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8 条记录 (耗时 0.018 秒)

    Selective etching of oxides from substrates
    1.
    发明授权
    Selective etching of oxides from substrates 有权
    从基底中选择性地蚀刻氧化物

    公开(公告)号：US07431853B2

    公开(公告)日：2008-10-07

    申请号：US11370541

    申请日：2006-03-08

    申请人： Paul D. Mumbauer ,  Paul Roman ,  Robert Grant

    发明人： Paul D. Mumbauer ,  Paul Roman ,  Robert Grant

    IPC分类号： C23F1/00

    CPC分类号： H01L21/31116 ,  B81C1/00595 ,  B81C1/0092 ,  B81C1/00928

    摘要： A method and system for release etching a micro-electrical-mechanical-systems (MEMS) device from a substrate. In one aspect, the invention is a method comprising (a) supporting at least one substrate having a sacrificial oxide and a non-sacrificial material in a process chamber at a pressure and at a temperature; (b) introducing a gas phase mixture comprising a halide-containing species and an alcohol vapor selected from a group consisting of ethanol, 1-propanol, and an aliphatic alcohol having four carbon groups into the process chamber, the gas phase mixture having a volumetric ratio of the halide-containing species to the alcohol vapor of approximately 2 or less; and (c) etching the sacrificial oxide with the gas phase mixture. In another aspect, the invention is a system for carrying out the method.

    摘要翻译： 一种用于从基板释放蚀刻微电子机械系统（MEMS）器件的方法和系统。 在一个方面，本发明是一种方法，其包括（a）在压力和温度下在处理室中支撑具有牺牲氧化物和非牺牲材料的至少一个衬底; （b）将含有卤化物的物质和选自乙醇，1-丙醇和具有四个碳原子的脂族醇的醇蒸气的气相混合物引入处理室，气相混合物具有体积 含卤素物质与醇蒸气的比例约为2或更小; 和（c）用气相混合物蚀刻牺牲氧化物。 另一方面，本发明是一种执行该方法的系统。

    Selective etching of oxides from substrates
    2.
    发明申请
    Selective etching of oxides from substrates 有权
    从基底中选择性地蚀刻氧化物

    公开(公告)号：US20060207968A1

    公开(公告)日：2006-09-21

    申请号：US11370541

    申请日：2006-03-08

    申请人： Paul Mumbauer ,  Paul Roman ,  Robert Grant

    发明人： Paul Mumbauer ,  Paul Roman ,  Robert Grant

    IPC分类号： C03C25/68 ,  H01L21/306

    CPC分类号： H01L21/31116 ,  B81C1/00595 ,  B81C1/0092 ,  B81C1/00928

    摘要： A method and system for release etching a micro-electrical-mechanical-systems (MEMS) device from a substrate. In one aspect, the invention is a method comprising (a) supporting at least one substrate having a sacrificial oxide and a non-sacrificial material in a process chamber at a pressure and at a temperature; (b) introducing a gas phase mixture comprising a halide-containing species and an alcohol vapor selected from a group consisting of ethanol, 1-propanol, and an aliphatic alcohol having four carbon groups into the process chamber, the gas phase mixture having a volumetric ratio of the halide-containing species to the alcohol vapor of approximately 2 or less; and (c) etching the sacrificial oxide with the gas phase mixture. In another aspect, the invention is a system for carrying out the method.

    摘要翻译： 一种用于从基板释放蚀刻微电子机械系统（MEMS）器件的方法和系统。 在一个方面，本发明是一种方法，其包括（a）在压力和温度下在处理室中支撑具有牺牲氧化物和非牺牲材料的至少一个衬底; （b）将含有卤化物的物质和选自乙醇，1-丙醇和具有四个碳原子的脂族醇的醇蒸气的气相混合物引入处理室，气相混合物具有体积 含卤素物质与醇蒸气的比例约为2或更小; 和（c）用气相混合物蚀刻牺牲氧化物。 另一方面，本发明是一种执行该方法的系统。

    Fiber-optical structure of high apparent power of resolution
    3.
    发明授权
    Fiber-optical structure of high apparent power of resolution 失效
    高分辨率的视在功率的光纤结构

    公开(公告)号：US3942866A

    公开(公告)日：1976-03-09

    申请号：US437884

    申请日：1974-01-30

    申请人： Paul Roman

    发明人： Paul Roman

    IPC分类号： G02B6/04 ,  G02B23/26 ,  G02B27/00 ,  G02B5/16

    CPC分类号： G02B23/26

    摘要： A light-conducting fiber, or a bundle of such fibers, is provided with a ht-absorbing shield extending beyond an end face of the fiber or bundle proximal to a light-reflecting object. The shield forms a light-guiding channel, of a length substantially exceeding its width, which limits the effective aperture angle of the fiber or bundle to considerably less than its inherent value on the order of 60.degree..

    摘要翻译： 光导纤维或这种纤维束设置有延伸超过靠近光反射物体的纤维或束的端面的光吸收屏蔽。 屏蔽形成长度大致超过其宽度的导光通道，这限制了纤维或束的有效孔径角度，远低于其60°左右的固有值。

    Open Web Services-Based Indoor Climate Control System
    4.
    发明申请
    Open Web Services-Based Indoor Climate Control System 有权
    开放的基于Web服务的室内气候控制系统

    公开(公告)号：US20080281472A1

    公开(公告)日：2008-11-13

    申请号：US12041472

    申请日：2008-03-03

    申请人： Marek Podgorny ,  Luke Beca ,  Roman Markowski ,  Edward A. Bogucz ,  Suresh Santanam ,  Edward Lipson ,  Paul Roman ,  Greg Michalak ,  Gregg Lewandowski ,  Paul D. Gelling

    发明人： Marek Podgorny ,  Luke Beca ,  Roman Markowski ,  Edward A. Bogucz ,  Suresh Santanam ,  Edward Lipson ,  Paul Roman ,  Greg Michalak ,  Gregg Lewandowski ,  Paul D. Gelling

    IPC分类号： G05D23/00

    CPC分类号： G05B15/02 ,  F24F11/30 ,  F24F11/58 ,  F24F2120/10 ,  G05B2219/2642

    摘要： The present invention relates generally to a building automation system, and, more particularly, to an Internet-centric, open, extensible software and hardware framework supporting all aspects of control and monitoring of a smart building ecosphere. The present invention further relates to an “intelligent,” real-time control system capable of both autonomous process control and interaction with system users and system administrators, which is configured to accommodate functional extensions and a broad array of sensors and control devices. The system allows individuals to communicate, monitor and adjust their personal environmental preferences (temperature, light, humidity, white noise, etc.) much like they would in an automobile, via the Internet. The system is equipped with an occupancy sensor that recognizes the presence and identity of the individual. A built-in expert system can make decisions based on data from multiple sources so that the system can alter its activity to conserve energy while maintaining users' comfort.

    摘要翻译： 本发明一般涉及一种楼宇自动化系统，更具体地说，涉及一种以互联网为中心，开放，可扩展的软件和硬件框架，支持智能建筑生态圈的控制和监控的所有方面。 本发明还涉及一种“智能”实时控制系统，其能够进行自主过程控制和与系统用户和系统管理员的交互，其被配置为容纳功能扩展和广泛的传感器和控制设备。 该系统允许个人通过互联网与汽车中的个人环境偏好（温度，光线，湿度，白噪声等）进行通信，监控和调整。 该系统配备有识别个人的存在和身份的占用传感器。 内置的专家系统可以根据来自多个来源的数据做出决策，以便系统可以改变其活动以节省能源，同时保持用户的舒适度。

    Open web services-based indoor climate control system
    7.
    发明授权
    Open web services-based indoor climate control system 有权
    开放的基于Web服务的室内气候控制系统

    公开(公告)号：US07904209B2

    公开(公告)日：2011-03-08

    申请号：US12041472

    申请日：2008-03-03

    申请人： Marek Podgorny ,  Luke Beca ,  Roman Markowski ,  Edward A. Bogucz ,  Suresh Santanam ,  Edward Lipson ,  Paul Roman ,  Greg Michalak ,  Gregg Lewandowski ,  Paul D. Gelling

    发明人： Marek Podgorny ,  Luke Beca ,  Roman Markowski ,  Edward A. Bogucz ,  Suresh Santanam ,  Edward Lipson ,  Paul Roman ,  Greg Michalak ,  Gregg Lewandowski ,  Paul D. Gelling

    IPC分类号： G05D23/00

    CPC分类号： G05B15/02 ,  F24F11/30 ,  F24F11/58 ,  F24F2120/10 ,  G05B2219/2642

    摘要： The present invention relates generally to a building automation system, and, more particularly, to an Internet-centric, open, extensible software and hardware framework supporting all aspects of control and monitoring of a smart building ecosphere. The present invention further relates to an “intelligent,” real-time control system capable of both autonomous process control and interaction with system users and system administrators, which is configured to accommodate functional extensions and a broad array of sensors and control devices. The system allows individuals to communicate, monitor and adjust their personal environmental preferences (temperature, light, humidity, white noise, etc.) much like they would in an automobile, via the Internet. The system is equipped with an occupancy sensor that recognizes the presence and identity of the individual. A built-in expert system can make decisions based on data from multiple sources so that the system can alter its activity to conserve energy while maintaining users' comfort.

    摘要翻译： 本发明一般涉及一种楼宇自动化系统，更具体地说，涉及一种以互联网为中心，开放，可扩展的软件和硬件框架，支持智能建筑生态圈的控制和监控的所有方面。 本发明还涉及一种“智能”实时控制系统，其能够进行自主过程控制和与系统用户和系统管理员的交互，其被配置为容纳功能扩展和广泛的传感器和控制设备。 该系统允许个人通过互联网与汽车中的个人环境偏好（温度，光线，湿度，白噪声等）进行通信，监控和调整。 该系统配备有识别个人的存在和身份的占用传感器。 内置的专家系统可以根据来自多个来源的数据做出决策，以便系统可以改变其活动以节省能源，同时保持用户的舒适度。

    Optical reading head
    8.
    发明授权
    Optical reading head 失效
    光学阅读头

    公开(公告)号：US3953730A

    公开(公告)日：1976-04-27

    申请号：US482741

    申请日：1974-06-24

    申请人： Guy Henry ,  Paul Roman ,  Claude Tetevuide

    发明人： Guy Henry ,  Paul Roman ,  Claude Tetevuide

    IPC分类号： B07C3/14 ,  G02B27/00 ,  G06K7/10 ,  G06K7/12 ,  G02B5/16

    CPC分类号： B07C3/14 ,  G06K7/10762

    摘要： An optical reading head is described which is particularly designed to read codes generally formed by fluorescent or phosphorescent bars. The codes are carried by a support, such as an envelope which moves past the head at a relatively high speed. The support carrying the code is illuminated from a light source through a set of outgoing optical fibers, and the modulated light retransmitted by the code markings is conveyed through a set of incoming optical fibers to a processing device. Such a reading head is particularly adapted for use in a postal sorting system.

    摘要翻译： 描述了一种光学读取头，其特别设计用于读取通常由荧光或磷光棒形成的代码。 代码由诸如以相对高的速度移动经过头部的信封的支撑件承载。 携带代码的支持体通过一组输出光纤从光源照射，并且由代码标记重发的调制光通过一组输入光纤传送到处理设备。 这种读头特别适用于邮政分拣系统。