公开(公告)号：US20130293893A1

公开(公告)日：2013-11-07

申请号：US13932481

申请日：2013-07-01

Applicant: Pason Systems Corp.

Inventor： David Bonyuet ,  Vidi A. Saptari

IPC: G01J3/42

CPC classification number: G01J3/42 ,  G01J3/02 ,  G01J3/0235 ,  G01J3/06 ,  G01J3/32 ,  G01J2003/1247 ,  G01N21/274 ,  G01N21/314 ,  G01N21/33 ,  G01N21/3504 ,  G01N2021/3174 ,  G01N2201/129

Abstract: The invention relates to methods and systems for measuring and/or monitoring the chemical composition of a sample (e.g., a process stream), and/or detecting specific substances or compounds in a sample, using light spectroscopy such as absorption, emission and fluorescence spectroscopy. In certain embodiments, the invention relates to spectrometers with rotating narrow-band interference optical filter(s) to measure light intensity as a function of wavelength. More specifically, in certain embodiments, the invention relates to a spectrometer system with a rotatable filter assembly with a position detector rigidly attached thereto, and, in certain embodiments, the further use of various oversampling methods and techniques described herein, made particularly useful in conjunction with the rotatable filter assembly. In preferred embodiments, the rotatable filter is tilted with respect to the rotation axis, thereby providing surprisingly improved measurement stability and significantly improved control of the wavelength coverage of the filter spectrometer.

Abstract translation: 本发明涉及用于测量和/或监测样品（例如工艺流）的化学成分和/或检测样品中的特定物质或化合物的方法和系统，使用光谱如吸收，发射和荧光光谱法 。 在某些实施例中，本发明涉及具有旋转窄带干涉光学滤波器的光谱仪，以测量作为波长的函数的光强度。 更具体地说，在某些实施例中，本发明涉及一种具有可转动的过滤器组件的光谱仪系统，其中位置检测器与其刚性连接，并且在某些实施例中，进一步使用本文描述的各种过采样方法和技术，特别适用于组合 与可旋转的过滤器组件。 在优选实施例中，可旋转过滤器相对于旋转轴线倾斜，从而提供惊人的改进的测量稳定性并显着改进对过滤光谱仪的波长覆盖的控制。

公开(公告)号：US09488570B2

公开(公告)日：2016-11-08

申请号：US14511842

申请日：2014-10-10

Applicant: MKS Instruments, Inc. ,  Pason Systems Corp.

Inventor： Vidi A. Saptari

IPC: G01N21/31 ,  G01N21/05 ,  G01N21/3504 ,  G01N33/22 ,  G01N21/359 ,  G01N21/3518

CPC classification number: G01N21/3518 ,  G01N21/05 ,  G01N21/31 ,  G01N21/3504 ,  G01N21/359 ,  G01N33/225 ,  G01N2021/3536 ,  G01N2021/3595 ,  G01N2201/023

Abstract: Described herein is a spectroscopic system and method for measuring and monitoring the chemical composition and/or impurity content of a sample or sample stream using absorption light spectroscopy. Specifically, in certain embodiments, this invention relates to the use of sample pressure variation to alter the magnitude of the absorption spectrum (e.g., wavelength-dependent signal) received for the sample, thereby obviating the need for a reference or ‘zero’ sample. Rather than use a reference or ‘zero’ sample, embodiments described herein obtain a spectrum/signal from a sample-containing cell at both a first pressure and a second (different) pressure.

Abstract translation: 本文描述的是使用吸收光谱测量和监测样品或样品流的化学成分和/或杂质含量的光谱系统和方法。 具体来说，在某些实施方案中，本发明涉及使用样品压力变化来改变为样品接收的吸收光谱的幅度（例如，依赖于波长的信号），从而避免了对参考或“零”样品的需要。 不是使用参考或“零”样本，本文所述的实施例在第一压力和第二（不同）压力下都从含样品的电池获得光谱/信号。

公开(公告)号：US09739708B2

公开(公告)日：2017-08-22

申请号：US15290684

申请日：2016-10-11

Applicant: MKS Instruments, Inc. ,  Pason Systems Corp.

Inventor： Vidi A. Saptari

IPC: G01N21/3518 ,  G01N33/22 ,  G01N21/3504 ,  G01N21/05 ,  G01N21/31 ,  G01N21/359 ,  G01N21/35

CPC classification number: G01N21/3518 ,  G01N21/05 ,  G01N21/31 ,  G01N21/3504 ,  G01N21/359 ,  G01N33/225 ,  G01N2021/3536 ,  G01N2021/3595 ,  G01N2201/023

Abstract: Described herein is a spectroscopic system and method for measuring and monitoring the chemical composition and/or impurity content of a sample or sample stream using absorption light spectroscopy. Specifically, in certain embodiments, this invention relates to the use of sample pressure variation to alter the magnitude of the absorption spectrum (e.g., wavelength-dependent signal) received for the sample, thereby obviating the need for a reference or ‘zero’ sample. Rather than use a reference or ‘zero’ sample, embodiments described herein obtain a spectrum/signal from a sample-containing cell at both a first pressure and a second (different) pressure.

公开(公告)号：US20170030829A1

公开(公告)日：2017-02-02

申请号：US15290684

申请日：2016-10-11

Applicant: MKS Instruments, Inc. ,  Pason Systems Corp.

Inventor： Vidi A. Saptari

IPC: G01N21/3518 ,  G01N33/22

CPC classification number: G01N21/3518 ,  G01N21/05 ,  G01N21/31 ,  G01N21/3504 ,  G01N21/359 ,  G01N33/225 ,  G01N2021/3536 ,  G01N2021/3595 ,  G01N2201/023

Abstract: Described herein is a spectroscopic system and method for measuring and monitoring the chemical composition and/or impurity content of a sample or sample stream using absorption light spectroscopy. Specifically, in certain embodiments, this invention relates to the use of sample pressure variation to alter the magnitude of the absorption spectrum (e.g., wavelength-dependent signal) received for the sample, thereby obviating the need for a reference or ‘zero’ sample. Rather than use a reference or ‘zero’ sample, embodiments described herein obtain a spectrum/signal from a sample-containing cell at both a first pressure and a second (different) pressure.

Abstract translation: 本文描述的是使用吸收光谱测量和监测样品或样品流的化学成分和/或杂质含量的光谱系统和方法。 具体来说，在某些实施方案中，本发明涉及使用样品压力变化来改变为样品接收的吸收光谱的幅度（例如，依赖于波长的信号），从而避免了对参考或“零”样品的需要。 不是使用参考或“零”样本，本文所述的实施例在第一压力和第二（不同）压力下都从含样品的电池获得光谱/信号。

公开(公告)号：US09250132B2

公开(公告)日：2016-02-02

申请号：US13932481

申请日：2013-07-01

Applicant: Pason Systems Corp.

Inventor： David Bonyuet ,  Vidi A. Saptari

IPC: G01N21/25 ,  G01J3/42 ,  G01J3/02 ,  G01J3/06 ,  G01J3/32 ,  G01N21/27 ,  G01N21/31 ,  G01J3/12 ,  G01N21/33 ,  G01N21/3504

CPC classification number: G01J3/42 ,  G01J3/02 ,  G01J3/0235 ,  G01J3/06 ,  G01J3/32 ,  G01J2003/1247 ,  G01N21/274 ,  G01N21/314 ,  G01N21/33 ,  G01N21/3504 ,  G01N2021/3174 ,  G01N2201/129

Abstract: The invention relates to methods and systems for measuring and/or monitoring the chemical composition of a sample (e.g., a process stream), and/or detecting specific substances or compounds in a sample, using light spectroscopy such as absorption, emission and fluorescence spectroscopy. In certain embodiments, the invention relates to spectrometers with rotating narrow-band interference optical filter(s) to measure light intensity as a function of wavelength. More specifically, in certain embodiments, the invention relates to a spectrometer system with a rotatable filter assembly with a position detector rigidly attached thereto, and, in certain embodiments, the further use of various oversampling methods and techniques described herein, made particularly useful in conjunction with the rotatable filter assembly. In preferred embodiments, the rotatable filter is tilted with respect to the rotation axis, thereby providing surprisingly improved measurement stability and significantly improved control of the wavelength coverage of the filter spectrometer.