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公开(公告)号：US20050068989A1
公开(公告)日：2005-03-31
申请号：US10675642
申请日：2003-09-30
申请人： Patrick Herbert , Richard Harris , Frederick Discenzo , Michael Knieser , Robert Kretschmann , Mark Lucak , Robert Pond , Louis Szabo
发明人： Patrick Herbert , Richard Harris , Frederick Discenzo , Michael Knieser , Robert Kretschmann , Mark Lucak , Robert Pond , Louis Szabo
IPC分类号： H04J3/07
摘要： A microelectromechanical system (MEMS) strain gauge includes at least one flexible arm that can be caused to oscillate. Transverse strain on the arm changes the resonant frequency of the arm, providing an indication of the transverse strain of the substrate.
摘要翻译： 微机电系统（MEMS）应变仪包括至少一个能够振荡的柔性臂。 臂上的横向应变改变了臂的共振频率，提供了衬底的横向应变的指示。
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公开(公告)号：US20050067901A1
公开(公告)日：2005-03-31
申请号：US10675537
申请日：2003-09-30
申请人： Richard Harris , Patrick Herbert , Michael Knieser , Robert Kretschmann , Mark Lucak , Robert Pond , Louis Szabo , Frederick Discenzo
发明人： Richard Harris , Patrick Herbert , Michael Knieser , Robert Kretschmann , Mark Lucak , Robert Pond , Louis Szabo , Frederick Discenzo
CPC分类号： H02K47/00 , H02K99/10 , Y10T307/826
摘要： A microelectromechanical system (MEMS) device is used to transfer power from a source generator to a power generator that delivers electrical power to a load, while maintaining electrical isolation between the source generator and power generator for size critical applications where transformers or coupling capacitors would not be practical, but where electrical isolation is desired.
摘要翻译： 微机电系统（MEMS）装置用于将功率从源发生器传递到向负载提供电力的发电机，同时在尺寸关键应用中保持源发电机和发电机之间的电隔离，其中变压器或耦合电容器不会 实用，但需要电隔离。
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公开(公告)号：US20060096947A1
公开(公告)日：2006-05-11
申请号：US11299151
申请日：2005-12-09
IPC分类号： H01B13/00
CPC分类号： B81C1/00484 , B81B2201/0235 , B81B2203/0315 , B81C1/00626 , B81C2201/019 , B81C2203/0109 , H01G5/40
摘要： A method for fabricating an electrically isolated MEMS device having an outer stationary MEMS element and an inner movable MEMS element is provided that does not use a sacrificial layer. Rather, a pair of spacers are defined on the outer portions of the upper surface of a conductive wafer, and an insulating material is deposited thereon. The spacers are attached to a substrate to define an internal void therein. The wafer is then patterned to form the outer MEMS element as well as a conductive member for the inner MEMS element, separated from the outer MEMS element by a gap. A portion of the insulating layer that is disposed in the gap is then removed, thereby releasing the inner MEMS element from the stationary MEMS element.
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