合物或杂原子有机化合物的方法，包括使有机金属或杂原子化合物与 以液态或蒸汽形式纯化或在载气中用氢化吸气剂合金，以及任选地还可以选择一种或多种选自多孔载体上的钯和负载在铁上的铁和锰的混合物的气体吸附剂材料 沸石。

公开(公告)号：US06168645A

公开(公告)日：2001-01-02

申请号：US09174055

申请日：1998-10-15

申请人： Marco Succi ,  Giorgio Vergani ,  D'Arcy H. Lorimer

发明人： Marco Succi ,  Giorgio Vergani ,  D'Arcy H. Lorimer

IPC分类号： B01D5304

CPC分类号： C23C16/45561 ,  B01D53/0454 ,  B01D53/30 ,  B01D53/346 ,  C23C16/4402

摘要： A gas purification system includes a gas purification unit and one or more safety devices. The gas purification unit includes an enclosure containing a purification material that exhibits an exothermic reaction when exposed to certain gas contaminants. The gas purification unit also has an inlet coupled to an unpurified gas inlet line and an outlet coupled to a purified gas outlet line. A safety device can be coupled either to the unpurified gas input line or the purified output line, or both, and develops an alarm signal when gas contaminants exceed a given concentration level for a period of time.

摘要翻译： 气体净化系统包括气体净化单元和一个或多个安全装置。 气体净化单元包括含有当暴露于某些气体污染物时显示放热反应的净化材料的外壳。 气体净化单元还具有连接到未净化气体入口管线的入口和连接到净化气体出口管线的出口。 安全装置可以耦合到未净化的气体输入管线或纯化的输出管线或两者，并且当气体污染物超过给定的浓度水平一段时间时，会发出报警信号。

公开(公告)号：US07260484B2

公开(公告)日：2007-08-21

申请号：US11040076

申请日：2005-01-21

申请人： Luca Pusterla ,  Antonio Bonucci ,  Roberto Giannantonio ,  Marco Succi

发明人： Luca Pusterla ,  Antonio Bonucci ,  Roberto Giannantonio ,  Marco Succi

IPC分类号： G01N27/64

CPC分类号： G01N27/64 ,  G01N27/622 ,  Y10T436/16 ,  Y10T436/172307

摘要： A method for carrying out analyses of a gas comprising one or more species Si, Sj, . . . , Sn by using of ion mobility spectrometry includes in carrying out two subsequent analyses in different conditions and comparing the results of these two analyses. The different conditions in the two analyses are such as to modify either the residence time of the ions corresponding to the species in the reaction zone or in the drift zone of the ion mobility spectrometer, or, selectively, the concentration of at least one of these ions.

摘要翻译： 一种用于对包含一种或多种物质S 1，S 3，J 3的气体进行分析的方法。 。 。 通过使用离子迁移率光谱测定法，包括在不同条件下进行两次后续分析并比较这两种分析的结果。 这两个分析中的不同条件是改变对应于离子迁移谱仪的反应区或漂移区中的物质的离子的停留时间，或者选择性地改变这些中的至少一种的浓度 离子。

公开(公告)号：US5968468A

公开(公告)日：1999-10-19

申请号：US944032

申请日：1997-09-23

申请人： Marco Succi ,  Valerio Furlan

发明人： Marco Succi ,  Valerio Furlan

IPC分类号： B01D53/14 ,  B01J20/02 ,  C01B21/04 ,  C01B23/00 ,  C01B3/00

CPC分类号： C01B23/0084 ,  B01J20/02 ,  C01B21/0483 ,  C01B23/00 ,  C01B2210/0053

摘要： An apparatus is described for the removal of impurity gases such as O.sub.2, CH.sub.4, CO, CO.sub.2 and H.sub.2 from impure inert gases such as rare gases and N.sub.2. The apparatus comprises an impure inert gas inlet, a housing containing first and second gas sorbing materials and a purified gas outlet. The first gas sorbing material may be a Zr--V--Fe getter alloy if the gas to be purified is a rare gas, whereas it may be a Zr--Fe alloy if the gas to be purified is N.sub.2. The second gas sorbing material is a Zr--Al alloy which ensures that the purified inert gas has an extremely low level of hydrogen. A process for the removal of impurity gases from inert gases and ensuring an extremely low level of hydrogen in the purified gas is also described.

摘要翻译： 描述了用于从诸如稀有气体和N 2等不纯的惰性气体中除去诸如O 2，CH 4，CO，CO 2和H 2的杂质气体的装置。 该装置包括不纯的惰性气体入口，包含第一和第二气体吸附材料的壳体和净化的气体出口。 如果要净化的气体是稀有气体，则第一种气体吸附材料可以是Zr-V-Fe吸气剂合金，而如果要净化的气体为N2，则可以是Zr-Fe合金。 第二气体吸附材料是Zr-Al合金，其确保纯化的惰性气体具有极低的氢气水平。 还描述了从惰性气体中除去杂质气体并确保净化气体中极低水平的氢气的方法。