公开(公告)号：US20070169800A1

公开(公告)日：2007-07-26

申请号：US11625556

申请日：2007-01-22

申请人： Pejman Fani ,  Mark Rouillard ,  John Korbler ,  James Brown ,  Chad Hosack

发明人： Pejman Fani ,  Mark Rouillard ,  John Korbler ,  James Brown ,  Chad Hosack

IPC分类号： B08B3/00 ,  B08B3/12

CPC分类号： H01L21/02057 ,  B08B3/04 ,  B08B3/10 ,  B08B3/12 ,  H01L21/67051

摘要： A system, apparatus and method for processing this flat articles, such as semiconductor wafers, with acoustical energy. In a cleaning process, the inventive system, apparatus and method can remove particles from both sides of a wafer more efficiently and effectively. in one aspect, the invention is a system for processing flat articles comprising: a rotatable support for supporting a flat article; a first dispenser for applying liquid to a first surface of a flat article on the rotatable support; a second dispenser for applying liquid to a second surface of a flat article on the rotatable support; a first transducer assembly comprising a first transducer for generating acoustic energy and a first transmitter acoustically coupled to the first transducer, the first transducer assembly positioned so that when the first dispenser applies liquid to the first surface of a flat article on the rotatable support, a first meniscus of liquid is formed between a portion of the first transmitter and the first surface of the flat article; and a second transducer assembly comprising a second transducer for generating acoustic energy and a second transmitter acoustically coupled to the second transducer, the second transducer assembly positioned so that when the second dispenser applies liquid to the second surface of the flat article on the rotatable support, a second meniscus of liquid is formed between a portion of the second transmitter and the second surface of the flat article.

摘要翻译： 用于处理具有声能的扁平制品（例如半导体晶片）的系统，装置和方法。 在清洁过程中，本发明的系统，装置和方法可以更有效和更有效地从晶片的两侧去除颗粒。 在一个方面，本发明是一种用于处理扁平制品的系统，包括：用于支撑扁平制品的可旋转支撑件; 用于将液体施加到可旋转支撑件上的扁平物品的第一表面的第一分配器; 用于将液体施加到可旋转支撑件上的平坦物品的第二表面的第二分配器; 第一传感器组件，包括用于产生声能的第一传感器和声耦合到第一换能器的第一传感器，第一传感器组件被定位成使得当第一分配器将液体施加到可旋转支撑件上的平坦物品的第一表面时， 在第一发射器的一部分和平坦物品的第一表面之间形成液体的第一弯液面; 以及第二换能器组件，其包括用于产生声能的第二换能器和声耦合到所述第二换能器的第二发射器，所述第二换能器组件被定位成使得当所述第二分配器将液体施加到所述可旋转支撑件上的所述扁平物品的第二表面时， 在第二发射器的一部分和平坦物品的第二表面之间形成液体的第二弯液面。

公开(公告)号：US20070170812A1

公开(公告)日：2007-07-26

申请号：US11625651

申请日：2007-01-22

申请人： Pejman Fani ,  Mark Rouillard

发明人： Pejman Fani ,  Mark Rouillard

IPC分类号： H01L41/00

CPC分类号： B08B3/12 ,  B06B1/0648 ,  B06B1/0655 ,  H01L21/67051 ,  H01L21/67057 ,  H01L2924/01012 ,  H01L2924/01019 ,  H01L2924/0102 ,  H01L2924/01021 ,  H01L2924/01025 ,  H01L2924/01057 ,  H01L2924/01067 ,  H01L2924/01068 ,  H01L2924/01078 ,  H01L2924/01079 ,  H01L2924/3011

摘要： A wafer cleaning system having a crystal or ceramic transducer assembly. The transducer assembly is adapted to convert electrical energy into sonic energy. The crystal or ceramic has a first conductive surface. The transducer assembly also has a transmitter made of an inert non-reactive plastic that transmits the sonic energy generated by the crystal or ceramic. The transmitter has a surface bonded directly to the conductive surface of the crystal or ceramic.

摘要翻译： 具有晶体或陶瓷换能器组件的晶片清洁系统。 换能器组件适于将电能转换成声能。 晶体或陶瓷具有第一导电表面。 换能器组件还具有由惰性非反应性塑料制成的发射器，其传输由晶体或陶瓷产生的声能。 发射器具有直接结合到晶体或陶瓷的导电表面的表面。

公开(公告)号：US08316869B2

公开(公告)日：2012-11-27

申请号：US12871286

申请日：2010-08-30

申请人： Pejman Fani ,  Mark Rouillard ,  John Korbler ,  James Brown ,  Chad Hosack

发明人： Pejman Fani ,  Mark Rouillard ,  John Korbler ,  James Brown ,  Chad Hosack

IPC分类号： B08B3/00

CPC分类号： H01L21/02057 ,  B08B3/04 ,  B08B3/10 ,  B08B3/12 ,  H01L21/67051

摘要： A system, apparatus and method for processing flat articles with acoustical energy. The inventive system, apparatus and method can remove particles from both sides of a wafer more efficiently and effectively. In one aspect, the invention is a system and/or method for processing flat articles wherein a liquid is applied to both major surfaces of the flat article. A first transducer assembly is positioned adjacent to a first of the major surfaces of the flat article and a second member is positioned adjacent to a second of the major surfaces. The first transducer assembly generates and transmits acoustical energy to the first major surface of the flat article while the second member either: (1) reflects the acoustical energy generated by the first transducer assembly back to the second major surface of the flat article; and/or (2) generates and transmits acoustical energy to the second major surface of the flat article.

摘要翻译： 用于处理具有声能的扁平制品的系统，装置和方法。 本发明的系统，装置和方法可以更有效和有效地从晶片的两侧去除颗粒。 一方面，本发明是一种用于处理扁平制品的系统和/或方法，其中将液体施加到扁平制品的两个主表面上。 第一换能器组件邻近扁平制品的第一主表面定位，并且第二构件邻近第二主表面定位。 第一换能器组件产生并将声能传递到扁平制品的第一主表面，而第二构件可以：（1）将由第一换能器组件产生的声能反射回平面物品的第二主表面; 和/或（2）产生和传播声能到平坦物品的第二主表面。

公开(公告)号：US07784478B2

公开(公告)日：2010-08-31

申请号：US11625556

申请日：2007-01-22

申请人： Pejman Fani ,  Mark Rouillard ,  John Korbler ,  James Brown ,  Chad Hosack

发明人： Pejman Fani ,  Mark Rouillard ,  John Korbler ,  James Brown ,  Chad Hosack

IPC分类号： B08B3/12

CPC分类号： H01L21/02057 ,  B08B3/04 ,  B08B3/10 ,  B08B3/12 ,  H01L21/67051

摘要： A system, apparatus and method for processing flat articles, such as semiconductor wafers, with acoustical energy. In a cleaning process, the inventive system, apparatus and method can remove particles from both sides of a wafer more efficiently and effectively. In one aspect, the invention is a system for processing flat articles comprising: a first dispenser for applying a liquid to a first surface of a flat article; a second dispenser for applying liquid to a second surface of a flat article; a first transducer assembly positioned so as to transmit acoustical energy to the first surface of the flat article; and a second transducer assembly positioned so as to transmit acoustical energy to the second surface of the flat article.

摘要翻译： 用于处理具有声能的扁平制品（例如半导体晶片）的系统，装置和方法。 在清洁过程中，本发明的系统，装置和方法可以更有效和更有效地从晶片的两侧去除颗粒。 一方面，本发明是一种用于处理扁平制品的系统，包括：用于将液体施加到平坦物品的第一表面的第一分配器; 用于将液体施加到平坦物品的第二表面的第二分配器; 第一换能器组件被定位成将声能传递到平坦物品的第一表面; 以及第二换能器组件，其定位成将声能传递到平坦物品的第二表面。

公开(公告)号：US20100326464A1

公开(公告)日：2010-12-30

申请号：US12871286

申请日：2010-08-30

申请人： Pejman Fani ,  Mark Rouillard ,  John Korbler ,  James Brown ,  Chad Hosack

发明人： Pejman Fani ,  Mark Rouillard ,  John Korbler ,  James Brown ,  Chad Hosack

IPC分类号： B08B3/12

CPC分类号： H01L21/02057 ,  B08B3/04 ,  B08B3/10 ,  B08B3/12 ,  H01L21/67051

摘要： A system, apparatus and method for processing flat articles with acoustical energy. The inventive system, apparatus and method can remove particles from both sides of a wafer more efficiently and effectively. In one aspect, the invention is a system and/or method for processing flat articles wherein a liquid is applied to both major surfaces of the flat article. A first transducer assembly is positioned adjacent to a first of the major surfaces of the flat article and a second member is positioned adjacent to a second of the major surfaces. The first transducer assembly generates and transmits acoustical energy to the first major surface of the flat article while the second member either: (1) reflects the acoustical energy generated by the first transducer assembly back to the second major surface of the flat article; and/or (2) generates and transmits acoustical energy to the second major surface of the flat article.

摘要翻译： 用于处理具有声能的扁平制品的系统，装置和方法。 本发明的系统，装置和方法可以更有效和有效地从晶片的两侧去除颗粒。 一方面，本发明是一种用于处理扁平制品的系统和/或方法，其中将液体施加到扁平制品的两个主表面上。 第一换能器组件邻近扁平制品的第一主表面定位，并且第二构件邻近第二主表面定位。 第一传感器组件产生并将声能传递到扁平制品的第一主表面，而第二构件可以：（1）将由第一换能器组件产生的声能反射回平面物品的第二主表面; 和/或（2）产生和传播声能到平坦物品的第二主表面。

公开(公告)号：US20060054182A1

公开(公告)日：2006-03-16

申请号：US11227705

申请日：2005-09-15

申请人： John Korbler ,  Ismail Kashkoush ,  John Volkert ,  Michael Peters ,  Pejman Fani

发明人： John Korbler ,  Ismail Kashkoush ,  John Volkert ,  Michael Peters ,  Pejman Fani

IPC分类号： B08B3/12

CPC分类号： H01L21/67051 ,  B08B3/12

摘要： A system and method of supplying power to a sonic energy source that minimizes damage to substrate devices during processing while increasing processing efficiency and/or effectiveness. The system and method utilize the concept of ramping the amplitude and/or varying the frequency of the electrical signal used to drive the sonic energy source, thereby resulting in corresponding ramping and/or variations in the amplitude and frequency of the resulting sonic energy being applied to the substrate. A method of processing a substrate with sonic energy comprising: a) supporting at least one substrate in a process chamber; b) generating a base electrical signal; c) transmitting the base electrical signal to an amplifier, the amplifier converting the base electrical signal into an output electrical signal having a peak amplitude; d) transmitting the output electrical signal to a transducer, the transducer converting the output electrical signal into corresponding sonic energy; e) applying the sonic energy to the at least on substrate supported in the process chamber; and f) ramping the peak amplitude of the output electrical signal.

摘要翻译： 一种向声能量源供电的系统和方法，其在处理过程中使衬底装置的损害最小化，同时提高处理效率和/或有效性。 该系统和方法利用斜率振幅和/或改变用于驱动声能量的电信号的频率的概念，从而导致所应用的声能的振幅和频率的相应斜坡和/或变化 到基底。 一种用声能处理衬底的方法，包括：a）在处理室中支撑至少一个衬底; b）产生基本电信号; c）将基本电信号发送到放大器，放大器将基本电信号转换成具有峰值振幅的输出电信号; d）将输出电信号传输到换能器，换能器将输出电信号转换成相应的声能; e）将声能施加到所述处理室中支撑的所述至少一个衬底上; 以及f）斜率输出电信号的峰值幅度。

公开(公告)号：US08435034B2

公开(公告)日：2013-05-07

申请号：US12406290

申请日：2009-03-18

申请人： Mark Gersh ,  Pejman Fani ,  John Raybuck

发明人： Mark Gersh ,  Pejman Fani ,  John Raybuck

IPC分类号： A61C1/07

CPC分类号： A61C17/20

摘要： The present invention describes an ultrasonic dental insert capable of enhanced operating efficiency. A first transducer generates ultrasonic vibrations. A connecting body has a proximal end and a distal end having a tip attached thereto. The proximal end is attached to the first transducer so as to receive the ultrasonic vibrations therefrom and to transmit the ultrasonic vibrations toward the tip attached to the distal end. The ultrasonic dental insert may be inserted into a handpiece for providing electromagnetic energy to the first transducer to generate the ultrasonic vibrations. The ultrasonic insert, when seated in the handpiece, is substantially decoupled, on a rotary axis, from the handpiece. A rotary force need only be applied to the insert to rotate it in the handpiece. At least one light source substantially proximate or distal to the tip may also be provided.

摘要翻译： 本发明描述了一种能够提高操作效率的超声波牙科插入物。 第一传感器产生超声波振动。 连接体具有近端和具有附接到其上的尖端的远端。 近端附接到第一换能器以便从其接收超声波振动，并将超声波振动传递到附接到远端的尖端。 超声波牙插入件可以插入到手持件中，以向第一换能器提供电磁能以产生超声波振动。 当超声波插入件位于手持件中时，超声波插入件在旋转轴线上基本上与手持件分离。 旋转力仅需要施加到插入件上以在手持件中旋转。 也可以提供基本上靠近或远离尖端的至少一个光源。

公开(公告)号：US20060260638A1

公开(公告)日：2006-11-23

申请号：US11370361

申请日：2006-03-08

申请人： Pejman Fani ,  Ismail Kashkoush ,  John Korbler ,  Vivek Vohra ,  Alan Walter

发明人： Pejman Fani ,  Ismail Kashkoush ,  John Korbler ,  Vivek Vohra ,  Alan Walter

IPC分类号： B08B3/12 ,  B08B7/00

CPC分类号： B08B3/12 ,  H01L21/67051

摘要： A system and method for processing and/or cleaning substrates using sonic energy that eliminates or reduces damage to the substrates. In one aspect, the invention utilizes and produces low power density sonic energy to effectively remove particles from a substrate. In another aspect, the invention utilizes and generates a clean electrical signal for driving a source of sonic energy, such as a transducer.

摘要翻译： 使用消除或减少对基底的损伤的声能处理和/或清洁基底的系统和方法。 一方面，本发明利用并产生低功率密度的声能以有效地从基底去除颗粒。 在另一方面，本发明利用并产生用于驱动声能源的清洁电信号，例如换能器。

公开(公告)号：US20080044790A1

公开(公告)日：2008-02-21

申请号：US11840922

申请日：2007-08-17

申请人： Pejman Fani ,  Mark Gersh ,  Brian Zargari ,  Christopher Quan

发明人： Pejman Fani ,  Mark Gersh ,  Brian Zargari ,  Christopher Quan

IPC分类号： A61C3/03

CPC分类号： A61C17/20 ,  A61C1/0015

摘要： The present invention relates to ultrasonic dental tools having an insert that includes monitoring mechanism(s) for usage, performance and indication mechanism(s) for replacement. The dental tool includes a dental insert having a transducer for generating ultrasonic vibrations. The ultrasonic dental insert includes a housing and a connecting body having a proximal end and a distal end having a tip attached thereto. The proximal end is attached to the transducer so as to generate the ultrasonic vibrations therefrom and to transmit the ultrasonic vibrations toward the tip attached to the distal end. In one aspect, the ultrasonic dental tool includes monitoring systems for tool usage and condition. The dental tool may include, for example, usage time monitoring circuitry, wear usage circuitry, electromagnetic monitoring circuitry and/or any other appropriate monitoring systems.

摘要翻译： 本发明涉及具有插入物的超声波牙科工具，其包括用于使用的监视机构，用于更换的性能和指示机构。 牙科工具包括具有用于产生超声波振动的换能器的牙科插入物。 超声牙科插入物包括壳体和连接体，其具有近端和具有附接到其上的尖端的远端。 近端附接到换能器，从而从其产生超声波振动，并将超声波振动传递到附接到远端的尖端。 一方面，超声牙科工具包括用于工具使用和状况的监控系统。 牙科工具可以包括例如使用时间监测电路，磨损使用电路，电磁监测电路和/或任何其它合适的监测系统。

公开(公告)号：US20110033823A1

公开(公告)日：2011-02-10

申请号：US12406290

申请日：2009-03-18

申请人： Mark Gersh ,  Pejman Fani ,  John Raybuck

发明人： Mark Gersh ,  Pejman Fani ,  John Raybuck

IPC分类号： A61C3/03

CPC分类号： A61C17/20

摘要： The present invention describes an ultrasonic dental insert capable of enhanced operating efficiency. A first transducer generates ultrasonic vibrations. A connecting body has a proximal end and a distal end having a tip attached thereto. The proximal end is attached to the first transducer so as to receive the ultrasonic vibrations therefrom and to transmit the ultrasonic vibrations toward the tip attached to the distal end. The ultrasonic dental insert may be inserted into a handpiece for providing electromagnetic energy to the first transducer to generate the ultrasonic vibrations. The ultrasonic insert, when seated in the handpiece, is substantially decoupled, on a rotary axis, from the handpiece. A rotary force need only be applied to the insert to rotate it in the handpiece. At least one light source substantially proximate or distal to the tip may also be provided.

摘要翻译： 本发明描述了一种能够提高操作效率的超声波牙科插入物。 第一传感器产生超声波振动。 连接体具有近端和具有附接到其上的尖端的远端。 近端附接到第一换能器以便从其接收超声波振动，并将超声波振动传递到附接到远端的尖端。 超声波牙插入件可以插入到手持件中，以向第一换能器提供电磁能以产生超声波振动。 当超声波插入件位于手持件中时，超声波插入件在旋转轴线上基本上与手持件分离。 旋转力仅需要施加到插入件上以在手持件中旋转。 也可以提供基本上靠近或远离尖端的至少一个光源。