公开(公告)号：US06078055A

公开(公告)日：2000-06-20

申请号：US44082

申请日：1998-03-18

申请人： Paul M. Bridger ,  Thomas C. McGill

发明人： Paul M. Bridger ,  Thomas C. McGill

IPC分类号： B82B3/00 ,  G03F7/20 ,  H01J37/30 ,  H01J37/304

CPC分类号： G03F7/70383 ,  B82Y10/00 ,  B82Y40/00 ,  H01J37/3174 ,  G01Q80/00 ,  H01J2237/31776 ,  Y10S977/859 ,  Y10S977/868

摘要： A proximity lithography device using a modified electric field. In the preferred embodiment, the modified electric field is formed by illuminating a tip of a scanning probe in close proximity of the resist surface with a laser. In an alternate embodiment, the modified electric field is formed by positioning a tip of a scanning probe within close proximity of the resist surface, where illumination from a laser is in total internal reflection within the resist. The proximity of the tip to the resist surface creates a tunneling effect and forms the modified electric field. The modified electric field alters the resist for lithographic patterning.

摘要翻译： 使用改性电场的接近光刻装置。 在优选实施例中，通过用激光照射紧邻抗蚀剂表面的扫描探针的尖端来形成修改的电场。 在替代实施例中，通过将扫描探针的尖端定位在抗蚀剂表面的紧密附近来形成修改的电场，其中来自激光器的照射在抗蚀剂内完全内反射。 尖端与抗蚀剂表面的接近产生隧道效应并形成修改的电场。 改性电场改变光刻胶用于光刻图案化。

公开(公告)号：US06579068B2

公开(公告)日：2003-06-17

申请号：US09923483

申请日：2001-08-07

申请人： Paul M. Bridger ,  Robert P. Strittmatter ,  Robert A. Beach ,  Thomas C. McGill

发明人： Paul M. Bridger ,  Robert P. Strittmatter ,  Robert A. Beach ,  Thomas C. McGill

IPC分类号： F04B1924

CPC分类号： F04B43/12 ,  F04B43/043

摘要： A suspended p-GaN membrane is formed using photochemical etching which membrane can then be used in a variety of MEMS devices. In the illustrated embodiment a pump is comprised of the p-GaN membrane suspended between two opposing, parallel n-GaN support pillars, which are anchored to a rigid substrate below the pillars. The p-GaN membrane bows upward between the pillars in order to relieve stress built up during the epitaxial growth of membrane. This bowing substantially increases the volume of the enclosed micro-channel defined between membrane and substrate below. The ends of membrane are finished off by a gradual transition to the flat underlying n-GaN layer in which fluidic channels may also be defined to provide inlet and outlet channels to microchannel. A traveling wave or sequential voltage applied to the electrodes causes the membrane to deform and provide a peristaltic pumping action in the microchannel.

公开(公告)号：US06288404B1

公开(公告)日：2001-09-11

申请号：US09579450

申请日：2000-05-26

申请人： Paul M. Bridger ,  Thomas C. McGill

发明人： Paul M. Bridger ,  Thomas C. McGill

IPC分类号： H01J37304

CPC分类号： G03F7/70383 ,  G01Q80/00 ,  H01J37/3174 ,  H01J2237/31776 ,  Y10S977/859 ,  Y10S977/868

摘要： A proximity lithography device using a modified electric field. In the preferred embodiment, the modified electric field is formed by illuminating a tip of a scanning probe in close proximity of the resist surface with a laser. In an alternate embodiment, the modified electric field is formed by positioning a tip of a scanning probe within close proximity of the resist surface, where illumination from a laser is in total internal reflection within the resist. The proximity of the tip to the resist surface creates a tunneling effect and forms the modified electric field. The modified electric field alters the resist for lithographic patterning.

摘要翻译： 使用改性电场的接近光刻装置。 在优选实施例中，通过用激光照射紧邻抗蚀剂表面的扫描探针的尖端来形成修改的电场。 在替代实施例中，通过将扫描探针的尖端定位在抗蚀剂表面的紧密附近来形成修改的电场，其中来自激光器的照射在抗蚀剂内完全内反射。 尖端与抗蚀剂表面的接近产生隧道效应并形成修改的电场。 改性电场改变光刻胶用于光刻图案化。

公开(公告)号：US06870992B2

公开(公告)日：2005-03-22

申请号：US10302751

申请日：2002-11-22

申请人： Charles I. Grosjean ,  Guido Hunziker ,  Paul M. Bridger ,  Oskar J. Painter

发明人： Charles I. Grosjean ,  Guido Hunziker ,  Paul M. Bridger ,  Oskar J. Painter

IPC分类号： G02B6/12 ,  G02B6/30 ,  G02B6/34 ,  G02B6/36 ,  G02B6/42 ,  G02F1/01 ,  G02F1/225 ,  H01L21/00

CPC分类号： G02F1/225 ,  G02B6/12007 ,  G02B6/30 ,  G02B6/3636 ,  G02B6/3652 ,  G02B6/3692 ,  G02B6/4206 ,  G02B2006/12097 ,  G02B2006/12176 ,  G02F1/0118

摘要： Optical components may be aligned for transverse-optical coupling by: fabricating a first optical component on a substrate; fabricating an alignment member on the substrate suitably positioned relative to the first optical component; and assembling a second optical component onto the alignment member, thereby establishing transverse optical coupling between the optical components. The substrate may preferably be substantially planar. The alignment member may mechanically engage the second optical component so as to accurately establish and stably maintain transverse optical coupling. The first optical component and the alignment member may preferably be fabricated on the substrate using precision spatially selective materials processing techniques. Transverse optical coupling between two optical components may be stably maintained by substantially embedding transverse-coupled portions of the components in a substantially solid substantially transparent low-index medium. An alignment member may serve to accurately position the transverse-coupled components prior to embedding and hold them in place during embedding.

摘要翻译： 光学部件可以通过以下方式对准：横向光耦合：在基板上制造第一光学部件; 在所述基板上制造相对于所述第一光学部件适当定位的对准部件; 并将第二光学部件组装到对准部件上，从而在光学部件之间建立横向光耦合。 衬底可以优选地基本上是平面的。 对准构件可以机械地接合第二光学部件，以便精确地建立和稳定地维持横向光耦合。 优选地，使用精确的空间选择性材料处理技术在第一基板上制造第一光学部件和对准部件。 通过将组分的横向耦合部分基本上嵌入基本上固体的基本上透明的低折射率介质中，可以稳定地维持两个光学部件之间的横向光学耦合。 对准构件可以用于在嵌入之前将横向耦合部件精确定位并将其保持在适当位置。

公开(公告)号：US06583399B1

公开(公告)日：2003-06-24

申请号：US09721463

申请日：2000-11-22

申请人： Guido Hunziker ,  Paul M. Bridger ,  Ming Cai ,  Kerry J. Vahala

发明人： Guido Hunziker ,  Paul M. Bridger ,  Ming Cai ,  Kerry J. Vahala

IPC分类号： H01J4014

CPC分类号： G01N21/7746

摘要： An optically based resonating sensor useful for detecting and discriminating specified substances present in the environment is provided. The resonating sensor comprises a light source and a coupler adapted to allow light to pass from the light source to a resonator wherein the light is stored for a specified period of time. The resonator is coupled to the coupler such that some portion of the light passing through the coupler enters the resonator and some portion of the light resonating within the resonator exits the resonator to the coupler. The outer surface of the resonator is modified such that the interaction of the modified outer surface of the resonator with a specified substance in the environment alters some characteristic of the light flowing through the sensor system. A detector is arranged to observe and detect the interactions between the modified outer surface and the light flowing through the system.

摘要翻译： 提供了一种用于检测和区分存在于环境中的特定物质的光学基础谐振传感器。 谐振传感器包括光源和适于允许光从光源传递到谐振器的耦合器，其中光存储指定的时间段。 谐振器耦合到耦合器，使得通过耦合器的光的一些部分进入谐振器，并且在谐振器内谐振的一部分光从谐振器中退出到耦合器。 谐振器的外表面被修改为使得谐振器的改进的外表面与环境中的特定物质的相互作用改变了流过传感器系统的光的一些特性。 检测器被布置成观察和检测改进的外表面和流过系统的光之间的相互作用。